Mphete ya Graphite Yokutidwa ndi Porous Tantalum Carbide

Mphete ya Graphite Yokutidwa ndi Porous Tantalum Carbide
Graphite yokhala ndi porous tantalum carbide (TaC) yokhala ndi ma porousndi chinthu chofunikira kwambiri chomwe chapangidwa makamaka kuti chigwiritsidwe ntchito m'malo otentha kwambiri komanso owononga kwambiri popanga zinthu za semiconductor. Gawo lake ndi graphite yoyera kwambiri, yokutidwa ndi tantalum carbide coating yokhala ndi porous uniformly pogwiritsa ntchito chemical vapor deposition (CVD). TaC ili ndi kuuma kwakukulu (9-10 pa sikelo ya Mohs) komanso malo osungunuka a 3880°C. Pophatikizidwa ndi kukhazikika kwa kutentha kwabwino kwambiri kwa graphite komanso mawonekedwe opepuka, chinthuchi chimaphatikiza mphamvu ya kutentha kwambiri ndi kukana kuukira kwa mankhwala ndi kutentha, zomwe zimapangitsa kuti ikhale chisankho chabwino kwambiri cha zida za semiconductor process zomwe zimagwira ntchito pansi pamikhalidwe yovuta kwambiri.

Ubwino wa Graphite ya Tantalum Carbide Yokhala ndi Porous:
1. Kukana Kudzikundikira Kwambiri
-TaC ndi yopanda mankhwala, imalimbana bwino ndi dzimbiri kuchokera ku ma halogen monga fluorine ndi chlorine, zomwe zimapangitsa kuti zida zizikhala nthawi yayitali.
-Kapangidwe kake ka machubu kamawonjezera malo a pamwamba pa chophimbacho, kupanga chotchinga cholimba kwambiri komanso kuchepetsa chiopsezo cha kutayika kwa tinthu tating'onoting'ono.
2. Kukhazikika Kwambiri pa Kutentha Kwambiri
-Pomwe kutentha kwake kukuyandikira 4000°C, imatha kugwira ntchito kwa nthawi yayitali mumlengalenga wopanda mpweya kapena mpweya wopitirira 2500°C.
-Kuchuluka kwa kutentha kwa chophimbacho kumafanana kwambiri ndi kwa graphite, zomwe zimaletsa ming'alu ndi kusowa kwa madzi chifukwa cha kutentha.
3. Kuyera Kwambiri ndi Kuipitsidwa Kochepa
-Pogwiritsa ntchito zipangizo ndi njira zopangira za semiconductor, kuchuluka kwa kuipitsidwa kwa zitsulo kumakhala kochepa kwambiri, zomwe zimachepetsa kwambiri chiopsezo cha kuipitsidwa kwa wafer.
-Pamwamba pake ndi wokhuthala komanso wokhazikika pa mankhwala, zomwe zimachepetsa kupanga tinthu tating'onoting'ono komanso kukwaniritsa miyezo yokhwima ya zipinda zoyera.
4. Kapangidwe Kake
Mawonekedwe ovuta amatha kupangidwa malinga ndi zojambula za makasitomala, ndipo ma porosity ndi makulidwe a kupaka amatha kulamulidwa kuti akwaniritse kuyenda bwino kwa mpweya komanso kutentha.
5. Moyo Wautali Ndi Mtengo Wochepa Wokonza
Kutupa kwakukulu komanso kukana kuwonongeka kwa zokutira za TaC zokhala ndi pobowo kumawonjezera moyo wa zigawo ndi nthawi 3-5 poyerekeza ndi graphite yachikhalidwe, zomwe zimachepetsa kuchuluka kwa ndalama zosinthira ndi kukonza.

Mapulogalamu Aakulu
1. Zigawo zazikulu zopangira ma wafer
- Zophimba chipinda chochitirapo kanthu, ma baffle, ndi shawa ya zida za CVD/ALD
- Thandizo la PVD
- Zigawo za kutentha kwambiri zofalitsa, okosijeni, kupopera, ndi njira zina
2. Makina osungira nthunzi ya mankhwala
- Kuteteza zinthu zofunika kwambiri m'malo owononga kwambiri (monga fluoride ndi chlorides) panthawiyi
3. Malo ena owononga kutentha kwambiri
- Yoyenera kuyeretsa mpweya wa mankhwala, uvuni wapadera wothira kutentha, ndi ntchito zina.