Lub tais ntim khoom VET Energy PECVD yog lub tais thauj khoom uas tsim los rau cov txheej txheem PECVD (plasma enhanced chemical vapor deposition). Lub tais graphite deposition zoo no yog ua los ntawm cov khoom siv graphite uas muaj purity siab, high-density. Nws muaj kev tiv taus kub zoo heev, tiv taus corrosion, ruaj khov thiab lwm yam ntxwv. Nws tuaj yeem muab lub platform thauj khoom ruaj khov rau cov txheej txheem PECVD thiab xyuas kom meej tias cov zaj duab xis deposition sib npaug thiab tiaj tus.
Cov tais ntim khoom VET Energy PECVD siv dav hauv semiconductor, photovoltaic, LED thiab lwm yam teb. Piv txwv li:
▪ Semiconductor: Cov txheej txheem PECVD rau cov ntaub ntawv semiconductor xws li silicon wafers thiab epitaxial wafers.
▪ Photovoltaic: Cov txheej txheem PECVD rau cov zaj duab xis nyias nyias ntawm lub hnub ci.
▪ LED: Cov txheej txheem PECVD rau cov chips LED.
Cov Khoom Zoo
▪Txhim kho qhov zoo ntawm zaj duab xis:Xyuas kom meej tias cov yeeb yaj kiab sib xws thiab txhim kho cov yeeb yaj kiab zoo.
▪Ntev lub neej ntawm cov khoom siv:Kev tiv thaiv xeb zoo heev, ua kom lub neej ua haujlwm ntawm cov khoom siv PECVD ntev dua.
▪Txo cov nqi tsim khoom:Cov tais graphite zoo tuaj yeem txo cov nqi pov tseg thiab txo cov nqi tsim khoom.
Cov khoom siv graphite los ntawm SGL:
| Cov txheej txheem ib txwm muaj: R6510 | |||
| Cov Ntawv Qhia | Tus qauv xeem | Tus nqi | Chav tsev |
| Qhov nruab nrab ntawm cov noob qoob loo | ISO 13320 | 10 | μm |
| Qhov ceev ntawm cov khoom loj | DIN IEC 60413/204 | 1.83 | g/cm23 |
| Qhib porosity | DIN66133 | 10 | % |
| Qhov loj ntawm qhov pore nruab nrab | DIN66133 | 1.8 | μm |
| Kev nkag tau | DIN 51935 | 0.06 | cm²/s |
| Rockwell hardness HR5/100 | DIN IEC60413/303 | 90 xyoo | HR |
| Kev tiv thaiv hluav taws xob tshwj xeeb | DIN IEC 60413/402 | 13 | μΩm |
| Lub zog flexural | DIN IEC 60413/501 | 60 | MPa |
| Lub zog compressive | DIN 51910 | 130 | MPa |
| Young's modulus | DIN 51915 | 11.5 × 10³ | MPa |
| Kev nthuav dav thermal (20-200 ℃) | DIN 51909 | 4.2X10-6 | K-1 |
| Kev ua kom sov (20 ℃) | DIN 51908 | 105 | Wm-1K-1 |
Nws yog tsim tshwj xeeb rau kev tsim cov roj teeb hnub ci ua haujlwm tau zoo, txhawb nqa G12 cov txheej txheem wafer loj. Kev tsim qauv zoo tshaj plaws ua rau muaj kev ua haujlwm ntau ntxiv, ua rau cov nqi ntau dua thiab cov nqi tsim khoom qis dua.
| Khoom | Hom | Tus lej wafer carrier |
| PEVCD Grephite nkoj - Cov koob 156 | 156-13 lub nkoj grephite | 144 |
| 156-19 lub nkoj grephite | 216 | |
| 156-21 lub nkoj grephite | 240 | |
| 156-23 lub nkoj graphite | 308 | |
| PEVCD Grephite nkoj - Cov koob 125 | nkoj grephite 125-15 | 196 |
| 125-19 grephite nkoj | 252 | |
| 125-21 grphite nkoj | 280 |
