Kev Txhawb Nqa Graphite Wafer PECVD

Kev Txhawb Nqa PECVD Graphite Wafer Duab Tshwj Xeeb

Kev Piav Qhia Luv:

Tsim los rau kev ua kom raug thiab kev ua tau zoo, VET Energy's Graphite Wafer Support yog cov khoom siv zoo tshaj plaws rau kev siv hauv kev ua wafer siab heev, qhov twg kev ruaj khov thermal siab thiab kev ua tau zoo tas li yog qhov tseem ceeb. Txawm hais tias koj ua haujlwm nrog semiconductor wafers lossis lwm yam khoom siv zoo, qhov kev txhawb nqa graphite zoo no yuav txhim kho koj cov txheej txheem kev ntseeg siab thiab cov khoom zoo, ua rau nws yog ib qho tseem ceeb rau kev tsim khoom niaj hnub.

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Cov Lus Qhia Txog Khoom

Cov Cim Npe Khoom

VET Zog PECVD txheej txheem graphite wafer txhawb nqa yog lub hauv paus siv tau tsim rau PECVD (plasma enhanced chemical vapor deposition). Cov khoom no yog ua los ntawm cov khoom siv graphite siab, siab ceev, nrog kev tiv taus kub zoo heev, tiv taus corrosion, ruaj khov thiab lwm yam ntxwv, tuaj yeem muab lub platform txhawb nqa ruaj khov rau PECVD txheej txheem, kom ntseeg tau tias qhov sib xws thiab tiaj tus ntawm cov zaj duab xis deposition.

Qhov "graphite support" tsim ntawm VET Energy graphite wafer support tsis yog tsuas yog txhawb nqa lub wafer zoo xwb, tab sis kuj tseem muab kev ruaj khov thermal hauv qhov kub thiab txias siab thiab siab siab PECVD ib puag ncig kom ntseeg tau tias muaj kev ruaj khov ntawm cov txheej txheem.

VET Zog PECVD txheej txheem graphite wafer txhawb nqa muaj cov yam ntxwv hauv qab no:

▪Kev huv siab:cov ntsiab lus tsis muaj kuab paug tsawg heev, tsis txhob muaj kuab paug ntawm zaj duab xis, kom ntseeg tau tias qhov zoo ntawm zaj duab xis.

▪Qhov ceev siab:kev ceev ceev, lub zog kho tshuab siab, tuaj yeem tiv taus qhov kub thiab txias siab thiab siab siab PECVD ib puag ncig.

▪Kev ruaj khov zoo:kev hloov pauv me me ntawm qhov kub siab kom ntseeg tau tias qhov ruaj khov ntawm cov txheej txheem.

▪Kev ua tau zoo heev ntawm cov thermal conductivity:zoo hloov pauv cua sov kom tiv thaiv wafer overheating.

▪Muaj zog tiv taus corrosion:Muaj peev xwm tiv taus kev yaig los ntawm ntau yam roj corrosive thiab plasma.

▪Kev pabcuam tshwj xeeb:Cov rooj txhawb nqa graphite ntawm ntau qhov ntau thiab tsawg thiab cov duab tuaj yeem hloov kho raws li cov neeg siv khoom xav tau.

Cov khoom siv graphite los ntawm SGL:

Cov txheej txheem ib txwm muaj: R6510
Cov Ntawv Qhia	Tus qauv xeem	Tus nqi	Chav tsev
Qhov nruab nrab ntawm cov noob qoob loo	ISO 13320	10	μm
Qhov ceev ntawm cov khoom loj	DIN IEC 60413/204	1.83	g/cm2³
Qhib porosity	DIN66133	10	%
Qhov loj ntawm qhov pore nruab nrab	DIN66133	1.8	μm
Kev nkag tau	DIN 51935	0.06	cm²/s
Rockwell hardness HR5/100	DIN IEC60413/303	90 xyoo	HR
Kev tiv thaiv hluav taws xob tshwj xeeb	DIN IEC 60413/402	13	μΩm
Lub zog flexural	DIN IEC 60413/501	60	MPa
Lub zog compressive	DIN 51910	130	MPa
Young's modulus	DIN 51915	11.5 × 10³	MPa
Kev nthuav dav thermal (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Kev ua kom sov (20 ℃)	DIN 51908	105	Wm^-1K^-1

Nws yog tsim tshwj xeeb rau kev tsim cov roj teeb hnub ci ua haujlwm tau zoo, txhawb nqa G12 cov txheej txheem wafer loj. Kev tsim qauv zoo tshaj plaws ua rau muaj kev ua haujlwm ntau ntxiv, ua rau cov nqi ntau dua thiab cov nqi tsim khoom qis dua.

Khoom	Hom	Tus lej wafer carrier
PEVCD Grephite nkoj - Cov koob 156	156-13 lub nkoj grephite	144
	156-19 lub nkoj grephite	216
	156-21 lub nkoj grephite	240
	156-23 lub nkoj graphite	308
PEVCD Grephite nkoj - Cov koob 125	nkoj grephite 125-15	196
	125-19 grephite nkoj	252
	125-21 grphite nkoj	280