Tamarta VET waxay diiradda saartaa cilmi-baarista iyo horumarinta iyo soo saarista giraangiraha graphite-ka ee CVD tantalum carbide (TaC) ee waxqabadka sare leh, waxayna ka go'an tahay inay bixiso xalal muhiim ah oo loogu talagalay warshadaha semiconductor-ka, photovoltaic iyo heerkulka sare. Tiknoolajiyadayada si madax-bannaan u-dhigista uumiga kiimikada (CVD) waxay samaysaa dahaar cufan oo isku mid ah oo tantalum carbide ah oo ku yaal dusha sare ee substrate-ka graphite iyada oo loo marayo hababka saxda ah, si weyn u hagaajinaysa iska caabbinta heerkulka sare ee badeecada (>3000℃), iska caabbinta daxalka iyo iska caabbinta shoogga kulaylka, iyadoo kordhinaysa cimriga adeegga in ka badan 3 jeer, iyo yareynta kharashyada dhammaystiran ee macaamiisha.
Faa'iidooyinka farsamo ee aan leenahay:
1. Iska caabinta oksaydhka heerkulka sare
Jawiga hawada ee 1200℃, heerka korodhka miisaanka oksaydhku waa ≤0.05mg/cm²/h, kaas oo ka badan 3 jeer cimriga iska caabbinta oksaydhka ee graphite-ka caadiga ah, wuxuuna ku habboon yahay xaaladaha wareegga kuleylka-qaboojinta ee soo noqnoqda badan.
2. Iska caabbinta daxalka silikoon/birta la dhalaaliyay
Dahaarka TaC aad ayuu ugu firfircoon yahay biraha sida silikoon dareere ah (1600℃), aluminium/naxaas la dhalaaliyey, iwm., taasoo ka fogaanaysa cillad qaab-dhismeedka giraanta hagaha dhaqameed ee ay sabab u tahay gelinta birta, gaar ahaan ku habboon semiconductors-ka korontada iyo wax soo saarka semiconductors-ka jiilka saddexaad.
3. Wasakhowga walxaha aadka u hooseeya
Habka CVD wuxuu gaaraa cufnaanta dahaarka oo ah >99.5% iyo qallafsanaanta dusha sare ee Ra≤0.2μm, taasoo yaraynaysa khatarta ka soo daadashada walxaha ka imanaya isha isla markaana buuxinaysa shuruudaha nadaafadda ee adag ee soo saarista wafer 12-inji ah.
4. Xakamaynta cabbirka saxda ah
Qaadashada mashiinka saxda ah ee CNC, dulqaadka cabbirka ee substrate-ka graphite waa ±0.01mm, iyo isbeddelka guud ee ka dambeeya dahaarka waa <±5μm, kaas oo ku habboon rakibidda qolalka qalabka saxda ah ee sare.
| 碳化钽涂层物理特性物理特性 Sifooyinka jireed ee TaC dahaarka | |
| 密度/ Cufnaanta | 14.3 (g/cm³) |
| 比辐射率 / Iftiimin gaar ah | 0.3 |
| 热膨胀系数 / Heerka ballaarinta kulaylka | 6.3 10-6/K |
| 努氏硬度/ Adkaanta (HK) | 2000 HK |
| 电阻 / Iska caabin | 1 × 10-5 Ohm*cm |
| 热稳定性 / Xasiloonida kulaylka | <2500℃ |
| 石墨尺寸变化 / Isbeddellada cabbirka garaafka | -10~-20um |
| 涂层厚度 / Dhumucda dahaarka | Qiimaha caadiga ah ≥30um (35um±10um) |
Ningbo VET Energy Technology Co., Ltd waa shirkad tiknoolajiyad sare leh oo diiradda saareysa horumarinta iyo soo saarista agabyada horumarsan ee heerka sare ah, agabka iyo tiknoolajiyada oo ay ku jiraan graphite, silicon carbide, dhoobada, daaweynta dusha sare sida dahaarka SiC, dahaarka TaC, dahaarka kaarboonka galaaska ah, dahaarka kaarboonka pyrolytic, iwm., alaabadan waxaa si weyn loogu isticmaalaa sawir-qaadista, semiconductor-ka, tamarta cusub, birta, iwm.
Kooxdayada farsamo waxay ka yimaadaan hay'adaha cilmi-baarista ee ugu sarreeya gudaha, waxayna soo saareen teknoolojiyado badan oo shati haysta si loo hubiyo waxqabadka iyo tayada badeecada, waxayna sidoo kale macaamiisha siin karaan xalal agab xirfadeed.
