SiC Coated Graphite Halfmoon Part Bakeng sa Silicon Carbide Epitaxial Furnace

SiC Coated Graphite Halfmoon Part For Silicon Carbide Epitaxial Furnace Setšoantšo se Featured

Tlhaloso e Khutšoanyane:

VET Energy ke moetsi ea hloahloa le morekisi oa likarolo tsa mantlha tsa silicon carbide epitaxial furnaces. Karolo ea rona ea SiC e koahetsoeng ka graphite halfmoon e sebelisa graphite e hloekileng e kopantsoeng le theknoloji e tsoetseng pele ea ho roala CVD. E etselitsoe maemo a phahameng a mocheso le a senyang haholo a epitaxial. Graphite e hloekileng e fana ka karolo e ntle ka ho fetisisa ea ho hanyetsa mocheso o phahameng (> 1600 ℃) le botsitso ba mocheso, ho netefatsa ho lumellana ha tšimo ea mocheso; Ho roala ha CVD ho etsa lera le ts'ireletso e teteaneng holim'a metsi ka theknoloji ea CVD, ho ntlafatsa haholo thepa ea anti-oxidation le anti-etching, le ho lelefatsa bophelo ba ts'ebeletso ka makhetlo a fetang a 3.

Boitsebiso:Bohloeki bo phahameng ba graphite

Tlhoekiso:＜5ppm

Ho roala:CVD-SiC kapa CVD-TaC

Boikemisetso:Brand sebōpi kapa OEM

Re romelle lengolo-tsoibila Khoasolla joalo ka PDF

Lintlha tsa Sehlahisoa

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SiC Coated Graphite Halfmoon Karoloke karolo ea bohlokoa e sebelisoang lits'ebetsong tsa tlhahiso ea semiconductor, haholo-holo bakeng sa lisebelisoa tsa SiC epitaxial. Re sebelisa theknoloji ea rona e nang le tokelo ea molao ho etsa hore karolo ea halofo ea khoeli e be le bohloeki bo phahameng ka ho fetisisa, ho ts'oaroa hantle ha seaparo le bophelo bo botle ba tšebeletso, hammoho le lik'hemik'hale tse phahameng tsa lik'hemik'hale le thepa ea botsitso ba mocheso.

Lisebelisoa tsa motheo: graphite e phahameng-e hloekileng
Litlhoko tsa bohloeki:carbon content ≥99.99%, molora oa molora ≤5ppm, ho etsa bonnete ba hore ha ho na litšila tse kenngoang ho silafatsa lera la epitaxial ka mocheso o phahameng.
Melemo ea ts'ebetso:
High thermal conductivity:Thermal conductivity ka mocheso oa kamore e fihla ho 150W / (m · K), e haufi le boemo ba koporo 'me e ka fetisetsa mocheso kapele.
Coefficient e tlase ea katoloso:5×10^-6/℃ (25-1000 ℃), e tsamaellanang le silicon carbide substrate (4.2×10)^-6/℃), ho fokotsa ho phatloha ha lesela le bakoang ke khatello ea mocheso.
Ts'ebetso e nepahetseng:Mamello ea boholo ba ± 0.05mm e fihlelleha ka machining a CNC ho netefatsa ho tiisoa ha kamore.

Lisebelisoa tse fapaneng tsa CVD SiC le CVD TaC

Ho roala	Tshebetso	Papiso	Tšebeliso e tloaelehileng
CVD-SiC	Mocheso: 1000-1200℃Khatello: 10-100 Torr	Hardness HV2500, botenya ba 50-100um, khanyetso e ntle ea oxidation (e tsitsitseng ka tlase ho 1600 ℃)	Li-furnaces tsa Universal epitaxial, tse loketseng maemo a tloaelehileng a leholimo a kang hydrogen le silane
CVD-TaC	Mocheso: 1600-1800℃Khatello: 1-10 Torr	Hardness HV3000, botenya 20-50um, e sa bolae ke kutu (e khona ho mamella likhase tse senyang tse kang HCl, NH₃, joalo-joalo)	Libaka tse senyang haholo (tse kang GaN epitaxy le etching equipment), kapa mekhoa e khethehileng e hlokang mocheso o phahameng haholo oa 2600°C.

Tlhahlobo ea boleng

Botenya ba ho roala: tekanyo ea botenya ba laser (ho nepahala ± 1um) kapa tlhahlobo ea likarolo tse fapaneng tsa SEM.
Matla a bond: teko ea pele (moroalo o boima> 50N) kapa tlhahlobo ea ultrasonic (lebelo la molumo> 5000m/s).
Khanyetso ea kutu: sekhahla sa tahlehelo ea boima (<0.1 mg/cm²・h) e lekiloeng moeeng oa HCl (5 vol%, 1600℃).

VET Energy ke moetsi ea hloahloa o shebaneng le R&D le tlhahiso ea lisebelisoa tse tsoetseng pele tse phahameng joalo ka graphite, silicon carbide, quartz, hammoho le kalafo ea thepa e kang SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, joalo-joalo Lihlahisoa li sebelisoa haholo ho photovoltaic, semiconductor, matla a macha, metallurgy, metallurgy, metalc.

Sehlopha sa rona sa tekheniki se tsoa litsing tse phahameng tsa lipatlisiso tsa lapeng, se ka u fa litharollo tsa lisebelisoa tse eketsehileng bakeng sa hau.

Melemo ea Matla a VET e kenyelletsa:
• Femetheri le laboratori ea litsebi;
• Maemo a bohloeki a etelletseng pele indastering le boleng;
• Theko ea tlhōlisano & Nako ea ho fana ka potlako;
• Litšebelisano tse ngata tsa indasteri lefatšeng ka bophara;

Re u amohela ho bona feme le laboratori ea rona ka nako efe kapa efe!