VET Energy Tire ɗin ɗaukar kaya na PECVD wani abu ne mai ɗaukar kaya daidai gwargwado wanda aka tsara don tsarin PECVD (ƙarfafa sinadarin sinadarai na plasma). Wannan tire ɗin ɗaukar kaya mai inganci an yi shi ne da kayan graphite mai tsabta da yawa. Yana da kyakkyawan juriya ga zafin jiki mai yawa, juriya ga tsatsa, kwanciyar hankali na girma da sauran halaye. Yana iya samar da dandamali mai ƙarfi don tsarin PECVD da kuma tabbatar da daidaito da lanƙwasa na ɗaukar fim.
Ana amfani da tiren ɗaukar kaya na PECVD sosai a fannin semiconductor, photovoltaic, LED da sauran fannoni. Misali:
▪ Semiconductor: Tsarin PECVD don kayan semiconductor kamar su silicon wafers da epitaxial wafers.
▪ Na'urar ɗaukar hoto: Tsarin PECVD don fina-finan siraran ƙwayoyin hasken rana.
▪ LED: Tsarin PECVD don kwakwalwan LED.
Amfanin Samfuri
▪Inganta ingancin fim:Tabbatar da cewa an saka fim ɗin a wuri ɗaya kuma an inganta ingancinsa.
▪Tsawaita rayuwar kayan aiki:Kyakkyawan juriya ga tsatsa, tsawaita rayuwar kayan aikin PECVD.
▪Rage farashin samarwa:Tire-tiren graphite masu inganci na iya rage yawan shara da kuma rage farashin samarwa.
Kayan zane daga SGL:
| Siga ta yau da kullun: R6510 | |||
| Fihirisa | Matsayin gwaji | darajar | Naúrar |
| Matsakaicin girman hatsi | ISO 13320 | 10 | μm |
| Yawan yawa | DIN IEC 60413/204 | 1.83 | g/cm3 |
| Buɗaɗɗen rami | DIN66133 | 10 | % |
| Girman ramin matsakaici | DIN66133 | 1.8 | μm |
| Turewa | DIN 51935 | 0.06 | cm²/s |
| Taurin Rockwell HR5/100 | DIN IEC60413/303 | 90 | HR |
| Takamaiman juriyar lantarki | DIN IEC 60413/402 | 13 | μΩm |
| Ƙarfin lankwasawa | DIN IEC 60413/501 | 60 | MPa |
| Ƙarfin matsi | DIN 51910 | 130 | MPa |
| Tsarin Matasa | DIN 51915 | 11.5×10³ | MPa |
| Faɗaɗawar zafi (20-200℃) | DIN 51909 | 4.2X10-6 | K-1 |
| Maida wutar lantarki mai zafi (20℃) | DIN 51908 | 105 | Wm-1K-1 |
An tsara shi musamman don kera ƙwayoyin hasken rana masu inganci, yana tallafawa sarrafa manyan wafer na G12. Tsarin ɗaukar kaya mai inganci yana ƙara yawan aiki sosai, yana ba da damar samun ƙarin yawan amfanin ƙasa da ƙarancin farashin samarwa.
| Abu | Nau'i | Mai ɗaukar wafer mai lamba |
| Jirgin ruwan PEVCD Grephite - Jerin 156 | Jirgin ruwan grephite na 156-13 | 144 |
| Jirgin ruwan grephite na 156-19 | 216 | |
| Jirgin ruwan grephite na 156-21 | 240 | |
| Jirgin ruwan graphite na 156-23 | 308 | |
| Jirgin ruwan PEVCD Grephite - Jerin 125 | Jirgin ruwan grephite na 125-15 | 196 |
| Jirgin ruwan grephite na 125-19 | 252 | |
| Jirgin ruwan grophite na 125-21 | 280 |
