Ukusekelwa kwe-PECVD Graphite Wafer

Incazelo emfushane:

Idizayinelwe ukunemba nokusebenza kahle, i-VET Energy's Graphite Wafer Support iyinto efanelekile yokusetshenziswa ekucubungulweni kwe-wafer okuthuthukisiwe, lapho ukuzinza okuphezulu kokushisa nokusebenza okuqhubekayo kubalulekile. Kungakhathaliseki ukuthi usebenza ngama-semiconductor wafers noma ezinye izinto ezithambile, lokhu kusekelwa kwe-graphite esezingeni eliphezulu kuzothuthukisa ukuthembeka kwenqubo yakho kanye nekhwalithi yomkhiqizo, okwenza kube yingxenye ebalulekile yokukhiqiza kwesimanje.

Sithumelele i-imeyili Landa njenge-PDF

Imininingwane Yomkhiqizo

Amathegi Omkhiqizo

Usekelo lwe-wafer ye-graphite yenqubo ye-VET Energy PECVD luyithuluzi elisetshenziswayo eliyinhloko elenzelwe inqubo ye-PECVD (i-plasma enhanced chemical vapor deposition). Lo mkhiqizo wenziwe ngezinto ze-graphite ezihlanzekile kakhulu, ezinokumelana nokushisa okuphezulu, ukumelana nokugqwala, ukuzinza kobukhulu kanye nezinye izici, unganikeza ipulatifomu yokusekela ezinzile yenqubo ye-PECVD, ukuqinisekisa ukufana kanye nokuba bushelelezi kokufakwa kwefilimu.

Umklamo "wokusekelwa kwe-graphite" wokusekelwa kwe-VET Energy graphite wafer awukwazi nje ukusekela ngempumelelo i-wafer, kodwa futhi unikeze ukuzinza kokushisa endaweni yokushisa ephezulu kanye ne-PECVD engaphansi kokucindezeleka okuphezulu ukuqinisekisa ukuzinza kwenqubo.

Ukusekelwa kwe-wafer yenqubo ye-VET Energy PECVD kunezici ezilandelayo:

▪Ubumsulwa obuphezulu:okuqukethwe okungcolile okuphansi kakhulu, gwema ukungcoliswa kwefilimu, ukuqinisekisa ikhwalithi yefilimu.

▪Ukuminyana okuphezulu:ukuminyana okuphezulu, amandla aphezulu omshini, ingamelana nokushisa okuphezulu kanye nesimo se-PECVD esinomfutho ophezulu.

▪Ukuzinza okuhle kobukhulu:izinguquko ezincane zobukhulu ekushiseni okuphezulu ukuqinisekisa ukuzinza kwenqubo.

▪Ukushisa okuhle kakhulu:dlulisa ukushisa ngempumelelo ukuze kuvinjelwe ukushisa ngokweqile kwe-wafer.

▪Ukumelana nokugqwala okunamandla:Iyakwazi ukumelana nokuguguleka kwamagesi ahlukahlukene agqwalisayo kanye ne-plasma.

▪Isevisi eyenziwe ngokwezifiso:Amatafula okusekela i-graphite anobukhulu obuhlukene kanye nezimo angenziwa ngokwezifiso ngokwezidingo zamakhasimende.

Izinto ze-graphite ezivela ku-SGL:

Ipharamitha evamile: R6510
Inkomba	Izinga lokuhlola	Inani	Iyunithi
Usayizi omaphakathi wokusanhlamvu	I-ISO 13320	10	μm
Ubuningi obukhulu	I-DIN IEC 60413/204	1.83	g/cm³
Imbobo evulekile	I-DIN66133	10	%
Usayizi wembobo ephakathi	I-DIN66133	1.8	μm
Ukuvunyelwa komoya	I-DIN 51935	0.06	cm²/s
Ukuqina kweRockwell HR5/100	I-DIN IEC60413/303	90	HR
Ukumelana okuqondile kukagesi	I-DIN IEC 60413/402	13	μΩm
Amandla okugobeka	I-DIN IEC 60413/501	60	I-MPa
Amandla okucindezela	I-DIN 51910	130	I-MPa
I-modulus kaYoung	I-DIN 51915	11.5×10³	I-MPa
Ukwanda Okushisayo (20-200℃)	I-DIN 51909	4.2X10^-6	K^-1
Ukushisa (20℃)	I-DIN 51908	105	Wm^-1K^-1

Yenzelwe ngqo ukukhiqizwa kwamaseli elanga asebenza kahle kakhulu, isekela ukucutshungulwa kwe-wafer enkulu ye-G12. Umklamo wenkampani yokuthwala olungiselelwe kahle ukhulisa kakhulu umkhiqizo, okwenza kube lula ukukhiqizwa okuphezulu kanye nezindleko zokukhiqiza eziphansi.

Into	Uhlobo	Inombolo yesithwali se-wafer
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-156	Isikebhe samagrephite esingu-156-13	144
	Isikebhe samagrephite esingu-156-19	216
	Isikebhe samagrephite esingu-156-21	240
	Isikebhe se-graphite esingu-156-23	308
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-125	Isikebhe samagrephite esingu-125-15	196
	Isikebhe samagrephite esingu-125-19	252
	Isikebhe se-grphite esingu-125-21	280