VET Energy na-elekwasị anya na R&D na mmepụta nke mgbanaka graphite mkpuchi CVD tantalum carbide (TaC) dị elu, ma na-agba mbọ inye ihe ngwọta ihe oriri dị mkpa maka ụlọ ọrụ semiconductor, photovoltaic na ụlọ ọrụ okpomọkụ dị elu. Teknụzụ anyị mepụtara n'onwe ya na-emepụta mkpuchi tantalum carbide dị arọ ma dị otu n'elu ihe mejupụtara graphite site na usoro nhazi, na-eme ka iguzogide okpomọkụ dị elu (>3000℃), iguzogide nchara na iguzogide ujo okpomọkụ nke ngwaahịa ahụ dịkwuo mma, na-agbatị ndụ ọrụ ihe karịrị ugboro atọ, ma na-ebelata ọnụ ahịa zuru oke nke ndị ahịa.
Uru teknụzụ anyị:
1. Nguzogide oxidation okpomọkụ dị elu
N'ikuku ikuku nke 1200℃, ọnụego mmụba nke ibu oxidation bụ ≤0.05mg/cm²/h, nke karịrị oge iguzogide oxidation karịa graphite nkịtị, ọ dịkwa mma maka ọnọdụ okirikiri okpomọkụ na oyi ugboro ugboro.
2. Nguzogide megide nchara silikọn/ọla gbazere agbaze
Mkpuchi TaC adịghị arụ ọrụ nke ọma na ọla dịka silicon mmiri mmiri (1600℃), aluminom/ọla kọpa agbazere agbaze, wdg, na-ezere mmebi nhazi nke mgbaaka nduzi ọdịnala n'ihi ntinye ígwè, karịsịa maka semiconductor ike na mmepụta semiconductor ọgbọ nke atọ.
3. Mmetọ dị oke ala
Usoro CVD na-enweta njupụta mkpuchi nke >99.5% na oke elu nke Ra≤0.2μm, na-ebelata ihe egwu nke mwụfu ihe site na isi iyi ma na-emezu ihe achọrọ siri ike nke imepụta wafer nke inch 12.
4. Njikwa nha ziri ezi
Site n'iji igwe CNC eme ihe nke ọma, nha nha nke ihe mejupụtara graphite bụ ±0.01mm, na mgbanwe zuru oke mgbe mkpuchi gasịrị bụ <±5μm, nke dabara adaba maka ntinye n'ime ụlọ akụrụngwa dị elu.
| 碳化钽涂层物理特性物理特性 Àgwà anụ ahụ nke TaC mkpuchi | |
| 密度/ Njupụta | 14.3 (g/cm³) |
| 比辐射率 / Mmetụta kpọmkwem | 0.3 |
| 热膨胀系数 / Ọnụọgụ mgbasawanye okpomọkụ | 6.3 10-6/K |
| 努氏硬度/ Ike siri ike (HK) | HK 2000 |
| 电阻 / Nguzogide | 1 × 10-5 Oom*cm |
| 热稳定性 / Nkwụsi ike nke okpomọkụ | <2500℃ |
| 石墨尺寸变化 / Mgbanwe nha graphite | -10~-20um |
| 涂层厚度 / Ọkpụrụkpụ mkpuchi | Uru nkịtị ≥30um (35um±10um) |
Ningbo VET Energy Technology Co., Ltd bụ ụlọ ọrụ teknụzụ dị elu nke na-elekwasị anya na mmepe na mmepụta nke ihe ndị dị elu, ihe na teknụzụ gụnyere graphite, silicon carbide, seramiiki, ọgwụgwọ elu dị ka mkpuchi SiC, mkpuchi TaC, mkpuchi carbon iko, mkpuchi carbon pyrolytic, wdg. A na-eji ngwaahịa ndị a eme ihe n'ọtụtụ ebe na fotovoltaic, semiconductor, ike ọhụrụ, metallurgy, wdg.
Ndị otu teknụzụ anyị sitere na ụlọ ọrụ nyocha kacha elu n'ime obodo, ha emepụtakwala ọtụtụ teknụzụ patented iji hụ na ngwaahịa na-arụ ọrụ nke ọma, ha nwekwara ike inye ndị ahịa ihe ngwọta ọkachamara.
