SiC Coated Graphite Halfmoon Ib Feemyog ib qho tseem ceeb uas siv rau hauv cov txheej txheem tsim khoom semiconductor, tshwj xeeb tshaj yog rau cov khoom siv SiC epitaxial. Peb siv peb cov thev naus laus zis patented los ua ib feem ntawm lub hli ib nrab nrog kev ntshiab siab heev, kev sib npaug zoo thiab lub neej ua haujlwm zoo heev, nrog rau kev tiv taus tshuaj lom neeg thiab kev ruaj khov thermal.
Cov khoom siv hauv paus: graphite purity siab
Cov kev cai ntawm kev huv huv:Cov ntsiab lus carbon ≥99.99%, cov ntsiab lus tshauv ≤5ppm, kom ntseeg tau tias tsis muaj cov khoom tsis huv uas tau ua kom cov txheej epitaxial tsis huv ntawm qhov kub siab.
Cov txiaj ntsig ntawm kev ua tau zoo:
Kev ua tau zoo ntawm cov cua sov:Qhov thermal conductivity ntawm chav tsev kub ncav cuag 150W / (m ・ K), uas ze rau qib tooj liab thiab tuaj yeem hloov pauv cua sov sai.
Cov coefficient nthuav dav qis:5 × 10-6/℃ (25-1000℃), phim lub silicon carbide substrate (4.2 × 10-6/℃), txo qhov tawg ntawm lub txheej uas tshwm sim los ntawm kev ntxhov siab thermal.
Kev ua tiav qhov tseeb:Kev kam rau siab ntawm ± 0.05 hli yog ua tiav los ntawm CNC machining kom ntseeg tau tias lub chamber sealing.
Cov ntawv thov sib txawv ntawm CVD SiC thiab CVD TaC
| Txheej | Txheej Txheem | Kev sib piv | Daim ntawv thov ib txwm muaj |
| CVD-SiC | Kub: 1000-1200 ℃ Siab: 10-100 Torr | Hardness HV2500, tuab 50-100um, tiv taus oxidation zoo heev (ruaj khov hauv qab 1600 ℃) | Universal epitaxial furnaces, tsim rau cov huab cua ib txwm muaj xws li hydrogen thiab silane |
| CVD-TaC | Kub: 1600-1800 ℃ Siab: 1-10 Torr | Hardness HV3000, tuab 20-50um, tiv taus corrosion heev (tuaj yeem tiv taus cov pa roj corrosive xws li HCl, NH₃, thiab lwm yam) | Cov chaw muaj corrosive heev (xws li GaN epitaxy thiab etching khoom siv), lossis cov txheej txheem tshwj xeeb uas xav tau qhov kub siab heev ntawm 2600 ° C |
Kev tshuaj xyuas zoo
Txheej tuab: laser thickness gauge (qhov tseeb ± 1um) lossis SEM cross-sectional analysis.
Lub zog sib txuas: kev sim khawb (qhov hnyav tseem ceeb> 50N) lossis kev sim ultrasonic (lub suab ceev> 5000m / s).
Kev tiv thaiv xeb: qhov poob phaus (<0.1 mg/cm²・h) sim hauv HCl huab cua (5 vol%, 1600 ℃).
VET Zog yog ib lub chaw tsim khoom uas tsom mus rau R & D thiab kev tsim cov khoom siv siab heev xws li graphite, silicon carbide, quartz, nrog rau cov khoom siv kho xws li SiC txheej, TaC txheej, iav carbon txheej, pyrolytic carbon txheej, thiab lwm yam. Cov khoom siv dav siv hauv photovoltaic, semiconductor, lub zog tshiab, metallurgy, thiab lwm yam.
Peb pab neeg kev tshaj lij los ntawm cov tsev kawm tshawb fawb hauv tsev sab saum toj, tuaj yeem muab cov kev daws teeb meem ntau dua rau koj.
Cov txiaj ntsig ntawm VET Energy suav nrog:
• Muaj lub Hoobkas thiab chaw kuaj mob tshaj lij;
• Cov qib kev huv thiab qhov zoo uas ua tus thawj coj hauv kev lag luam;
• Tus nqi sib tw & Lub sijhawm xa khoom sai;
• Kev koom tes ntau yam lag luam thoob ntiaj teb;
Peb txais tos koj tuaj xyuas peb lub Hoobkas thiab chaw kuaj mob txhua lub sijhawm!
