Inkunga ya PECVD Graphite Wafer

Ibisobanuro bigufi:

Ikoreshwa rya VET Energy mu gutunganya wafer neza kandi neza, ni ryo koranabuhanga rikwiye gukoreshwa mu gutunganya wafer mu buryo bugezweho, aho ubushyuhe bwinshi butuje kandi imikorere yayo ihoraho ari ingenzi cyane. Waba urimo gukorana na wafer za semiconductor cyangwa izindi substrates zoroshye, iyi mfashanyigisho ya grafiti nziza izongera uburyo bwawe bwo gukora neza no kugira ubwiza bw'umusaruro, bigatuma iba ingenzi cyane mu nganda zigezweho.

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Ibisobanuro birambuye ku gicuruzwa

Ibirango by'ibicuruzwa

Inkunga ya VET Energy PECVD process grafiti wafer ni igikoresho cy’ibanze cyagenewe PECVD (plasma enhanced chemical vapor deposition). Iki gicuruzwa cyakozwe mu bikoresho bya grafiti bifite ubuziranenge bwinshi, bifite ubushyuhe bwinshi, birwanya ingese, bihamye n’ibindi biranga, bishobora gutanga urubuga ruhamye rwo gushyigikira PECVD, kugira ngo harebwe ko filime ihuye kandi igororotse.

Igishushanyo mbonera cya "grafiti support" cya VET Energy grafiti support ntigishobora gusa gushyigikira neza wafer, ahubwo kinatanga ubushyuhe buhamye mu bidukikije bya PECVD bishyushye cyane n'umuvuduko mwinshi kugira ngo igikorwa kibe gihamye.

Inkunga ya VET Energy PECVD process grafiti wafer ifite ibi bikurikira:

▪Ubwiza buhanitse:umwanda muke cyane, irinde kwanduza firime, kugira ngo firime ibe nziza.

▪Ubucucike bwinshi:ubucucike bwinshi, imbaraga nyinshi za mekanike, ishobora kwihanganira ubushyuhe bwinshi n'umuvuduko mwinshi wa PECVD.

▪Ubudahangarwa bwiza mu bipimo:impinduka nto ku bushyuhe bwinshi kugira ngo habeho umutekano mu buryo burambye.

▪Uburyo bwiza bwo gutwara ubushyuhe:kohereza ubushyuhe neza kugira ngo hirindwe ubushyuhe bwinshi bwa wafer.

▪Ubudahangarwa bukomeye bwo kwangirika:Ishobora kurwanya isuri iterwa n'imyuka yangiza n'amaraso.

▪Serivisi yihariye:Ameza yo gushyigikira grafiti y'ingano n'imiterere bitandukanye ashobora guhindurwa hakurikijwe ibyo abakiriya bakeneye.

Ibikoresho bya grafiti bivuye muri SGL:

Ibipimo bisanzwe: R6510
Urutonde	Igipimo ngenderwaho cy'ibizamini	Agaciro	Ishami
Ingano mpuzandengo y'ingano	ISO 13320	10	μm
Ubucucike bw'umubyimba	DIN IEC 60413/204	1.83	g/cm³
Ubwinshi bw'imyenge ifunguye	DIN66133	10	%
Ingano y'umwobo uringaniye	DIN66133	1.8	μm
Ubushobozi bwo kwihanganira	DIN 51935	0.06	cm²/s
Ubukomere bwa Rockwell HR5/100	DIN IEC60413/303	90	HR
Ubushobozi bwihariye bwo guhangana n'amashanyarazi	DIN IEC 60413/402	13	μΩm
Imbaraga zo koroha	DIN IEC 60413/501	60	MPa
Imbaraga zo gukanda	DIN 51910	130	MPa
Uburyo Young's modulus	DIN 51915	11.5×10³	MPa
Kwaguka k'ubushyuhe (20-200℃)	DIN 51909	4.2X10^-6	K^-1
Ubushobozi bwo gutwara ubushyuhe (20℃)	DIN 51908	105	Wm^-1K^-1

Yagenewe by'umwihariko gukora uturemangingo tw'izuba dukora neza cyane, ishyigikira gutunganya wafer nini za G12. Imiterere myiza y'imodoka itwara imizigo yongera cyane umusaruro, bigatuma umusaruro wiyongera kandi ikiguzi cy'umusaruro kikagabanuka.

Ikintu	Ubwoko	Imodoka itwara wafer ifite nimero
Ubwato bwa PEVCD Grephite - Urukurikirane rwa 156	Ubwato bwa grephite 156-13	144
	Ubwato bwa grephite 156-19	216
	Ubwato bwa grephite 156-21	240
	Ubwato bwa grafiti 156-23	308
Ubwato bwa PEVCD Grephite - Urukurikirane rwa 125	Ubwato bwa grephite 125-15	196
	Ubwato bwa grephite 125-19	252
	Ubwato bwa grphite 125-21	280