Impeta ya Graphite ifite imyenge ya Tantalum Carbide

Impeta ya Graphite ifite imyenge ya Tantalum Carbide
Grafiti ifite imyenge ya tantalum carbide (TaC)ni ibikoresho by'ingenzi byakorewe by'umwihariko ahantu hashyuha cyane kandi hangiza cyane mu nganda za semiconductor. Igice cyayo ni grafitite isostatic ifite isuku nyinshi, itwikiriwe n'igitambaro cya tantalum carbide gifite imyenge ingana ikoresheje chemical vapor deposition (CVD). TaC ifite ubukana bwinshi cyane (9-10 ku gipimo cya Mohs) n'aho ishonga ya 3880°C. Ihujwe n'ubushyuhe bwiza bwa grafiti hamwe n'imiterere yoroheje, iyi mashini ihuza imbaraga z'ubushyuhe bwinshi n'ubudahangarwa bw'ibinyabutabire n'ihungabana ry'ubushyuhe, bigatuma iba amahitamo meza ku bikoresho bya semiconductor bikora mu bihe bikomeye.

Ibyiza bya Graphite ya Tantalum Carbide ifite imyenge:
1. Ubudahangarwa ku nkongi nyinshi cyane
-TaC ntigira imiti ikoreshwa mu buryo bwa shimi, irwanya ingese ituruka kuri halogen nka fluorine na chlorine, bigatuma ibikoresho biramba cyane.
-Imiterere y'imyenge yongera ubuso bw'igitambaro, igakora uruzitiro rukomeye rwo kurinda kandi ikagabanya ibyago byo gushwanyagurika kw'udusimba.
2. Gukomera cyane mu bushyuhe buri hejuru
-Iyo ubushyuhe bushonge bugeze kuri 4000°C, bushobora gukora igihe kirekire mu kirere cyuzuyemo umwuka cyangwa ahantu hadakora neza harenze 2500°C.
-Ingano y'ubushyuhe bw'igitambaro ihuye cyane n'iya grafiti, ikarinda gucika no gutandukana kw'ubushyuhe bitewe n'ihindagurika ry'ubushyuhe.
3. Ubuziranenge bwinshi n'ubwandu buke
-Hakoreshejwe ibikoresho fatizo n'imikorere bya semiconductor, ingano y'imyanda mu byuma iba iri hasi cyane, bigabanya cyane ibyago byo kwandura wafer.
-Ubuso bw'aho hantu burakomeye kandi ntibuhinduka bitewe n'imiti, bigabanya gukora kw'udukoko kandi byujuje ibisabwa mu byumba byo gusukura.
4. Igishushanyo mbonera cyihariye
Imiterere igoye ishobora gukorwa hakurikijwe ibishushanyo by'abakiriya, kandi ubugari bw'imyenge n'ubushyuhe bishobora kugenzurwa kugira ngo habeho urujya n'uruza rwiza rw'umwuka n'ubushyuhe.
5. Igihe kirekire cyo kubaho no gukoresha amafaranga make yo kubungabunga
Ubudahangarwa bwinshi cyane bwo kwangirika no kudashira kw'imyambaro ya TaC ifite imyenge byongera ubuzima bw'ibice byayo inshuro 3-5 ugereranije na grafiti isanzwe, bigabanya inshuro zo gusimbuza n'ikiguzi cyo kubungabunga.

Porogaramu z'ingenzi
1. Ibice by'ingenzi byo gukora wafer
- Utwuma two gushyiramo ibikoresho bya CVD/ALD, uduce duto two gufunga no gufunga, n'agasanduku ko kwiyuhagiriramo.
- Inkunga za PVD
- Ibice by'imikorere ikoresha ubushyuhe bwinshi mu gukwirakwiza, ogisijeni, gufunga, n'izindi nzira
2. Uburyo bwo kubika umwuka w'ibinyabutabire
- Kurinda ibice by'ingenzi mu bidukikije byangiza cyane (nk'ibinure na kloride) mu gihe cyo gukora
3. Ibindi bidukikije bishyuha cyane
- Bikwiriye gukoreshwa mu gutunganya imyuka ikoresha imiti, mu matanura yihariye yo gutunganya ubushyuhe, no mu bindi bikorwa.