Rutsigiro rwePecd Graphite Wafer

Rutsigiro rwePECVD Graphite Wafer Mufananidzo Wakaratidzwa

Tsananguro pfupi:

Yakagadzirirwa kunyatsoita basa nemazvo, VET Energy's Graphite Wafer Support ndiyo chinhu chakakodzera kushandiswa mukugadzira wafer yepamusoro, uko kugadzikana kwakanyanya kwekupisa uye kushanda kwakasimba kwakakosha. Kunyangwe uri kushanda nema wafer e semiconductor kana mamwe ma substrates akaomarara, rutsigiro urwu rwepamusoro-soro rwegraphite ruchawedzera kuvimbika kwemaitiro ako uye kunaka kwechigadzirwa, zvichiita kuti ive chinhu chakakosha pakugadzira kwemazuva ano.

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Ruzivo rweChigadzirwa

Matagi eChigadzirwa

VET Energy PECVD process graphite wafer rutsigiro chinhu chinoshandiswa pakugadzira PECVD (plasma enhanced chemical vapor deposition). Chigadzirwa ichi chakagadzirwa nezvinhu zvegrafiti zvine hutsanana hwakanyanya, zvine hunhu hwakanaka hwekupisa, ngura, kugadzikana kwemativi uye zvimwe zvinhu, zvinogona kupa rutsigiro rwakasimba rwePECVD process, kuve nechokwadi chekuti firimu rinoiswa zvakaenzana uye rakatsetseka.

Dhizaini ye "grafiti support" yeVET Energy graphite wafer support haingogone chete kutsigira wafer zvinobudirira, asiwo kupa kugadzikana kwekupisa munzvimbo yePECVD inopisa zvakanyanya uye ine pressure yakakwira kuti ive nechokwadi chekuti maitiro acho agadzikana.

Rutsigiro rwewafer yegirafiti yeVET Energy PECVD ine hunhu hunotevera:

▪Kuchena kwakanyanya:kusvibiswa kwakaderera zvakanyanya, kudzivirira kusvibiswa kwefirimu, kuitira kuti firimu rive remhando yepamusoro.

▪Kuwanda kwevanhu:ine huwandu hwakawanda, simba guru remakanika, inogona kutsungirira tembiricha yakakwira uye kumanikidzwa kwakakwira kwePECVD.

▪Kugadzikana kwakanaka kwehukuru:shanduko diki pakupisa kwakanyanya kuti zvive nechokwadi chekuti maitiro acho agadzikana.

▪Kufambisa kwakanaka kwekupisa:fambisa kupisa zvinobudirira kudzivirira kupisa kwakanyanya.

▪Kudzivirira ngura kwakasimba:Inokwanisa kuramba kukanganiswa negasi dzakasiyana-siyana dzinoparadza uye plasma.

▪Basa rakagadzirirwa:Matafura ekutsigira eGraphite ane saizi dzakasiyana uye maumbirwo anogona kugadziriswa zvichienderana nezvinodiwa nevatengi.

Zvinhu zveGraphite kubva kuSGL:

Paramita yakajairika: R6510
Index	Muyedzo wekuyedza	Kukosha	Chikamu
Avhareji yehukuru hwezviyo	ISO 13320	10	μm
Kuwanda kwehuwandu	DIN IEC 60413/204	1.83	g/cm³
Maburi akavhurika	DIN66133	10	%
Saizi yepakati peburi	DIN66133	1.8	μm
Kubvumidzwa kutenderuka	DIN 51935	0.06	cm²/s
Kuomarara kweRockwell HR5/100	DIN IEC60413/303	90	HR
Kudzivirira kwemagetsi kwakananga	DIN IEC 60413/402	13	μΩm
Simba rekuchinjika	DIN IEC 60413/501	60	MPa
Simba rekumanikidza	DIN 51910	130	MPa
Modulus yeYoung	DIN 51915	11.5×10³	MPa
Kuwedzera kwekupisa (20-200℃)	DIN 51909	4.2X10^-6	K^-1
Kufambisa kwekupisa (20℃)	DIN 51908	105	Wm^-1K^-1

Yakagadzirirwa kugadzirwa kwemaseru ezuva anoshanda zvakanyanya, ichitsigira kugadzirwa kwemawafer makuru eG12. Dhizaini yekutakura yakagadzirwa zvakanaka inowedzera zvakanyanya mhedzisiro, zvichiita kuti goho riwedzere uye mitengo yekugadzira iderere.

Chinhu	Rudzi	Nhamba yekutakura wafer
PEVCD Grephite boat - The 156 series	chikepe chegrephite 156-13	144
	chikepe chegrephite 156-19	216
	chikepe chegrephite 156-21	240
	Chikepe chegraphite che156-23	308
PEVCD Grephite boat - The 125 series	chikepe chegrephite 125-15	196
	Chikepe chegrephite 125-19	252
	Chikepe che 125-21 grphite	280