Haystaha Wafer-ka Substrate-ka ee Graphite ee PECVD

Haystaha Wafer-ka Substrate-ka ee Garaafiga ee loogu talagalay Sawirka La Soo Bandhigay ee PECVD

Sharaxaad Gaaban:

Haystaha Substrate-ka ee VET Energy waxaa loo farsameeyay inuu ilaaliyo isku-xidhka iyo xasilloonida wafer-ka inta lagu jiro habka PECVD, isagoo ka hortagaya wasakhowga iyo yaraynta khatarta waxyeelada. Haystaha Wafer-ka ee Graphite wuxuu bixiyaa goob ammaan ah oo siman, isagoo hubinaya in wafer-ku si siman ugu soo dhawaado balaasmaha si loo helo kayd joogto ah oo tayo sare leh. Iyada oo leh heerkul sare iyo xoog gaar ah, haystahani wuxuu gacan ka geystaa hagaajinta hufnaanta guud ee habka iyo waxqabadka badeecada.

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Faahfaahinta Badeecada

Calaamadaha Alaabta

Qalabka Wafer-ka ee VET Energy Graphite Substrate waa qalab side sax ah loogu talagalay habka PECVD (Plasma Enhanced Chemical Vapor Deposition). Qalabkan Substrate-ka ee Graphite ee tayada sare leh waxa uu ka samaysan yahay walxo graphite ah oo saafi ah, cufnaan sare leh, oo leh iska caabin heerkul sare oo aad u fiican, iska caabin daxaleed, xasillooni cabbir iyo astaamo kale. Waxa uu bixin karaa madal taageero oo deggan oo loogu talagalay habka PECVD wuxuuna hubin karaa isku midnimada iyo fidsanaanta kaydka filimka.

Shaxda taageerada wafer-ka graphite ee habka VET Energy PECVD waxay leedahay sifooyinka soo socda:

▪Daahirnimo sare:Nadiifin aad u yar, iska ilaali wasakheynta filimka, hubi tayada filimka.

▪Cufnaanta sare:cufnaanta sare, xoogga farsamada sare, waxay u adkeysan kartaa heerkulka sare iyo jawiga PECVD ee cadaadiska sare leh.

▪Xasillooni cabbir wanaagsan:isbeddel yar oo cabbir ah heerkulka sare, taasoo hubinaysa xasilloonida habka.

▪Gudbinta kulaylka oo aad u fiican:si wax ku ool ah u wareeji kulaylka si looga hortago kulaylka xad-dhaafka ah ee wafer-ka.

▪Iska caabin xoog leh oo daxalka ah:waxay iska caabin kartaa nabaad-guurka gaasaska kala duwan ee wax guba iyo balaasmaha.

▪Adeeg gaar ah:Miisaska taageerada garaafka ee cabbirrada iyo qaababka kala duwan waxaa loo habeyn karaa iyadoo loo eegayo baahiyaha macaamiisha.

Faa'iidooyinka Badeecada

▪Hagaaji tayada filimka:Hubi in filimku si isku mid ah u kaydsan yahay oo uu tayo sare u leeyahay.

▪Kordhi cimriga qalabka:Iska caabin aad u fiican oo daxalka ah, kordhi cimriga adeegga qalabka PECVD.

▪Yaree kharashyada wax soo saarka:Saxannada garaafiga ee tayada sare leh waxay yareyn karaan heerka qashinka waxayna yareyn karaan kharashyada wax soo saarka.

Walxaha garaafiga ee laga soo qaatay SGL:

Halbeegga caadiga ah: R6510
Tusmada	Heerka tijaabada	Qiimaha	Cutubka
Cabbirka celceliska hadhuudhka	ISO 13320	10	μm
Cufnaanta badan	DIN IEC 60413/204	1.83	g/cm³
Daloolada furan	DIN66133	10	%
Cabbirka daloolka dhexe	DIN66133	1.8	μm
Joogto ah	DIN 51935	0.06	cm²/s
Adkaanshaha Rockwell HR5/100	DIN IEC60413/303	90	HR
Iska caabin koronto oo gaar ah	DIN IEC 60413/402	13	μΩm
Xoogga dabacsanaanta	DIN IEC 60413/501	60	MPA
Xoogga cadaadiska	DIN 51910	130	MPA
Modulus-ka Young	DIN 51915	11.5 × 10³	MPA
Ballaarinta kulaylka (20-200℃)	DIN 51909	4.2X10^-6	K^-1
Gudbinta kulaylka (20℃)	DIN 51908	105	Wm^-1K^-1

Waxaa si gaar ah loogu talagalay soo saarista unugyada qorraxda ee waxtarka sare leh, iyadoo taageerta habaynta wafer-ka cabbirka weyn ee G12. Naqshadeynta side-qaadaha ee la hagaajiyay ayaa si weyn u kordhisa wax-soo-saarka, taasoo suurtogalinaysa heerarka wax-soo-saarka oo sarreeya iyo kharashyada wax-soo-saarka oo hooseeya.

Shay	Nooca	Lambarka side-ka wafer-ka
Doonta Grephite ee PEVCD - Taxanaha 156	Doonta grephite ee 156-13	144
	Doonta grephite ee 156-19	216
	Doonta grephite ee 156-21	240
	Doonta garaafitka 156-23	308
Doonta Grephite ee PEVCD - Taxanaha 125	Doon grephite ah oo 125-15 ah	196
	Doonta grephite ee 125-19	252
	Doon 125-21 grphite ah	280