VET Energy Graphite Substrate Wafer Holder yog lub tshuab nqa khoom uas tsim los rau PECVD (Plasma Enhanced Chemical Vapor Deposition). Lub Graphite Substrate Holder zoo no yog ua los ntawm cov khoom siv graphite uas muaj purity siab, muaj zog, thiab tiv taus kub heev, tiv taus corrosion, ruaj khov thiab lwm yam ntxwv. Nws tuaj yeem muab lub platform txhawb nqa ruaj khov rau PECVD cov txheej txheem thiab xyuas kom meej tias cov zaj duab xis tso rau hauv qhov sib npaug thiab tiaj tus.
VET Zog PECVD txheej txheem graphite wafer txhawb nqa lub rooj muaj cov yam ntxwv hauv qab no:
▪Kev huv siab:cov ntsiab lus tsis muaj kuab paug tsawg heev, tsis txhob muaj kuab paug ntawm zaj duab xis, xyuas kom meej zaj duab xis zoo.
▪Qhov ceev siab:kev ceev ceev, lub zog kho tshuab siab, tuaj yeem tiv taus qhov kub thiab txias siab thiab siab siab PECVD ib puag ncig.
▪Kev ruaj khov zoo:kev hloov pauv me me ntawm qhov kub siab, ua kom muaj kev ruaj khov ntawm cov txheej txheem.
▪Kev ua tau zoo heev ntawm cov thermal conductivity:zoo hloov pauv cua sov kom tiv thaiv wafer overheating.
▪Muaj zog tiv taus corrosion:tuaj yeem tiv taus kev yaig los ntawm ntau yam roj corrosive thiab plasma.
▪Kev pabcuam tshwj xeeb:Cov rooj txhawb nqa graphite ntawm ntau qhov ntau thiab tsawg thiab cov duab tuaj yeem hloov kho raws li cov neeg siv khoom xav tau.
Cov Khoom Zoo
▪Txhim kho qhov zoo ntawm zaj duab xis:Xyuas kom meej tias cov yeeb yaj kiab sib xws thiab txhim kho cov yeeb yaj kiab zoo.
▪Ntev lub neej ntawm cov khoom siv:Kev tiv thaiv xeb zoo heev, ua kom lub neej ua haujlwm ntawm cov khoom siv PECVD ntev dua.
▪Txo cov nqi tsim khoom:Cov tais graphite zoo tuaj yeem txo cov nqi pov tseg thiab txo cov nqi tsim khoom.
Cov khoom siv graphite los ntawm SGL:
| Cov txheej txheem ib txwm muaj: R6510 | |||
| Cov Ntawv Qhia | Tus qauv xeem | Tus nqi | Chav tsev |
| Qhov nruab nrab ntawm cov noob qoob loo | ISO 13320 | 10 | μm |
| Qhov ceev ntawm cov khoom loj | DIN IEC 60413/204 | 1.83 | g/cm23 |
| Qhib porosity | DIN66133 | 10 | % |
| Qhov loj ntawm qhov pore nruab nrab | DIN66133 | 1.8 | μm |
| Kev nkag tau | DIN 51935 | 0.06 | cm²/s |
| Rockwell hardness HR5/100 | DIN IEC60413/303 | 90 xyoo | HR |
| Kev tiv thaiv hluav taws xob tshwj xeeb | DIN IEC 60413/402 | 13 | μΩm |
| Lub zog flexural | DIN IEC 60413/501 | 60 | MPa |
| Lub zog compressive | DIN 51910 | 130 | MPa |
| Young's modulus | DIN 51915 | 11.5 × 10³ | MPa |
| Kev nthuav dav thermal (20-200 ℃) | DIN 51909 | 4.2X10-6 | K-1 |
| Kev ua kom sov (20 ℃) | DIN 51908 | 105 | Wm-1K-1 |
Nws yog tsim tshwj xeeb rau kev tsim cov roj teeb hnub ci ua haujlwm tau zoo, txhawb nqa G12 cov txheej txheem wafer loj. Kev tsim qauv zoo tshaj plaws ua rau muaj kev ua haujlwm ntau ntxiv, ua rau cov nqi ntau dua thiab cov nqi tsim khoom qis dua.
| Khoom | Hom | Tus lej wafer carrier |
| PEVCD Grephite nkoj - Cov koob 156 | 156-13 lub nkoj grephite | 144 |
| 156-19 lub nkoj grephite | 216 | |
| 156-21 lub nkoj grephite | 240 | |
| 156-23 lub nkoj graphite | 308 | |
| PEVCD Grephite nkoj - Cov koob 125 | nkoj grephite 125-15 | 196 |
| 125-19 grephite nkoj | 252 | |
| 125-21 grphite nkoj | 280 |
