Apo Graphite i uhi ʻia me ka Tantalum Carbide Porous

Apo Graphite i uhi ʻia me ka Tantalum Carbide Porous
ʻO ka graphite i uhi ʻia me ka porous tantalum carbide (TaC)he mea nui i hoʻomohala kūikawā ʻia no nā wahi wela kiʻekiʻe a me nā wahi ʻino loa o ka hana ʻana o ka semiconductor. ʻO kona substrate he graphite isostatic maʻemaʻe kiʻekiʻe, i uhi ʻia me kahi uhi tantalum carbide porous like me ka hoʻohana ʻana i ka hoʻokahe ʻana o ka mahu kemika (CVD). He paʻakikī kiʻekiʻe loa ko TaC (9-10 ma ka unahi Mohs) a me kahi kiko heheʻe o 3880°C. I hui pū ʻia me ke kūpaʻa wela maikaʻi loa o ka graphite a me nā waiwai māmā, hoʻohui kēia mea i ka ikaika wela kiʻekiʻe me ke kūʻē ʻana i ka hoʻouka kemika a me ka haʻalulu wela, e lilo ia i koho kūpono no nā lako hana semiconductor e hana ana ma lalo o nā kūlana koʻikoʻi.

Nā Pōmaikaʻi o ka Porous Tantalum Carbide Graphite:
1. Ke kū'ē ʻana i ka palaho kiʻekiʻe loa
-He inert kemika ʻo TaC, e pale pono ana i ka pala mai nā halogens e like me ka fluorine a me ka chlorine, e hoʻolōʻihi nui ana i ke ola o nā lako.
-Hoʻonui ka ʻano porous i ka ʻili o ka uhi, e hana ana i kahi pale pale ikaika aʻe a hoʻemi i ka pilikia o ka hoʻokahe ʻana o nā ʻāpana.
2. Kūlana Kiʻekiʻe Loa
-Me kahi kiko heheʻe e hoʻokokoke ana i 4000°C, hiki iā ia ke hana no nā wā lōʻihi i loko o ka vacuum a i ʻole nā ​​​​lewa inert ma mua o 2500°C.
-Ua kūlike loa ke koina hoʻonui wela o ka uhi ʻana me ko ka graphite, e pale ana i ka nahā a me ka delamination i hoʻokumu ʻia e ka thermal cycling.
3. Maʻemaʻe kiʻekiʻe a me ka haumia haʻahaʻa
-Ke hoʻohana nei i nā mea maka a me nā kaʻina hana semiconductor-grade, haʻahaʻa loa ka nui o ka haumia metala, e hōʻemi nui ana i ka pilikia o ka haumia wafer.
-He mānoanoa a paʻa ka ʻili i nā kemika, e hōʻemi ana i ka hana ʻāpana a hoʻokō i nā kūlana lumi maʻemaʻe paʻa.
4. Hoʻolālā Maʻamau
Hiki ke hana ʻia nā ʻano paʻakikī e like me nā kiʻi a ka mea kūʻai aku, a hiki ke hoʻomalu ʻia ka porosity a me ka mānoanoa o ka uhi ʻana e hoʻokō ai i ke kahe kinoea kūpono a me ka conductivity thermal.
5. Ola lōʻihi a me ke kumukūʻai mālama haʻahaʻa
ʻO ke kūpaʻa kiʻekiʻe loa o ka pala a me ke kū'ē ʻana i ka ʻaʻahu o nā uhi TaC porous e hoʻonui i ke ola o nā ʻāpana ma 3-5 mau manawa i hoʻohālikelike ʻia me ka graphite kuʻuna, e hoʻemi ana i ke alapine hoʻololi a me nā kumukūʻai mālama.

Nā Noi Nui
1. Nā ʻāpana koʻikoʻi no ka hana ʻana i ka wafer
- Nā liners o ke keʻena pane, nā baffles, a me ke poʻo ʻauʻau no nā lako CVD/ALD
- Kākoʻo pahuhopu PVD
- Nā ʻāpana hana wela kiʻekiʻe no ka diffusion, oxidation, annealing, a me nā kaʻina hana ʻē aʻe
2. Nā ʻōnaehana hoʻokomo mahu kemika
- Ke pale nei i nā ʻāpana koʻikoʻi i nā wahi ʻino loa (e like me nā fluorides a me nā chlorides) i ka wā o ke kaʻina hana
3. Nā wahi ʻino ʻē aʻe e hoʻoulu ai i ka wela kiʻekiʻe
- Kūpono no ka hoʻomaʻemaʻe kinoea kemika, nā umu lapaʻau wela kūikawā, a me nā noi ʻē aʻe.