PECVD Kurodha Tray Kuisa Graphite Tray

Tsananguro pfupi:

PECVD Loading Tray yeVET Energy yakagadzirirwa kupa rutsigiro rwakachengeteka uye rwakaenzana rwemawafer panguva yekuiswa, zvichivandudza kuenderana uye kunaka kwekuisa. Nekudzivirira kwayo kupisa kwakanaka, Graphite Tray inobatsira kuchengetedza nharaunda inodzorwa mukati memakamuri ePECVD, kuderedza njodzi yekusvibiswa uye kuona kuti mashandiro acho anoshanda zvakanaka.

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Ruzivo rweChigadzirwa

Matagi eChigadzirwa

Triyamu yekurodha yeVET Energy PECVD inotakura zvinhu nemazvo yakagadzirirwa PECVD (plasma enhanced chemical vapor deposition). Iyi tiramu yegrafiti yemhando yepamusoro yakagadzirwa nezvinhu zvegrafiti zvine hutsanana hwakanyanya. Ine simba rakanaka rekudzivirira kupisa, ngura, kugadzikana kwemativi uye zvimwe zvinhu. Inogona kupa puratifomu yakagadzikana yekutakura zvinhu zvePECVD uye kuve nechokwadi chekuti firimu rinoiswa zvakaenzana uye rakatsetseka.

Matireyi eVET Energy PECVD anoshandiswa zvakanyanya muminda ye semiconductor, photovoltaic, LED nedzimwe nzvimbo. Semuenzaniso:

▪ Semiconductor: Maitiro ePECVD ekushandisa zvinhu zve semiconductor zvakaita se silicon wafers uye epitaxial wafers.

▪ Photovoltaic: Maitiro ePECVD emafirimu matete emagetsi ezuva.

▪ LED: Maitiro ePECVD emachipisi e LED.

Zvakanakira Chigadzirwa

▪Kuvandudza kunaka kwefirimu:Iva nechokwadi chekuti firimu rakavharwa zvakaenzana uye kuti firimu racho rive rakanaka.

▪Wedzera hupenyu hwemidziyo:Inodzivirira ngura zvakanyanya, inowedzera hupenyu hwebasa remidziyo yePECVD.

▪Deredza mari yekugadzira:Matreyi egrafiti emhando yepamusoro anogona kuderedza mwero wezvimedu zvemarara uye kuderedza mari yekugadzira.

Zvinhu zveGraphite kubva kuSGL:

Paramita yakajairika: R6510
Index	Muyedzo wekuyedza	Kukosha	Chikamu
Avhareji yehukuru hwezviyo	ISO 13320	10	μm
Kuwanda kwehuwandu	DIN IEC 60413/204	1.83	g/cm³
Maburi akavhurika	DIN66133	10	%
Saizi yepakati peburi	DIN66133	1.8	μm
Kubvumidzwa kutenderuka	DIN 51935	0.06	cm²/s
Kuomarara kweRockwell HR5/100	DIN IEC60413/303	90	HR
Kudzivirira kwemagetsi kwakananga	DIN IEC 60413/402	13	μΩm
Simba rekuchinjika	DIN IEC 60413/501	60	MPa
Simba rekumanikidza	DIN 51910	130	MPa
Modulus yeYoung	DIN 51915	11.5×10³	MPa
Kuwedzera kwekupisa (20-200℃)	DIN 51909	4.2X10^-6	K^-1
Kufambisa kwekupisa (20℃)	DIN 51908	105	Wm^-1K^-1

Yakagadzirirwa kugadzirwa kwemaseru ezuva anoshanda zvakanyanya, ichitsigira kugadzirwa kwemawafer makuru eG12. Dhizaini yekutakura yakagadzirwa zvakanaka inowedzera zvakanyanya mhedzisiro, zvichiita kuti goho riwedzere uye mitengo yekugadzira iderere.

Chinhu	Rudzi	Nhamba yekutakura wafer
PEVCD Grephite boat - The 156 series	chikepe chegrephite 156-13	144
	chikepe chegrephite 156-19	216
	chikepe chegrephite 156-21	240
	Chikepe chegraphite che156-23	308
PEVCD Grephite boat - The 125 series	chikepe chegrephite 125-15	196
	Chikepe chegrephite 125-19	252
	Chikepe che 125-21 grphite	280