VET Energy tsom mus rau R & D thiab tsim cov kev ua haujlwm siab CVD tantalum carbide (TaC) coated graphite rings, thiab tau cog lus los muab cov khoom siv tseem ceeb rau kev daws teeb meem rau semiconductor, photovoltaic thiab high-temperature industries. Peb tus kheej tsim tshuaj vapor deposition (CVD) technology tsim ib tug tuab thiab niaj hnub tantalum carbide txheej nyob rau saum npoo ntawm graphite substrate los ntawm precision txheej txheem, ho txhim kho cov khoom kub kub kuj (> 3000 ℃), corrosion kuj thiab thermal shock resistance, ncua lub neej kev pab cuam los ntawm ntau tshaj 3 zaug, thiab txo cov neeg muas zaub tag nrho cov nqi.
Peb qhov zoo technical:
1. Kub kub oxidation tsis kam
Nyob rau hauv huab cua huab cua ntawm 1200 ℃, oxidation hnyav nce tus nqi yog ≤0.05mg / cm² / h, uas yog ntau tshaj 3 lub sij hawm lub oxidation kuj lub neej ntawm zoo tib yam graphite, thiab yog haum rau high-frequency cua sov-txias voj voog.
2. Resistance rau molten silicon / hlau corrosion
TaC txheej yog tsis tshua muaj inert rau hlau xws li kua silicon (1600 ℃), molten txhuas / tooj liab, thiab lwm yam., tsis txhob structural tsis ua hauj lwm ntawm ib txwm qhia rings vim hlau nkag, tshwj xeeb tshaj yog haum rau lub hwj chim semiconductors thiab thib peb tiam semiconductor manufacturing.
3. Ultra-low particle paug
Cov txheej txheem CVD ua tiav cov txheej txheej ntom ntom ntawm> 99.5% thiab qhov roughness ntawm Ra≤0.2μm, txo qhov kev pheej hmoo ntawm cov khoom tawg los ntawm qhov chaw thiab ua tau raws li kev cai huv huv ntawm 12-nti wafer manufacturin.
4. Precise loj tswj
Txais CNC precision machining, qhov loj kam rau ua ntawm graphite substrate yog ± 0.01mm, thiab tag nrho deformation tom qab txheej yog <± 5μm, uas yog tsim rau installation nyob rau hauv high-precision khoom chamber.
| 碳化钽涂层物理特性物理特性 Lub cev muaj zog ntawm TaC txheej | |
| 密度/ Ceev | 14.3 (g / cm³) |
| 比辐射率 / Tshwj xeeb emissivity | 0.3 |
| 热膨胀系数 / Thermal expansion coefficient | 6.3 10-6/K |
| 努氏硬度/ Hardness (HK) | 2000 HK |
| 电阻 / Tsis kam | 1 × 10-5 Aw* cm |
| 热稳定性 / Thermal stability | <2500 ℃ |
| 石墨尺寸变化 / Graphite loj hloov | -10 ~ 20 hli |
| 涂层厚度 / Txheej thickness | ≥30um tus nqi raug (35um ± 10um) |
Ningbo VET Energy Technology Co., Ltd yog lub tuam txhab high-tech tsom mus rau kev txhim kho thiab tsim cov khoom siv high-end, cov ntaub ntawv thiab thev naus laus zis suav nrog graphite, silicon carbide, ceramics, kev kho saum npoo zoo li SiC txheej, TaC txheej, iav carbon txheej, pyrolytic carbon txheej, thiab lwm yam., cov khoom no tau siv dav hauv photovoltaic, zog, semiconductor, metallurgy, tshiab.
Peb pab pawg kws tshaj lij los ntawm cov tsev kawm tshawb fawb sab saum toj hauv tebchaws, thiab tau tsim ntau yam patented technologies los xyuas kom meej cov khoom ua tau zoo thiab zoo, kuj tuaj yeem muab cov neeg siv khoom nrog cov khoom siv kev daws teeb meem.
