SiC Coated Graphite Halfmoon Vaegao se vaega autu o loʻo faʻaaogaina i le gaosiga o gaosiga semiconductor, aemaise lava mo masini epitaxial SiC. Matou te faʻaaogaina a matou tekonolosi pateni e fai ai le vaega o le afa masina ma le mama maualuga, lelei le faʻapipiʻiina o le faʻapipiʻiina ma se olaga sili ona lelei, faʻapea foʻi ma le maualuga o vailaʻau faʻamaʻi ma mea e mautu ai le vevela.
Mea fa'avae: graphite maualuga-mama
Manaoga mama:kaponi anotusi ≥99.99%, lefulefu anotusi ≤5ppm, ina ia mautinoa e leai ni mea eleelea e precipitated e faaleagaina ai le vaega epitaxial i le vevela maualuga.
Fa'amanuiaga fa'atinoga:
Fa'avevela vevela maualuga:O le fa'avevela vevela ile vevela ole potu e o'o ile 150W/(m・K), lea e latalata ile maualuga ole kopa ma e mafai ona vave fa'afefe le vevela.
Fa'asili fa'alautele maualalo:5×10-6/ ℃ (25-1000 ℃), fa'afetaui le mea fa'apipi'i carbide silicon (4.2×10).-6/ ℃), faʻaitiitia le taʻe o le ufiufi e mafua mai i le vevela vevela.
Fa'atonuga sa'o:O le faʻapalepale o le ± 0.05mm e maua e ala ile masini CNC e faʻamautinoa ai le faʻamaufaʻailogaina o le potu.
Talosaga eseese o CVD SiC ma CVD TaC
| Ufiufi | Fa'agasologa | Faatusatusaga | Fa'aoga masani |
| CVD-SiC | Temperaute: 1000-1200 ℃ Omiga: 10-100 Torr | Ma'a'a HV2500, mafiafia 50-100um, sili ona lelei fa'ama'i fa'ama'i (maumau i lalo ole 1600 ℃) | Universal epitaxial ogaumu, talafeagai mo siosiomaga masani e pei o le hydrogen ma silane |
| CVD-TaC | Vevela: 1600-1800 ℃ Omiga: 1-10 Torr | Ma'a'a HV3000, mafiafia 20-50um, matua'i fa'a'ele'ele (e mafai ona tatalia kasa fa'a'a'a pei ole HCl, NH₃, ma isi) | Si'osi'omaga sili ona leaga (e pei o le GaN epitaxy ma meafaigaluega etching), po'o faiga fa'apitoa e mana'omia ai le maualuga o le vevela o le 2600°C |
Su'ega lelei
Ufiufi mafiafia: fua le mafiafia leisa (saʻo ± 1um) poʻo le SEM suʻesuʻega faʻasolosolo.
Malosi fa'amau: su'ega mata'utia (avega mamafa > 50N) po'o su'ega fa'a ultrasonic (saosaoa leo > 5000m/s).
Tete'e a'a: fua tele gau (<0.1 mg/cm²・h) su'eina ile HCl atemosifia (5 vol%, 1600℃).
VET Energy o se tagata gaosi tomai faʻapitoa e taulaʻi i le R & D ma le gaosiga o mea maualuga maualuga e pei o le graphite, silicon carbide, quartz, faʻapea foʻi ma le togafitiga faʻapitoa e pei o le SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, ma isi.
O la matou 'au fa'atekinisi e sau mai fa'alapotopotoga su'esu'e fa'apitonu'u pito i luga, e mafai ona tu'uina atu fa'afitauli fa'apitoa fa'apitoa mo oe.
VET Malosiaga manuia e aofia ai:
• Lava falegaosimea ma falesuesue fa'apolofesa;
• Tulaga mama ma tulaga lelei e ta'imua i alamanuia;
• Tau fa'atauva'a & Taimi vave tu'uina atu;
• Fa'apa'aga fa'apisinisi tele i le lalolagi atoa;
Matou te faʻafeiloaia oe e asiasi i la matou fale gaosimea ma fale suʻesuʻe i soo se taimi!
