SiC Coated Graphite Halfmoon Partyog ib feem tseem ceeb siv nyob rau hauv semiconductor manufacturing txheej txheem, tshwj xeeb tshaj yog rau SiC epitaxial khoom. Peb siv peb cov patented technology los ua ib nrab hnub nrog purity siab heev, zoo txheej uniformity thiab ib tug zoo heev kev pab cuam lub neej, nrog rau cov tshuaj tiv thaiv siab thiab thermal stability.
Cov khoom siv hauv paus: high-purity graphite
Purity xav tau:Cov ntsiab lus carbon ≥99.99%, cov ntsiab lus tshauv ≤5ppm, kom ntseeg tau tias tsis muaj impurities yog precipitated kom paug cov epitaxial txheej ntawm kub.
Kev ua tau zoo zoo:
High thermal conductivity:Lub thermal conductivity ntawm chav tsev kub nce mus txog 150W / (m・K), uas yog ze rau qib tooj liab thiab tuaj yeem hloov tau sai.
Tsawg expansion coefficient:5 × 10-6/ ℃ (25-1000 ℃), sib piv cov silicon carbide substrate (4.2 × 10-6/ ℃), txo qhov tawg ntawm txheej txheej los ntawm thermal stress.
Kev ua kom raug:Qhov ntev ntev ntawm ± 0.05mm yog ua tiav los ntawm CNC machining los xyuas kom meej lub sealing ntawm lub chamber.
Kev sib txawv ntawm CVD SiC thiab CVD TaC
| Txheej | Txheej txheem | Kev sib piv | Tej daim ntawv thov |
| CVD-SiC | Kub: 1000-1200 ℃ Siab: 10-100 Torr | Hardness HV2500, thickness 50-100um, oxidation zoo heev (ruaj khov hauv qab 1600 ℃) | Universal epitaxial furnaces, haum rau cov pa cua xws li hydrogen thiab silane |
| CVD-TaC | Kub: 1600-1800 ℃ Siab: 1-10 Torr | Hardness HV3000, thickness 20-50um, tsis tshua muaj corrosion-resistant (tuaj yeem tiv taus corrosive gases xws li HCl, NH₃, thiab lwm yam) | Ib puag ncig corrosive heev (xws li GaN epitaxy thiab cov khoom siv etching), los yog cov txheej txheem tshwj xeeb uas yuav tsum muaj qhov kub thiab txias ntawm 2600 ° C |
Kev soj ntsuam zoo
Txheej thickness: laser thickness gauge (qhov tseeb ± 1um) los yog SEM cross-sectional tsom xam.
Bond zog: kos kuaj (qhov tseem ceeb load> 50N) lossis kuaj ultrasonic (suab tshaj tawm> 5000m / s).
Corrosion resistance: huab hwm coj poob (<0.1 mg / cm²・h) kuaj hauv HCl huab cua (5 vol%, 1600 ℃).
VET Energy yog cov chaw tsim khoom lag luam tsom rau R&D thiab tsim cov khoom siv high-end xws li graphite, silicon carbide, quartz, nrog rau cov khoom siv kho mob xws li SiC txheej, TaC txheej, iav carbon txheej, pyrolytic carbon txheej, thiab lwm yam. Cov khoom siv dav siv hauv photovoltaic, semiconductor, tshiab zog, metalclurgy.
Peb pab neeg ua haujlwm los ntawm cov tsev kawm tshawb fawb saum toj kawg nkaus hauv tebchaws, tuaj yeem muab cov ntaub ntawv tshaj lij tshaj lij rau koj.
VET Energy zoo muaj xws li:
• Tus kheej lub Hoobkas thiab kev kuaj xyuas;
• Kev lag luam-ua purity theem thiab zoo;
• Tus nqi sib tw & Lub sijhawm xa khoom sai;
• Ntau lub koom haum kev lag luam thoob ntiaj teb;
Peb zoo siab tos txais koj tuaj xyuas peb lub Hoobkas thiab chav kuaj txhua lub sijhawm!
