He paepae uta VET Energy PECVD he kaikawe tika i hangaia mō te tukanga PECVD (plasma enhanced chemical vapor deposition). He mea hanga tēnei paepae karāti whakatakotoranga kounga teitei ki te rauemi karāti tino parakore, tino matotoru. He tino ātete ki te pāmahana teitei, te ātete ki te waikura, te pumau o ngā āhuatanga me ētahi atu āhuatanga. Ka taea e ia te whakarato i tētahi tūāpapa kaikawe pumau mō te tukanga PECVD me te whakarite i te ōritetanga me te papatahi o te whakatakotoranga kiriata.
E whakamahia whānuitia ana ngā paepae uta VET Energy PECVD i roto i ngā mara semiconductor, photovoltaic, LED me ētahi atu mara. Hei tauira:
▪ Kaihikohiko Ā-ira: Tukanga PECVD mō ngā rauemi hiko ā-ira pērā i ngā papa silicon me ngā papa epitaxial.
▪ Te pūngao hiko: Te tukanga PECVD mō ngā kiriata angiangi o te pūtau rā.
▪ LED: Tukanga PECVD mō ngā maramara LED.
Ngā Painga o te Hua
▪Whakapai ake i te kounga o te kiriata:Kia ōrite te whakatakoto o te kiriata, kia pai ake ai te kounga.
▪Whakaroa i te roa o te ora o ngā taputapu:He ātete pai ki te waikura, ka roa ake te ora o ngā taputapu PECVD.
▪Whakaitihia ngā utu whakaputa:Ka taea e ngā paepae karāhe kounga teitei te whakaiti i te tere para me ngā utu whakaputa.
Rauemi karāpiti mai i SGL:
| Tawhā noa: R6510 | |||
| Rārangi | Paerewa whakamātautau | Uara | Wāhanga |
| Rahi witi toharite | ISO 13320 | 10 | µm |
| Kīanga papatipu | DIN IEC 60413/204 | 1.83 | karamu/henitimi3 |
| Pūngao tuwhera | DIN66133 | 10 | % |
| Rahi waenga o ngā pūwero | DIN66133 | 1.8 | µm |
| Āheitanga uruhanga | DIN 51935 | 0.06 | henimita/hekona |
| Te pakeketanga o Rockwell HR5/100 | DIN IEC60413/303 | 90 | HR |
| Ātete hiko motuhake | DIN IEC 60413/402 | 13 | μΩm |
| Kaha piko | DIN IEC 60413/501 | 60 | MPa |
| Kaha pēhanga | DIN 51910 | 130 | MPa |
| Te modulus a Young | DIN 51915 | 11.5×10³ | MPa |
| Te whakawhanuitanga wera (20-200 ℃) | DIN 51909 | 4.2X10-6 | K-1 |
| Te kawe wera (20℃) | DIN 51908 | 105 | Wm-1K-1 |
He mea hanga motuhake mō te hanga pūtau pūngao rā tino whai hua, hei tautoko i te tukatuka angiangi rahi G12. Mā te hoahoa kawe kua arotauhia ka nui ake te kaha whakaputa, ka taea ai te piki ake o ngā reiti hua me te whakaiti i ngā utu whakaputa.
| Taonga | Momo | Kaikawe tau wafer |
| Waka Grephite PEVCD - Te raupapa 156 | 156-13 poti grephite | 144 |
| 156-19 poti grephite | 216 | |
| 156-21 poti grephite | 240 | |
| 156-23 poti karāhe | 308 | |
| Waka Grephite PEVCD - Te raupapa 125 | Waka grephite 125-15 | 196 |
| 125-19 poti grephite | 252 | |
| 125-21 poti graphite | 280 |
