PECVD Ipakiye Agasanduku ko Gushyiramo Agasanduku ka Graphite

PECVD Irimo Gushyiramo Agasanduku k'Indabyo Ishusho yagaragaye

Ibisobanuro bigufi:

Agasanduku k’ibikoresho byo gushyiramo PECVD ka VET Energy kagenewe gutanga ubufasha bwizewe kandi bungana ku biti bya wafer mu gihe cyo gushyiramo, binongera ubwiza n’ubuziranenge bw’uburyo bwo gushyiramo. Kubera ko gafite ubushyuhe bwinshi, Agasanduku k’ibirahuri gafasha kubungabunga ibidukikije biri mu byumba bya PECVD, bigabanya ibyago byo kwandura no kwemeza ko uburyo bwo gukora bukora neza cyane.

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Ibisobanuro birambuye ku gicuruzwa

Ibirango by'ibicuruzwa

Agasanduku k'ibikoresho byo gushyiramo VET Energy PECVD ni agasanduku k'ibikoresho byo gutwaramo ibikoresho byagenewe PECVD (plasma enhanced chemical vapor deposition). Aka gasanduku k'ibikoresho byo gushyiramo ibikoresho bya grafiti gakozwe mu bikoresho bya grafiti bifite ubuziranenge bwinshi kandi byuzuye ubucucike. Gafite ubushyuhe bwinshi, gashobora kurwanya ingese, gafite ubushobozi bwo guhagarara neza n'ibindi bintu. Gashobora gutanga urubuga ruhamye rwo gutwaramo ibikoresho bya PECVD no kwemeza ko filime ihagaze neza kandi igororotse.

Udupaki two gushyiramo ibikoresho bya VET Energy PECVD dukoreshwa cyane mu bikoresho bya semiconductor, photovoltaic, LED n'ibindi. Urugero:

▪ Semiconductor: Uburyo bwa PECVD bwo gukoresha ibikoresho bya semiconductor nka silicon wafers na epitaxial wafers.

▪ Ingufu z'izuba: Uburyo bwa PECVD bwo gukora filime ntoya zikoresha imirasire y'izuba.

▪ LED: Uburyo bwa PECVD bwo gukoresha utubumbe twa LED.

Ibyiza by'ibicuruzwa

▪Kuzamura ireme rya filime:Kugenzura ko filime ishyirwa ku buryo bumwe kandi ikongera ireme ryayo.

▪Kongera igihe cyo gukoresha ibikoresho:Irwanya ingese neza cyane, yongera igihe cyo gukora ibikoresho bya PECVD.

▪Gabanya ikiguzi cyo gukora:Udupaki twa grafiti tw’ubuziranenge dushobora kugabanya igipimo cy’ibisigazwa by’ibimera no kugabanya ikiguzi cyo kubitunganya.

Ibikoresho bya grafiti bivuye muri SGL:

Ibipimo bisanzwe: R6510
Urutonde	Igipimo ngenderwaho cy'ibizamini	Agaciro	Ishami
Ingano mpuzandengo y'ingano	ISO 13320	10	μm
Ubucucike bw'umubyimba	DIN IEC 60413/204	1.83	g/cm³
Ubwinshi bw'imyenge ifunguye	DIN66133	10	%
Ingano y'umwobo uringaniye	DIN66133	1.8	μm
Ubushobozi bwo kwihanganira	DIN 51935	0.06	cm²/s
Ubukomere bwa Rockwell HR5/100	DIN IEC60413/303	90	HR
Ubushobozi bwihariye bwo guhangana n'amashanyarazi	DIN IEC 60413/402	13	μΩm
Imbaraga zo koroha	DIN IEC 60413/501	60	MPa
Imbaraga zo gukanda	DIN 51910	130	MPa
Uburyo Young's modulus	DIN 51915	11.5×10³	MPa
Kwaguka k'ubushyuhe (20-200℃)	DIN 51909	4.2X10^-6	K^-1
Ubushobozi bwo gutwara ubushyuhe (20℃)	DIN 51908	105	Wm^-1K^-1

Yagenewe by'umwihariko gukora uturemangingo tw'izuba dukora neza cyane, ishyigikira gutunganya wafer nini za G12. Imiterere myiza y'imodoka itwara imizigo yongera cyane umusaruro, bigatuma umusaruro wiyongera kandi ikiguzi cy'umusaruro kikagabanuka.

Ikintu	Ubwoko	Imodoka itwara wafer ifite nimero
Ubwato bwa PEVCD Grephite - Urukurikirane rwa 156	Ubwato bwa grephite 156-13	144
	Ubwato bwa grephite 156-19	216
	Ubwato bwa grephite 156-21	240
	Ubwato bwa grafiti 156-23	308
Ubwato bwa PEVCD Grephite - Urukurikirane rwa 125	Ubwato bwa grephite 125-15	196
	Ubwato bwa grephite 125-19	252
	Ubwato bwa grphite 125-21	280