TaC Dahaarka Garaafka

VET Energy waxay diiradda saartaa R&D iyo soo saarista waxqabadka sare ee CVD tantalum carbide (TaC) giraanta garaafyada dahaarka leh, waxayna ka go'an tahay inay bixiso xalalka agabka muhiimka ah ee warshadaha semiconductor, photovoltaic iyo heerkul sare. Tiknoolajiyadayada si madaxbanaan loo horumariyo ee kaydinta uumiga kiimikada (CVD) waxay samaysaa daahan tantalum carbide cufan oo isku mid ah dusha sare ee substrate graphite iyada oo loo marayo geedi socod sax ah, si weyn u wanaajinaya iska caabinta heerkulka sare ee badeecada (> 3000 ℃), iska caabin daxalka iyo iska caabinta shoogga kuleylka, kordhinta nolosha adeegga in ka badan 3 jeer, iyo dhimista macaamiisha kharashyada dhamaystiran.

Faa'iidooyinkayada farsamo:
1. Iska caabbinta oksaydhka heerkulka sare
Jawiga hawada ee 1200℃, heerka korodhka miisaanka oksaydhisku waa ≤0.05mg/cm²/h, taas oo ka badan 3 jeer nolosha caabbinta oksaydhka ee garaafyada caadiga ah, waxayna ku habboon tahay xaaladaha wareegga kuleylka-qaboojinta-sare.
2. U adkaysiga dhalaalka silikoon/daxalka birta
Daahan TaC waa mid aad u jilicsan biraha sida silikon dareere ah (1600 ℃), aluminium dhalaalaysa / naxaas, iwm.
3. Wasakhaynta walxaha aadka u hooseeya
Habka CVD wuxuu gaaraa cufnaanta dahaarka> 99.5% iyo qallafsanaanta dusha sare ee Ra≤0.2μm, hoos u dhigista khatarta walxaha ka soo baxa isha iyo buuxinta shuruudaha nadaafadda adag ee 12-inch wafer manufacturin.
4. Xakamaynta cabbirka saxda ah
Qaadashada mashiinnada saxda ah ee CNC, xajmiga dulqaadka ee substrate garaafyada waa ± 0.01mm, iyo guud ahaan qallafsanaanta ka dib daahan waa <± 5μm, kaas oo ku habboon in lagu rakibo qolalka qalabka saxda ah.