I-TaC Coated Graphite Ring

I-VET Energy igxile ku-R&D nasekukhiqizweni kwezindandatho ze-graphite ezine-CVD tantalum carbide (TaC) ezisebenza kahle kakhulu, futhi izibophezele ekuhlinzekeni ngezixazululo zezinto ezisetshenziswayo ezibalulekile zezimboni ze-semiconductor, photovoltaic nezishisa kakhulu. Ubuchwepheshe bethu obuzimele obuthuthukiswe ngokuzimela bamakhemikhali e-chemical vapor deposition (CVD) bakha i-tantalum carbide enamathelayo eminyene futhi efanayo phezu kwe-graphite substrate ngezinqubo ezinembile, kuthuthukisa kakhulu ukumelana nokushisa komkhiqizo (>3000 ℃), ukumelana nokugqwala nokumelana nokushaqeka okushisayo, kunweba impilo yesevisi izikhathi ezingaphezu kwezingu-3, ​​nokunciphisa izindleko eziphelele zamakhasimende.

Izinzuzo zethu zobuchwepheshe:
1. Ukumelana nokushisa okuphezulu kwe-oxidation
Emkhathini womoya ongu-1200℃, izinga lokuzuza isisindo se-oxidation lingu-≤0.05mg/cm²/h, elingaphezu kwezikhathi ezingu-3 nempilo yokumelana ne-oxidation ye-graphite evamile, futhi ifanele izimo zomjikelezo wokushisisa-ukupholisa wemvamisa ephezulu.
2. Ukumelana nokugqwala kwe-silicon/metal encibilikisiwe
I-TaC enamathelayo ayisebenzi kakhulu ezinsimbi ezifana ne-silicon ewuketshezi (1600℃), i-aluminium encibilikisiwe/ithusi, njll., igwema ukwehluleka kwesakhiwo amandandatho omhlahlandlela wendabuko ngenxa yokungena kwensimbi, efaneleka ikakhulukazi kuma-semiconductors amandla kanye nokukhiqizwa kwe-semiconductor yesizukulwane sesithathu.
3. Ukungcola kwezinhlayiyana eziphansi kakhulu
Inqubo ye-CVD ifinyelela ukuminyana kokumboza okungu->99.5% kanye nobulukhuni obuphezulu be-Ra≤0.2μm, kunciphisa ingcuphe yokuchitheka kwezinhlayiyana emthonjeni kanye nokuhlangabezana nezidingo eziqinile zokuhlanzeka ze-wafer manufacturin engu-12-intshi.
4. Ukulawula usayizi onembile
Ukwamukela ukunemba kwemishini ye-CNC, ukubekezelela usayizi we-graphite substrate kungu-±0.01mm, futhi ukuwohloka sekukonke ngemva kokumbozwa kungu-<±5μm, okulungele ukufakwa emakamelweni emishini enemba kakhulu.