Saxanka Graphite ee PECVD ee Rarista

Saxanka Garaafiga ee PECVD ee la Rarayo Sawirka La Soo Bandhigay

Sharaxaad Gaaban:

Saxanka Rarka ee VET Energy ee PECVD waxaa loogu talagalay inuu bixiyo taageero ammaan ah oo xitaa loogu talagalay wafer-yada inta lagu jiro dhigista, taasoo hagaajinaysa isku-dheellitirka iyo tayada habka dhigista. Iyada oo leh iska caabin kulaylka oo aad u fiican, Saxanka Graphite wuxuu ka caawiyaa ilaalinta jawi la xakameeyey gudaha qolalka PECVD, isagoo yareynaya khatarta wasakhowga iyo hubinta hufnaanta habka oo sareysa.

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Faahfaahinta Badeecada

Calaamadaha Alaabta

Saxanka rarista ee VET Energy PECVD waa side sax ah oo loogu talagalay habka PECVD (plasma enhanced chemical deposition). Saxankan side-ga ah ee tayo sare leh waxa uu ka samaysan yahay walxo side-ga ah oo saafi ah oo cufnaan sare leh. Waxa uu leeyahay iska caabin heerkul sare oo aad u fiican, iska caabin daxaleed, xasillooni cabbir iyo astaamo kale. Waxa uu bixin karaa goob side oo deggan oo loogu talagalay habka PECVD wuxuuna hubin karaa isku midnimada iyo fidsanaanta dhigista filimka.

Tamarta VET. Saxannada rarista PECVD waxaa si weyn loogu isticmaalaa semiconductor-ka, fotovoltaic-ga, LED-ka iyo meelaha kale. Tusaale ahaan:

▪ Semiconductor: Habka PECVD ee walxaha semiconductor-ka sida silicon wafers iyo epitaxial wafers.

▪ Folta-foolta: Habka PECVD ee filimada khafiifka ah ee unugyada qorraxda.

▪ LED: Habka PECVD ee jajabyada LED.

Faa'iidooyinka Badeecada

▪Hagaaji tayada filimka:Hubi in filimku si isku mid ah u kaydsan yahay oo uu tayo sare u leeyahay.

▪Kordhi cimriga qalabka:Iska caabin aad u fiican oo daxalka ah, kordhi cimriga adeegga qalabka PECVD.

▪Yaree kharashyada wax soo saarka:Saxannada garaafiga ee tayada sare leh waxay yareyn karaan heerka qashinka waxayna yareyn karaan kharashyada wax soo saarka.

Walxaha garaafiga ee laga soo qaatay SGL:

Halbeegga caadiga ah: R6510
Tusmada	Heerka tijaabada	Qiimaha	Cutubka
Cabbirka celceliska hadhuudhka	ISO 13320	10	μm
Cufnaanta badan	DIN IEC 60413/204	1.83	g/cm³
Daloolada furan	DIN66133	10	%
Cabbirka daloolka dhexe	DIN66133	1.8	μm
Joogto ah	DIN 51935	0.06	cm²/s
Adkaanshaha Rockwell HR5/100	DIN IEC60413/303	90	HR
Iska caabin koronto oo gaar ah	DIN IEC 60413/402	13	μΩm
Xoogga dabacsanaanta	DIN IEC 60413/501	60	MPA
Xoogga cadaadiska	DIN 51910	130	MPA
Modulus-ka Young	DIN 51915	11.5 × 10³	MPA
Ballaarinta kulaylka (20-200℃)	DIN 51909	4.2X10^-6	K^-1
Gudbinta kulaylka (20℃)	DIN 51908	105	Wm^-1K^-1

Waxaa si gaar ah loogu talagalay soo saarista unugyada qorraxda ee waxtarka sare leh, iyadoo taageerta habaynta wafer-ka cabbirka weyn ee G12. Naqshadeynta side-qaadaha ee la hagaajiyay ayaa si weyn u kordhisa wax-soo-saarka, taasoo suurtogalinaysa heerarka wax-soo-saarka oo sarreeya iyo kharashyada wax-soo-saarka oo hooseeya.

Shay	Nooca	Lambarka side-ka wafer-ka
Doonta Grephite ee PEVCD - Taxanaha 156	Doonta grephite ee 156-13	144
	Doonta grephite ee 156-19	216
	Doonta grephite ee 156-21	240
	Doonta garaafitka 156-23	308
Doonta Grephite ee PEVCD - Taxanaha 125	Doon grephite ah oo 125-15 ah	196
	Doonta grephite ee 125-19	252
	Doon 125-21 grphite ah	280