I-VET Energy igxile ku-R&D kanye nokukhiqizwa kwezindandatho ze-graphite ezimbozwe nge-CVD tantalum carbide (TaC) ezisebenza kahle kakhulu, futhi izibophezele ekuhlinzekeni ngezixazululo zezinto ezisetshenziswayo eziyinhloko zezimboni ze-semiconductor, photovoltaic kanye nezimboni ezishisa kakhulu. Ubuchwepheshe bethu obuthuthukiswe ngokuzimela bokufaka umhwamuko wamakhemikhali (CVD) bakha uqweqwe oluqinile nolulinganayo lwe-tantalum carbide ebusweni be-substrate ye-graphite ngezinqubo zokunemba, okuthuthukisa kakhulu ukumelana nokushisa okuphezulu komkhiqizo (>3000℃), ukumelana nokugqwala kanye nokumelana nokushaqeka kokushisa, kwandise impilo yesevisi izikhathi ezingaphezu kwezintathu, futhi kunciphisa izindleko eziphelele zamakhasimende.
Izinzuzo zethu zobuchwepheshe:
1. Ukumelana nokushisa okuphezulu kwe-oxidation
Esimweni somoya esingu-1200℃, izinga lokukhuphuka kwesisindo se-oxidation lingu-≤0.05mg/cm²/h, okungaphezu kokuphindwe kathathu kokuphila kokumelana ne-oxidation kwe-graphite evamile, futhi kufanelekile ezimweni zomjikelezo wokushisa nokupholisa ovame kakhulu.
2. Ukumelana nokugqwala kwe-silicon/insimbi encibilikisiwe
Ukuhlanganiswa kwe-TaC akusebenzi kahle kakhulu ezinsimbini ezifana ne-silicon ewuketshezi (1600℃), i-aluminium/ithusi elincibilikisiwe, njll., okugwema ukwehluleka kwesakhiwo kwezindandatho zokuqondisa zendabuko ngenxa yokungena kwensimbi, ikakhulukazi ezifanele ama-semiconductor kagesi kanye nokukhiqizwa kwe-semiconductor yesizukulwane sesithathu.
3. Ukungcoliswa kwezinhlayiya okuphansi kakhulu
Inqubo ye-CVD ifinyelela ubuningi bokumboza obungu->99.5% kanye nobunzima bomphezulu obungu-Ra≤0.2μm, okunciphisa ingozi yokuchitheka kwezinhlayiya emthonjeni futhi kuhlangatshezwane nezidingo zokuhlanzeka okuqinile kwe-wafer manufacturin engu-12-intshi.
4. Ukulawula usayizi okunembile
Uma kusetshenziswa imishini yokulungisa ngokunemba kwe-CNC, ukubekezelela usayizi we-graphite substrate kungu-±0.01mm, kanti ukuguqulwa okuphelele ngemva kokumbozwa kungu-<±5μm, okufanele ukufakwa emakamelweni emishini anokunemba okuphezulu.
| 碳化钽涂层物理特性物理特性 Izakhiwo zomzimba ze I-TaC ukugqoka | |
| 密度/ Ubuningi | 14.3 (g/cm³) |
| 比辐射率 / Ukukhishwa okuthile | 0.3 |
| 热膨胀系数 / Isilinganiso sokunwetshwa kokushisa | 6.3 10-6/K |
| 努氏硬度/ Ubulukhuni (HK) | 2000 HK |
| 电阻 / Ukumelana | 1 × 10-5 Ohm*cm |
| 热稳定性 / Ukuzinza kokushisa | <2500℃ |
| 石墨尺寸变化 / Izinguquko zosayizi we-Graphite | -10~-20um |
| 涂层厚度 / Ubukhulu bokumboza | ≥30um inani elijwayelekile (35um±10um) |
I-Ningbo VET Energy Technology Co., Ltd iyibhizinisi lobuchwepheshe obuphezulu eligxile ekuthuthukisweni nasekukhiqizweni kwezinto ezisezingeni eliphezulu, izinto zokwakha kanye nobuchwepheshe okuhlanganisa i-graphite, i-silicon carbide, izinto zobumba, ukwelashwa kwendawo efana ne-SiC coating, i-TaC coating, i-glassy carbon coating, i-pyrolytic carbon coating, njll., le mikhiqizo isetshenziswa kabanzi ku-photovoltaic, semiconductor, amandla amasha, i-metallurgy, njll.
Ithimba lethu lobuchwepheshe livela ezikhungweni zocwaningo zasekhaya eziphezulu, futhi lithuthukise ubuchwepheshe obuningi obunelungelo lobunikazi ukuqinisekisa ukusebenza komkhiqizo kanye nekhwalithi, linganikeza amakhasimende izixazululo zezinto zobuchwepheshe.
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