TaC Coated Graphite Nplhaib

Kev Piav Qhia Luv:

VET Zog tsom mus rau R&D thiab kev tsim cov nplhaib graphite coated TaC. Siv cov thev naus laus zis CVD siab heev, ua rau TaC txheej purity siab, ceev ceev thiab tuab sib xws, nws tuaj yeem zam kev ua qias tuaj, tuaj yeem ua haujlwm ruaj khov ntawm qhov kub siab tshaj 2500 ℃, thiab muaj kev kam rau ntau yam roj ib puag ncig.

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Cov Lus Qhia Txog Khoom

Cov Cim Npe Khoom

VET Zog tsom mus rau R&D thiab kev tsim cov CVD tantalum carbide (TaC) coated graphite rings uas muaj kev ua tau zoo, thiab cog lus tias yuav muab cov khoom siv tseem ceeb rau kev lag luam semiconductor, photovoltaic thiab kev lag luam kub siab. Peb cov thev naus laus zis chemical vapor deposition (CVD) uas tsim los ntawm peb tus kheej tsim cov txheej txheem tantalum carbide uas tuab thiab sib npaug rau ntawm qhov chaw ntawm graphite substrate los ntawm cov txheej txheem raug, ua rau cov khoom tiv taus kub siab (> 3000 ℃), tiv taus corrosion thiab tiv taus thermal shock, ntev lub neej kev pabcuam ntau dua 3 zaug, thiab txo cov nqi tag nrho rau cov neeg siv khoom.

Peb cov txiaj ntsig kev tshaj lij:
1. Kev ua haujlwm kub siab oxidation
Hauv huab cua ntawm 1200 ℃, qhov hnyav nce ntawm oxidation yog ≤0.05mg / cm² / h, uas yog ntau dua 3 npaug ntawm lub neej tsis kam oxidation ntawm graphite ib txwm muaj, thiab nws tsim nyog rau cov xwm txheej kub-txias siab.
2. Kev tiv thaiv rau cov kua silicon / hlau xeb
Txheej TaC tsis tshua muaj zog rau cov hlau xws li kua silicon (1600 ℃), txhuas / tooj liab molten, thiab lwm yam, zam kev ua tsis tiav ntawm cov nplhaib qhia ib txwm muaj vim yog kev nkag mus ntawm cov hlau, tshwj xeeb tshaj yog haum rau kev tsim hluav taws xob semiconductor thiab tiam peb semiconductor.
3. Kev ua qias tuaj ntawm cov khoom me me uas tsis tshua muaj
Cov txheej txheem CVD ua tiav qhov ceev ntawm txheej txheej ntawm >99.5% thiab qhov roughness ntawm Ra≤0.2μm, txo qhov kev pheej hmoo ntawm cov khoom me me los ntawm qhov chaw thiab ua tau raws li qhov yuav tsum tau ua kom huv ntawm 12-nti wafer manufacturin.
4. Kev tswj qhov loj me meej
Txais yuav CNC precision machining, qhov loj me ntawm graphite substrate yog ± 0.01 hli, thiab qhov deformation tag nrho tom qab txheej yog <± 5μm, uas yog qhov tsim nyog rau kev teeb tsa hauv cov khoom siv high-precision.

Tantalum carbide TaC coated npog rau semiconductor Featured Duab

碳化钽涂层物理特性物理特性 Cov khoom siv lub cev ntawm TaC txheej
密度/ Qhov Ceev	14.3 (g/cm³)
比辐射率 / Kev ua haujlwm tshwj xeeb	0.3
热膨胀系数 / Cov coefficient ntawm kev nthuav dav ntawm thermal	6.3 10^-6/K
努氏硬度/ Qhov nyuaj (HK)	2000 HK
电阻 / Kev Tiv Thaiv	1 × 10^-5 Ohm*cm
热稳定性 / Kev ruaj khov ntawm cua sov	<2500 ℃
石墨尺寸变化 / Kev hloov pauv loj ntawm graphite	-10~-20um
涂层厚度 / Txheej tuab	≥30um tus nqi ib txwm muaj (35um ± 10um)

Ningbo VET Energy Technology Co., Ltd yog ib lub tuam txhab ua lag luam siab heev uas tsom mus rau kev tsim kho thiab tsim cov khoom siv siab heev, cov ntaub ntawv thiab cov thev naus laus zis suav nrog graphite, silicon carbide, ceramics, kev kho qhov chaw zoo li SiC txheej, TaC txheej, iav carbon txheej, pyrolytic carbon txheej, thiab lwm yam, cov khoom no tau siv dav hauv photovoltaic, semiconductor, lub zog tshiab, metallurgy, thiab lwm yam.

Peb pab neeg kev tshaj lij los ntawm cov tsev kawm tshawb fawb hauv tsev sab saum toj, thiab tau tsim ntau yam thev naus laus zis patented los xyuas kom meej tias cov khoom ua tau zoo thiab zoo, kuj tseem tuaj yeem muab cov neeg siv khoom nrog cov khoom siv tshaj lij.