Agakoresho ko gufata wafer ka grafiti muri PECVD

Ibisobanuro bigufi:

Igikoresho cya VET Energy cyitwa Graphite Substrate Holder cyakozwe kugira ngo gikomeze kugendera ku murongo no mu buryo buhamye mu gihe cyose cya PECVD, birinda kwandura no kugabanya ibyago byo kwangirika. Igikoresho cya Graphite Wafer Holder gitanga urubuga rwiza kandi rungana, rutuma wafers zishyirwa ku rugero rumwe muri plasma kugira ngo zishyirwe mu buryo buhoraho kandi bwiza. Kubera ko gifite ubushyuhe bwinshi n'imbaraga zidasanzwe, iki gikoresho gifasha kunoza imikorere rusange n'imikorere y'ibicuruzwa.

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Ibisobanuro birambuye ku gicuruzwa

Ibirango by'ibicuruzwa

VET Energy Graphite Substrate Wafer Holder ni icyuma gifata neza cyagenewe PECVD (Plasma Enhanced Chemical Vapor Deposition). Iki gikoresho cyo mu rwego rwo hejuru cya Graphite Substrate Holder gikozwe mu bikoresho bya graphite bifite ubuziranenge bwinshi, birwanya ubushyuhe bwinshi, birwanya ingese, bihamye mu buryo buhamye n'ibindi biranga. Gishobora gutanga urubuga ruhamye rwo gushyigikira PECVD no kwemeza ko filime igaragara neza kandi igororotse.

Imbonerahamwe y'inkunga ya VET Energy PECVD process grafiti wafer ifite ibi bikurikira:

▪Ubwiza buhanitse:umwanda muke cyane, irinde kwanduza firime, reba neza ko firime ari nziza.

▪Ubucucike bwinshi:ubucucike bwinshi, imbaraga nyinshi za mekanike, ishobora kwihanganira ubushyuhe bwinshi n'umuvuduko mwinshi wa PECVD.

▪Ubudahangarwa bwiza mu bipimo:impinduka nto ku bushyuhe bwinshi, bigatuma inzira ihora ihamye.

▪Uburyo bwiza bwo gutwara ubushyuhe:kohereza ubushyuhe neza kugira ngo hirindwe ubushyuhe bwinshi bwa wafer.

▪Ubudahangarwa bukomeye bwo kwangirika:ishobora kurwanya isuri iterwa n'imyuka yangiza n'amaraso.

▪Serivisi yihariye:Ameza yo gushyigikira grafiti y'ingano n'imiterere bitandukanye ashobora guhindurwa hakurikijwe ibyo abakiriya bakeneye.

Ibyiza by'ibicuruzwa

▪Kuzamura ireme rya filime:Kugenzura ko filime ishyirwa ku buryo bumwe kandi ikongera ireme ryayo.

▪Kongera igihe cyo gukoresha ibikoresho:Irwanya ingese neza cyane, yongera igihe cyo gukora ibikoresho bya PECVD.

▪Gabanya ikiguzi cyo gukora:Udupaki twa grafiti tw’ubuziranenge dushobora kugabanya igipimo cy’ibisigazwa by’ibimera no kugabanya ikiguzi cyo kubitunganya.

Ibikoresho bya grafiti bivuye muri SGL:

Ibipimo bisanzwe: R6510
Urutonde	Igipimo ngenderwaho cy'ibizamini	Agaciro	Ishami
Ingano mpuzandengo y'ingano	ISO 13320	10	μm
Ubucucike bw'umubyimba	DIN IEC 60413/204	1.83	g/cm³
Ubwinshi bw'imyenge ifunguye	DIN66133	10	%
Ingano y'umwobo uringaniye	DIN66133	1.8	μm
Ubushobozi bwo kwihanganira	DIN 51935	0.06	cm²/s
Ubukomere bwa Rockwell HR5/100	DIN IEC60413/303	90	HR
Ubushobozi bwihariye bwo guhangana n'amashanyarazi	DIN IEC 60413/402	13	μΩm
Imbaraga zo koroha	DIN IEC 60413/501	60	MPa
Imbaraga zo gukanda	DIN 51910	130	MPa
Uburyo Young's modulus	DIN 51915	11.5×10³	MPa
Kwaguka k'ubushyuhe (20-200℃)	DIN 51909	4.2X10^-6	K^-1
Ubushobozi bwo gutwara ubushyuhe (20℃)	DIN 51908	105	Wm^-1K^-1

Yagenewe by'umwihariko gukora uturemangingo tw'izuba dukora neza cyane, ishyigikira gutunganya wafer nini za G12. Imiterere myiza y'imodoka itwara imizigo yongera cyane umusaruro, bigatuma umusaruro wiyongera kandi ikiguzi cy'umusaruro kikagabanuka.

Ikintu	Ubwoko	Imodoka itwara wafer ifite nimero
Ubwato bwa PEVCD Grephite - Urukurikirane rwa 156	Ubwato bwa grephite 156-13	144
	Ubwato bwa grephite 156-19	216
	Ubwato bwa grephite 156-21	240
	Ubwato bwa grafiti 156-23	308
Ubwato bwa PEVCD Grephite - Urukurikirane rwa 125	Ubwato bwa grephite 125-15	196
	Ubwato bwa grephite 125-19	252
	Ubwato bwa grphite 125-21	280