VET Energy na-elekwasị anya na R&D na mmepụta nke CVD tantalum carbide (TaC) na-arụ ọrụ dị elu nke nwere mgbanaka graphite, ma na-agba mbọ ịnye isi ihe ngwọta ihe eji eme ihe maka semiconductor, fotovoltaic na ụlọ ọrụ okpomọkụ. Teknụzụ kemịkalụ kemịkalụ kemịkalụ mepụtara (CVD) nke nwere onwe ya na-etolite mkpuchi tantalum carbide siri ike na nke edo edo n'elu mkpụrụ graphite site na usoro ziri ezi, na-eme ka ngwaahịa ahụ dị elu na-eguzogide okpomọkụ (> 3000 ℃), nguzogide corrosion na ujo ujo, ịgbatị ndụ ọrụ ihe karịrị ugboro 3, yana ibelata ọnụ ahịa ndị ahịa.
Uru teknụzụ anyị:
1. Nguzogide oxidation dị elu
Na ikuku ikuku nke 1200 ℃, oxidation arọ uru ọnụego bụ ≤0.05mg/cm²/h, nke bụ ihe karịrị 3 ugboro oxidation eguzogide ndụ nke nkịtị graphite, na adabara elu-ugboro kpo oku-oyi okirikiri ọnọdụ.
2. Nguzogide silicon / metal corrosion gbazere
Mkpuchi TaC bụ ihe na-adịghị mma na ọla dị ka silicon mmiri mmiri (1600 ℃), aluminom / ọla kọpa, wdg, na-ezere ọdịda nhazi nke mgbanaka ntuziaka ọdịnala n'ihi ntinye igwe, ọkachasị dabara maka semiconductor ike na nrụpụta semiconductor nke atọ.
3. Ultra-ala urughuru ofufe
Usoro CVD na-enweta njupụta mkpuchi nke> 99.5% na oke elu nke Ra≤0.2μm, na-ebelata ihe ize ndụ nke ịwụfu ihe site na isi iyi na izute ihe dị ọcha chọrọ nke 12-inch wafer manufacturin.
4. Njikwa nha nke ọma
N'ịnabata machining ziri ezi nke CNC, nha nha nke mkpụrụ graphite bụ ± 0.01mm, na nrụrụ zuru oke mgbe mkpuchi bụ <± 5μm, nke dabara maka ntinye n'ime ụlọ akụrụngwa dị elu.
| 碳化钽涂层物理特性物理特性 Njirimara anụ ahụ nke TaC mkpuchi | |
| 密度/ Njupụta | 14.3 (g/cm³) |
| 比辐射率 / Mgbapụta pụrụ iche | 0.3 |
| 热膨胀系数 / Ọnụ ọgụgụ mgbasawanye okpomọkụ | 6.3 10-6/K |
| 努氏硬度/ Isi ike (HK) | 2000 HK |
| 电阻 / Nguzogide | 1 × 10-5 Ohm*cm |
| 热稳定性 / Thermal kwụsie ike | <2500 ℃ |
| 石墨尺寸变化 / Mgbanwe nha eserese | -10 ~ -20 nkeji |
| 涂层厚度 / mkpuchi ọkpụrụkpụ | ≥30um ahụkarị uru (35um± 10um) |
Ningbo VET Energy Technology Co., Ltd bụ a elu-tech enterprise na-elekwasị anya na mmepe na mmepụta nke elu-ọgwụgwụ elu ihe, ihe na nkà na ụzụ gụnyere graphite, silicon carbide, ceramics, elu ọgwụgwọ dị ka SiC mkpuchi, TaC mkpuchi, glassy carbon mkpuchi, pyrolytic carbon mkpuchi, wdg, ndị a ngwaahịa na-ọtụtụ-eji na photovoltaic, semiconductor, ọhụrụ ume, metallurgy, metallurgy.
Anyị ọrụ otu si n'elu ụlọ nnyocha ụlọ ọrụ, na mepụtara multiple patented teknụzụ iji hụ na ngwaahịa arụmọrụ na àgwà, nwekwara ike inye ndị ahịa na ọkachamara ihe ngwọta.
