Indandatho yeGraphite eneMingxunya yeTantalum Carbide eQokelelweyo
I-graphite egqunywe nge-tantalum carbide (TaC) enemingxumasisixhobo esiphambili esenzelwe ngokukodwa iindawo ezinobushushu obuphezulu, ezirhabaxa kakhulu zokwenza i-semiconductor. Isiseko sayo yi-graphite ye-isostatic ecocekileyo kakhulu, egqunywe nge-tantalum carbide coating eneembobo ezifanayo kusetyenziswa i-chemical vapor deposition (CVD). I-TaC inobunzima obuphezulu kakhulu (9-10 kwisikali se-Mohs) kunye nendawo yokunyibilika engama-3880°C. Idityaniswe nokuzinza kobushushu okugqwesileyo kwe-graphite kunye neempawu ezilula, le nto idibanisa amandla obushushu obuphezulu kunye nokuxhathisa ukuhlaselwa yikhemikhali kunye nokutshayiswa kobushushu, okwenza kube lukhetho olufanelekileyo kwizixhobo zenkqubo ye-semiconductor ezisebenza phantsi kweemeko ezinzima.
Iingenelo ze-Porous Tantalum Carbide Graphite:
1. Ukumelana nokugqwala okuphezulu kakhulu
-I-TaC ayisebenzi ngokweekhemikhali, imelana ngempumelelo nokugqwala okuvela kwiihalogens ezifana ne-fluorine kunye ne-chlorine, nto leyo eyandisa ubomi bezixhobo.
-Ulwakhiwo olunemingxuma luyandisa indawo yomphezulu wengubo, lwenze umqobo okhuselekileyo kwaye lunciphise umngcipheko wokuchitheka kwamasuntswana.
2. Uzinzo oluBalaseleyo lobushushu obuphezulu
-Njengoko iqondo lokunyibilika lisondela kwi-4000°C, linokusebenza ixesha elide kwiindawo ezingenanto okanye ezipholileyo ezingaphaya kwama-2500°C.
-I-coefficient yokwandiswa kobushushu bengubo ihambelana kakhulu neye-graphite, ithintela ukuqhekeka kunye nokwahlukana okubangelwa kukujikeleza kobushushu.
3. Ubunyulu Obuphezulu kunye nongcoliseko oluphantsi
-Ukusebenzisa izinto kunye neenkqubo ezikrwada ze-semiconductor-grade, umxholo wokungcola kwesinyithi uphantsi kakhulu, nto leyo enciphisa kakhulu umngcipheko wokungcola kwe-wafer.
-Umphezulu uxinene kwaye uzinzile ngokweekhemikhali, nto leyo enciphisa ukuveliswa kweesuntswana kwaye ihlangabezana nemigangatho engqongqo yegumbi lokucoca.
4. Uyilo oluSetyenzisiweyo
Iimilo ezintsonkothileyo zinokuveliswa ngokwemizobo yabathengi, kwaye ukuxinana kunye nobukhulu bokugquma kunokulawulwa ukuze kufezekiswe ukuhamba kakuhle kwegesi kunye nokuqhuba kobushushu.
5. Ixesha Elide Lokuphila Neendleko Eziphantsi Zokulungisa
Ukugqwala okuphezulu kakhulu kunye nokumelana nokuguguleka kweengubo zeTaC ezinemingxuma kwandisa ubomi bezinto ngokuphindwe ka-3-5 xa kuthelekiswa negrafiti yendabuko, nto leyo enciphisa ukuphindaphinda kokutshintshwa kunye neendleko zokugcinwa.
Izicelo eziphambili
1. Izinto eziphambili zokwenza i-wafer
- Ii-reaction chamber liners, ii-baffles, kunye ne-shower-head yezixhobo ze-CVD/ALD
- Iinkxaso zePVD ekujoliswe kuzo
- Izixhobo zenkqubo yobushushu obuphezulu zokusasazwa, ukuxinana, ukutsalwa, kunye nezinye iinkqubo
2. Iinkqubo zokufaka umphunga weekhemikhali
- Ukukhusela izinto ezibalulekileyo kwiindawo ezinobungozi kakhulu (ezifana ne-fluoride kunye ne-chloride) ngexesha lenkqubo
3. Ezinye iindawo ezinobungozi obuphezulu
- Ifanelekile ukucocwa kwegesi ngamakhemikhali, ii-ovens ezikhethekileyo zonyango lobushushu, kunye nezinye izinto ezisetyenziswayo.
I-VET Energy ngumvelisi ochwephesha ogxile kwi-R&D kunye nemveliso yezinto eziphambili ezifana ne-graphite, i-silicon carbide, i-quartz, kunye nonyango lwezinto ezifana ne-SiC coating, i-TaC coating, i-glassy carbon coating, i-pyrolytic carbon coating, njl. Ezi mveliso zisetyenziswa kakhulu kwi-photovoltaic, i-semiconductor, amandla amatsha, i-metallurgy, njl.
Iqela lethu lobuchwephesha livela kumaziko ophando aphambili asekhaya, linokubonelela ngezisombululo zezinto zobungcali ngakumbi kuwe.
Iingenelo ze-VET Energy ziquka:
• Ilabhoratri yakho yomzi-mveliso kunye neyobungcali;
• Amanqanaba ococeko kunye nomgangatho ophambili kushishino;
• Ixabiso elikhuphisanayo kunye nexesha lokuhambisa elikhawulezayo;
• Ubudlelwane obuninzi kushishino kwihlabathi liphela;
Siyakwamkela ukuba undwendwele ifektri yethu kunye nelebhu nangaliphi na ixesha!
