Graphite Ring ine Porous Tantalum Carbide
Graphite ine maburi etantalum carbide (TaC) yakaputirwa negirafitichinhu chakakosha chakagadzirwa zvakanangana nenzvimbo dzinopisa zvakanyanya uye dzinoparadza zvakanyanya dzekugadzira semiconductor. Substrate yayo ine graphite ye isostatic yakachena kwazvo, yakafukidzwa ne tantalum carbide coating yakafanana nekushandisa chemical vapor deposition (CVD). TaC ine kuomarara kwakanyanya (9-10 paMohs scale) uye inonyunguduka ye3880°C. Yakabatanidzwa ne graphite's excellent thermal stability uye hunhu hwakareruka, chinhu ichi chinosanganisa simba rekupisa kwepamusoro nekudzivirira kurwiswa nemakemikari uye thermal shock, zvichiita kuti ive sarudzo yakakodzera yemidziyo ye semiconductor process inoshanda mumamiriro ezvinhu akaoma.
Mabhenefiti eTantalum Carbide Graphite ane Porous:
1. Kuramba Kuora Kwakanyanya Kupfuura Huru
-TaC haina makemikari, inodzivirira ngura kubva kuma halogen akadai se fluorine ne chlorine, zvichiita kuti michina igare kwenguva refu.
-Maumbirwo ane maburi anowedzera nzvimbo yejira, zvichiita kuti pave nedziviriro yakasimba uye inoderedza njodzi yekudonha kwezvikamu.
2. Kugadzikana Kwakanaka Kwekupisa Kwakakwirira
-Nepo kunyunguduka kwava kusvika 4000°C, inogona kushanda kwenguva yakareba munzvimbo dzine vacuum kana inert airspaces dzinopfuura 2500°C.
-Kuwedzera kwekupisa kwejira repurasitiki kunoenderana zvakanyanya nekwegirafiti, zvichidzivirira kutsemuka nekuparadzana kunokonzerwa nekupisa.
3. Kuchena Kwakanyanya uye Kusvibiswa Kushoma
-Uchishandisa zvinhu zvakagadziriswa zvemhando yepamusoro uye maitiro, huwandu hwekusvibiswa kwesimbi hwakaderera zvikuru, zvichideredza zvakanyanya njodzi yekusvibiswa kwewafer.
-Pamusoro payo pakasimba uye pakagadzikana nemakemikari, zvichideredza kugadzirwa kwezvimedu uye zvichisangana nezvinodiwa zvakasimba zvekuchenesa imba.
4. Dhizaini Yakagadzirwa Nemunhu
Maumbirwo akaomarara anogona kugadzirwa zvichienderana nemifananidzo yemutengi, uye ukobvu hwemaburi nependi zvinogona kudzorwa kuti pave nekuyerera kwakanaka kwegasi uye kufambisa kwekupisa.
5. Nguva Yehupenyu Hurefu Uye Mutengo Wakaderera Wekugadzirisa
Kuora kwakanyanya uye kuramba kupfeka kweTaC coatings ine maburi kunowedzera hupenyu hwezvikamu nekatatu kusvika kashanu zvichienzaniswa negraphite yechinyakare, zvichideredza kuwanda kwekutsiva uye mari yekugadzirisa.
Zvikumbiro Zvikuru
1. Zvikamu zvikuru zvekugadzira wafer
- Zvidzitiro zvemakamuri ekugadzirisa, mabarafu, uye musoro weshawa yemidziyo yeCVD/ALD
- Zvitsigiro zvePVD
- Zvikamu zvemaitiro ekupisa zvakanyanya zvekupararira, oxidation, annealing, uye mamwe maitiro
2. Masisitimu ekuisa mhute yemakemikari
- Kudzivirira zvinhu zvakakosha munzvimbo dzine ngura zvakanyanya (senge fluorides nema chloride) panguva yekuita izvi
3. Dzimwe nzvimbo dzinopisa zvakanyanya
- Yakakodzera kuchenesa gasi remakemikari, maovheni ekurapa kupisa akasarudzika, nezvimwe zvinoshandiswa.
VET Energy inyanzvi yekugadzira inotarisa paR&D uye kugadzirwa kwezvinhu zvepamusoro-soro zvakaita segraphite, silicon carbide, quartz, pamwe nekurapwa kwezvinhu zvakaita seSiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, nezvimwewo. Zvigadzirwa izvi zvinoshandiswa zvakanyanya mu photovoltaic, semiconductor, new energy, metallurgy, nezvimwewo.
Chikwata chedu chehunyanzvi chinobva kumasangano makuru ekutsvagisa emuno, chinogona kukupa mhinduro dzehunyanzvi.
Zvakanakira zveVET Energy zvinosanganisira:
• Laboratori yemufekitori neyanyanzvi;
• Matanho ekuchena uye mhando yepamusoro-soro muindasitiri;
• Mutengo unokwikwidzana & Nguva yekutumira nekukurumidza;
• Kudyidzana kwemaindasitiri akawanda pasi rose;
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