Pupuri Angaanga Papanga Graphite mō te PECVD

Whakaahuatanga Poto:

Kua hangaia te Pūmau Papanga Graphite a VET Energy hei pupuri i te tūnga me te pumau o te wafer puta noa i te tukanga PECVD, hei ārai i te poke me te whakaiti i te mōrearea o te kino. Ka whakaratohia e te Pūmau Wafer Graphite he tūāpapa haumaru, ōrite, e whakarite ana kia ōrite te whakaaturanga o ngā wafer ki te plasma mō te whakatakotoranga kounga teitei me te pumau. Mā tōna kawe wera teitei me te kaha tino pai, ka āwhina tēnei pūmau ki te whakapai ake i te pai o te tukanga me te mahi hua.

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Taipitopito Hua

Ngā Tohu Hua

Ko te VET Energy Graphite Substrate Wafer Holder he kaikawe tika i hangaia mō te tukanga PECVD (Plasma Enhanced Chemical Vapor Deposition). He mea hanga tēnei Holder Graphite Substrate kounga teitei ki te rauemi graphite tino parakore, tino matotoru, he ātete pāmahana teitei, he ātete waikura, he pumau āhua me ētahi atu āhuatanga. Ka taea e ia te whakarato i tētahi tūāpapa tautoko pumau mō te tukanga PECVD me te whakarite i te ōritetanga me te papatahi o te whakatakotoranga kiriata.

Ko ngā āhuatanga o te tēpu tautoko anga whariki tukatuka VET Energy PECVD e whai ake nei:

▪Teitei o te parakore:tino iti te ihirangi poke, karohia te poke o te kiriata, kia pai ai te kounga o te kiriata.

▪Teitei o te mātotoru:he kiato teitei, he kaha ā-mīhini teitei, ka taea te tu atu i te pāmahana teitei me te pehanga teitei o te taiao PECVD.

▪Te pumau o ngā āhuatanga:te iti o te panonitanga o te rahi i te pāmahana tiketike, kia mau ai te pumau o te tukanga.

▪Te kawe wera tino pai:ka whakawhiti pai i te wera hei ārai i te wera nui o te wafer.

▪Te ātete kaha ki te waikura:ka taea te ātete i te horo o ngā hau waikura me te plasma.

▪Ratonga ritenga:Ka taea te whakarite i ngā tēpu tautoko karāhe o ngā rahi me ngā āhua rerekē kia rite ki ngā hiahia o te kiritaki.

Ngā Painga o te Hua

▪Whakapai ake i te kounga o te kiriata:Kia ōrite te whakatakoto o te kiriata, kia pai ake ai te kounga.

▪Whakaroa i te roa o te ora o ngā taputapu:He ātete pai ki te waikura, ka roa ake te ora o ngā taputapu PECVD.

▪Whakaitihia ngā utu whakaputa:Ka taea e ngā paepae karāhe kounga teitei te whakaiti i te tere para me ngā utu whakaputa.

Rauemi karāpiti mai i SGL:

Tawhā noa: R6510
Rārangi	Paerewa whakamātautau	Uara	Wāhanga
Rahi witi toharite	ISO 13320	10	µm
Kīanga papatipu	DIN IEC 60413/204	1.83	karamu/henitimi³
Pūngao tuwhera	DIN66133	10	%
Rahi waenga o ngā pūwero	DIN66133	1.8	µm
Āheitanga uruhanga	DIN 51935	0.06	henimita/hekona
Te pakeketanga o Rockwell HR5/100	DIN IEC60413/303	90	HR
Ātete hiko motuhake	DIN IEC 60413/402	13	μΩm
Kaha piko	DIN IEC 60413/501	60	MPa
Kaha pēhanga	DIN 51910	130	MPa
Te modulus a Young	DIN 51915	11.5×10³	MPa
Te whakawhanuitanga wera (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Te kawe wera (20℃)	DIN 51908	105	Wm^-1K^-1

He mea hanga motuhake mō te hanga pūtau pūngao rā tino whai hua, hei tautoko i te tukatuka angiangi rahi G12. Mā te hoahoa kawe kua arotauhia ka nui ake te kaha whakaputa, ka taea ai te piki ake o ngā reiti hua me te whakaiti i ngā utu whakaputa.

Taonga	Momo	Kaikawe tau wafer
Waka Grephite PEVCD - Te raupapa 156	156-13 poti grephite	144
	156-19 poti grephite	216
	156-21 poti grephite	240
	156-23 poti karāhe	308
Waka Grephite PEVCD - Te raupapa 125	Waka grephite 125-15	196
	125-19 poti grephite	252
	125-21 poti graphite	280