Giraangiraha Garaafiga ee Dahaarka leh ee Tantalum Carbide

Giraangiraha Garaafiga ee Dahaarka leh ee Tantalum Carbide
Graphite dahaarka leh ee tantalum carbide (TaC)waa walax muhiim ah oo si gaar ah loogu sameeyay jawiga heerkulka sare iyo kan aadka u daxalka badan ee wax soo saarka semiconductor-ka. Substrate-keedu waa isostatic graphite saafi ah oo sarreeya, oo lagu dahaadhay dahaadh tantalum carbide ah oo siman oo daloolsan iyadoo la adeegsanayo kaydinta uumiga kiimikada (CVD). TaC waxay leedahay adkaansho aad u sarreysa (9-10 miisaanka Mohs) iyo dhibic dhalaalaysa oo ah 3880°C. Marka lagu daro xasilloonida kulaylka ee aadka u fiican ee graphite iyo sifooyinka fudud, walaxdani waxay isku daraysaa xoogga heerkulka sare iyo iska caabbinta weerarka kiimikada iyo shoogga kulaylka, taasoo ka dhigaysa doorasho ku habboon qalabka habka semiconductor-ka ee ka shaqeeya xaaladaha daran.

Faa'iidooyinka Garaafiga Tantalum Carbide ee daloola leh:
1. Iska caabinta Daxalka Aad u Sareeya
-TaC waa mid kiimiko ahaan aan firfircoonayn, si wax ku ool ah uga hortagta daxalka ka yimaada halogens-ka sida fluorine iyo chlorine, taasoo si weyn u kordhinaysa cimriga qalabka.
- Qaab-dhismeedka daloolada leh wuxuu kordhiyaa dusha sare ee dahaarka, isagoo sameeya xayndaab ilaalin ah oo adag wuxuuna yareynayaa khatarta daadinta walxaha.
2. Xasillooni Heerkul Sare oo Aad u Fiican
-Iyada oo heerkulku uu ku dhow yahay 4000°C, waxay ku shaqayn kartaa muddo dheer jawi faakiyuum ah ama aan firfircoonayn oo ka sarreeya 2500°C.
- Isugeynta ballaarinta kulaylka ee dahaarka ayaa si aad ah ula mid ah kan garaafka, taasoo ka hortagaysa dildilaaca iyo kala-goynta ay keento wareegga kulaylka.
3. Nadiifin Sare iyo Wasakhayn Hoose
-Iyada oo la adeegsanayo agabyada ceeriin iyo hababka heerka semiconductor-ka, wasakhda birta aad ayay u yar tahay, taasoo si weyn u yareynaysa khatarta wasakhda wafer-ka.
- Dusha sare waa mid cufan oo kiimiko ahaan deggan, taasoo yaraynaysa soo saarista walxaha isla markaana buuxinaysa heerarka adag ee qolka nadiifinta.
4. Naqshad Gaar ah
Qaababka adag waxaa lagu soo saari karaa iyadoo loo eegayo sawirrada macaamiisha, dhumucda daloolka iyo dahaarkana waa la xakameyn karaa si loo gaaro socodka gaaska ugu wanaagsan iyo gudbinta kulaylka.
5. Cimri Dheer iyo Kharashka Dayactirka oo Yar
Daxalka iyo iska caabbinta xirashada ee dahaarka daloolada leh ee TaC waxay kordhisaa cimriga qaybaha 3-5 jeer marka la barbar dhigo garaafitka dhaqameed, taasoo yaraynaysa soo noqnoqoshada beddelka iyo kharashyada dayactirka.

Codsiyada ugu Muhiimsan
1. Qaybaha asaasiga ah ee wax soo saarka buskudka
- Dahaarka qolka falcelinta, baffles-ka, iyo madaxa qubeyska ee qalabka CVD/ALD
- Taageerooyinka bartilmaameedka PVD
- Qaybaha habka heerkulka sare leh ee faafinta, oksaydhka, annealing, iyo hababka kale
2. Nidaamyada kaydinta uumiga kiimikada
- Ilaalinta qaybaha muhiimka ah ee deegaannada aadka u mira-dhalaalka ah (sida fluoride iyo chlorides) inta lagu jiro hawsha
3. Deegaanno kale oo leh daxal-xabo heerkul sare leh
- Ku habboon nadiifinta gaaska kiimikada, foornooyinka daaweynta kulaylka gaarka ah, iyo codsiyada kale.