Chigadziko cheGraphite Substrate Wafer chePECVD

Chibatiso cheGraphite Substrate Wafer chePECVD Mufananidzo Wakafanotaurwa

Tsananguro pfupi:

Chigadziko cheGraphite Substrate cheVET Energy chakagadzirwa kuti chirambe chakagadzikana uye chakagadzikana mukati mePECVD yese, kudzivirira kusvibiswa uye kuderedza njodzi yekukuvadzwa. Chigadziko cheGraphite Wafer chinopa puratifomu yakachengeteka, yakaenzana, ichivimbisa kuti mawafers anowanikwa zvakaenzana kuplasma kuti agare zvakanaka uye akasimba. Nekugona kwayo kupisa kwakanyanya uye simba rayo guru, chigadziko ichi chinobatsira kuvandudza kushanda zvakanaka kwese kwese uye mashandiro echigadzirwa.

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Ruzivo rweChigadzirwa

Matagi eChigadzirwa

Chigadziko cheVET Energy Graphite Substrate Wafer chinotakura zvinhu nemazvo chakagadzirirwa PECVD (Plasma Enhanced Chemical Vapor Deposition). Chigadziko ichi cheGraphite Substrate chemhando yepamusoro chakagadzirwa nezvinhu zvegraphite zvakachena, zvine huremu hwakawanda, zvine hunhu hwakanaka hwekupisa, ngura, kugadzikana kwemativi uye zvimwe zvinhu. Chinogona kupa rutsigiro rwakasimba rwePECVD uye kuve nechokwadi chekuti firimu rinoiswa zvakaenzana uye rakatsetseka.

Tafura yekutsigira yeVET Energy PECVD process graphite wafer ine hunhu hunotevera:

▪Kuchena kwakanyanya:kusvibiswa kwakaderera zvakanyanya, dzivisa kusvibiswa kwefirimu, ita shuwa kuti firimu racho rakanaka.

▪Kuwanda kwevanhu:ine huwandu hwakawanda, simba guru remakanika, inogona kutsungirira tembiricha yakakwira uye kumanikidzwa kwakakwira kwePECVD.

▪Kugadzikana kwakanaka kwehukuru:shanduko diki pakupisa kwakanyanya, zvichiita kuti maitiro agare akasimba.

▪Kufambisa kwakanaka kwekupisa:fambisa kupisa zvinobudirira kudzivirira kupisa kwakanyanya.

▪Kudzivirira ngura kwakasimba:inogona kuramba kukurwa nemhepo nemagasi akasiyana-siyana anoparadza uye plasma.

▪Basa rakagadzirirwa:Matafura ekutsigira girafiti ane saizi dzakasiyana uye maumbirwo anogona kugadziriswa zvichienderana nezvinodiwa nevatengi.

Zvakanakira Chigadzirwa

▪Kuvandudza kunaka kwefirimu:Iva nechokwadi chekuti firimu rakavharwa zvakaenzana uye kuti firimu racho rive rakanaka.

▪Wedzera hupenyu hwemidziyo:Inodzivirira ngura zvakanyanya, inowedzera hupenyu hwebasa remidziyo yePECVD.

▪Deredza mari yekugadzira:Matreyi egrafiti emhando yepamusoro anogona kuderedza mwero wezvimedu zvemarara uye kuderedza mari yekugadzira.

Zvinhu zveGraphite kubva kuSGL:

Paramita yakajairika: R6510
Index	Muyedzo wekuyedza	Kukosha	Chikamu
Avhareji yehukuru hwezviyo	ISO 13320	10	μm
Kuwanda kwehuwandu	DIN IEC 60413/204	1.83	g/cm³
Maburi akavhurika	DIN66133	10	%
Saizi yepakati peburi	DIN66133	1.8	μm
Kubvumidzwa kutenderuka	DIN 51935	0.06	cm²/s
Kuomarara kweRockwell HR5/100	DIN IEC60413/303	90	HR
Kudzivirira kwemagetsi kwakananga	DIN IEC 60413/402	13	μΩm
Simba rekuchinjika	DIN IEC 60413/501	60	MPa
Simba rekumanikidza	DIN 51910	130	MPa
Modulus yeYoung	DIN 51915	11.5×10³	MPa
Kuwedzera kwekupisa (20-200℃)	DIN 51909	4.2X10^-6	K^-1
Kufambisa kwekupisa (20℃)	DIN 51908	105	Wm^-1K^-1

Yakagadzirirwa kugadzirwa kwemaseru ezuva anoshanda zvakanyanya, ichitsigira kugadzirwa kwemawafer makuru eG12. Dhizaini yekutakura yakagadzirwa zvakanaka inowedzera zvakanyanya mhedzisiro, zvichiita kuti goho riwedzere uye mitengo yekugadzira iderere.

Chinhu	Rudzi	Nhamba yekutakura wafer
PEVCD Grephite boat - The 156 series	chikepe chegrephite 156-13	144
	chikepe chegrephite 156-19	216
	chikepe chegrephite 156-21	240
	Chikepe chegraphite che156-23	308
PEVCD Grephite boat - The 125 series	chikepe chegrephite 125-15	196
	Chikepe chegrephite 125-19	252
	Chikepe che 125-21 grphite	280