Karolo ea Graphite e koahetsoeng ka SiCke karolo ea bohlokoa e sebelisoang lits'ebetsong tsa tlhahiso ea li-semiconductor, haholo-holo bakeng sa lisebelisoa tsa epitaxial tsa SiC. Re sebelisa theknoloji ea rona e nang le patente ho etsa karolo ea halofo ea khoeli e hloekile haholo, e ts'oanang hantle ea ho roala le bophelo bo botle ba ts'ebeletso, hammoho le khanyetso e phahameng ea lik'hemik'hale le thepa ea botsitso ba mocheso.
Lisebelisoa tsa motheo: graphite e hloekileng haholo
Litlhoko tsa bohloeki:dikahare tsa khabone ≥99.99%, dikahare tsa molora ≤5ppm, ho netefatsa hore ha ho ditshila tse tshwaetswang ho silafatsa lera la epitaxial mochesong o phahameng.
Melemo ea ts'ebetso:
Ho khanna ha mocheso o phahameng:Ho tsamaisa mocheso mochesong oa kamore ho fihla ho 150W/(m・K), e leng haufi le boemo ba koporo 'me e ka fetisa mocheso kapele.
Koefficient e tlase ea katoloso:5 × 10-6/℃ (25-1000℃), e tsamaellanang le substrate ea silicon carbide (4.2×10-6/℃), ho fokotsa ho petsoha ha lesela le bakwang ke kgatello ya mocheso.
Ho nepahala ha ts'ebetso:Ho mamellana ha boholo ba ±0.05mm ho fihlellwa ka ho sebetsa ka CNC ho netefatsa ho kwalwa ha kamore.
Litšebeliso tse fapaneng tsa CVD SiC le CVD TaC
| Ho koahela | Tshebetso | Papiso | Tšebeliso e tloaelehileng |
| CVD-SiC | Mocheso: 1000-1200℃ Khatello: 10-100 Torr | Bothata HV2500, botenya ba 50-100um, khanyetso e ntle ea oxidation (e tsitsitseng ka tlase ho 1600℃) | Lifono tsa epitaxial tsa bokahohleng, tse loketseng sepakapaka se tloaelehileng joalo ka haeterojene le silane |
| CVD-TaC | Mocheso: 1600-1800℃ Khatello: 1-10 Torr | Bothata ba HV3000, botenya ba 20-50um, bo hanela mafome haholo (bo ka mamella likhase tse senyang tse kang HCl, NH₃, jj.) | Libaka tse senyang haholo (tse kang GaN epitaxy le lisebelisoa tsa ho fata), kapa lits'ebetso tse ikhethang tse hlokang mocheso o phahameng haholo oa 2600°C |
Tlhahlobo ea boleng
Botenya ba ho roala: tekanyo ea botenya ba laser (ho nepahala ± 1um) kapa tlhahlobo ea SEM ea likarolo tse tšekaletseng.
Matla a tlamo: teko ea ho ngoapa (mojaro o boima > 50N) kapa teko ea ultrasound (lebelo la molumo > 5000m/s).
Ho hanyetsa tshenyo: sekgahla sa tahlehelo ya boima (<0.1 mg/cm²・h) se lekilweng sepakapakeng sa HCl (5 vol%, 1600℃).
VET Energy ke moetsi oa litsebi ea shebaneng le R&D le tlhahiso ea thepa e tsoetseng pele ea maemo a holimo joalo ka graphite, silicon carbide, quartz, hammoho le kalafo ea thepa joalo ka SiC coating, TaC coating, khalase carbon coating, pyrolytic carbon coating, jj. Lihlahisoa tsena li sebelisoa haholo ho photovoltaic, semiconductor, matla a macha, metallurgy, jj.
Sehlopha sa rona sa botekgeniki se tsoa litsing tse holimo tsa lipatlisiso tsa lehae, se ka u fa litharollo tse ling tsa lisebelisoa tsa profeshenale.
Melemo ea VET Energy e kenyelletsa:
• Laboratori ea fektheri le ea litsebi ea hau;
• Maemo le boleng bo hloekileng bo etellang pele indastering;
• Theko e qothisanang lehlokoa le nako e potlakileng ea ho tlisa thepa;
• Likamano tse ngata tsa indasteri lefatšeng ka bophara;
Rea u amohela ho etela fektheri le laboratori ea rona neng kapa neng!
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Karolo ea halofo ea khoeli e nang le sekoahelo sa Tantalum Carbide
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Lesale la Graphite le koahetsoeng ka TaC
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Tantalum Carbide Coating Wafer Susceptor
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Lesale le koahetsoeng ka tantalum carbide le thata haholo
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Moetsi oa li-cap tsa graphite tse koahetsoeng ka TaC
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Masale a Tataiso ea ho Koahela Tantalum Carbide