PECVD Loading Tray Tire Zane-zane

PECVD Yana Load da Tire Tire Wanda Aka Fitar da Hoton

Takaitaccen Bayani:

Tiretin Loading na PECVD na VET Energy an ƙirƙira shi don samar da amintacce har ma da goyan baya ga wafers yayin ajiya, haɓaka daidaito da ingancin tsarin ajiya. Tare da kyakkyawan juriya na zafi, Tray ɗin Graphite yana taimakawa kula da yanayin sarrafawa a cikin ɗakunan PECVD, rage haɗarin kamuwa da cuta da tabbatar da ingantaccen tsari.

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Cikakken Bayani

Tags samfurin

VET Energy PECVD tire mai ɗaukar nauyi daidaitaccen jigilar kaya ne wanda aka ƙera don tsarin PECVD (ingantacciyar tururin sinadari na plasma). Wannan babban tire mai hoto mai inganci an yi shi da babban tsafta, kayan zane mai girma. Yana da kyakkyawan juriya na zafin jiki, juriya na lalata, kwanciyar hankali da sauran halaye. Zai iya samar da ingantaccen dandamali mai ɗaukar hoto don aiwatar da PECVD kuma tabbatar da daidaituwa da kwanciyar hankali na jigilar fim.

VET Energy PECVD loading trays ana amfani da ko'ina a semiconductor, photovoltaic, LED da sauran filayen. Misali:

Semiconductor: Tsarin PECVD don kayan semiconductor kamar wafer silicon da wafers na epitaxial.

▪ Photovoltaic: Tsarin PECVD don finafinan bakin ciki na cell na rana.

LED: Tsarin PECVD don kwakwalwan LED.

Amfanin Samfur

▪Inganta ingancin fim:Tabbatar shigar da fim iri ɗaya da haɓaka ingancin fim.

▪Tsawaita rayuwar kayan aiki:Kyakkyawan juriya na lalata, haɓaka rayuwar sabis na kayan aikin PECVD.

▪Rage farashin samarwa:Babban ingantattun tran ɗin graphite na iya rage raguwar tarkace da rage farashin samarwa.

Abubuwan graphite daga SGL:

Na yau da kullun: R6510
Fihirisa	Gwaji misali	Daraja	Naúrar
Matsakaicin girman hatsi	ISO 13320	10	μm
Yawan yawa	DIN IEC 60413/204	1.83	g/cm³
Bude porosity	Farashin 66133	10	%
Girman pore matsakaici	Farashin 66133	1.8	μm
Lalacewa	Farashin 51935	0.06	cm²/s
Rockwell taurin HR5/100	DIN IEC60413/303	90	HR
Takamaiman tsayayyar wutar lantarki	DIN IEC 60413/402	13	μΩm
Ƙarfin sassauƙa	DIN IEC 60413/501	60	MPa
Ƙarfin matsi	Farashin 51910	130	MPa
Modules na matasa	Farashin 51915	11.5×10³	MPa
Thermal fadada (20-200 ℃)	Farashin 51909	4.2X10^-6	K^-1
Thermal conductivity (20 ℃)	Farashin 51908	105	Wm^-1K^-1

An ƙirƙira shi musamman don samar da ingantaccen hasken rana, yana tallafawa sarrafa wafer mai girma na G12. Ingantacciyar ƙira mai ɗaukar kaya yana ƙaruwa sosai da fitarwa, yana ba da damar ƙimar yawan amfanin ƙasa da ƙananan farashin samarwa.

Abu	Nau'in	Mai ɗaukar waya mai lamba
Jirgin ruwan PEVCD Grephite - Jerin 156	156-13 grephite jirgin ruwa	144
	156-19 grephite jirgin ruwa	216
	156-21 grephite jirgin ruwa	240
	156-23 graphite jirgin ruwa	308
Jirgin ruwan PEVCD Grephite - Jerin 125	125-15 grephite jirgin ruwa	196
	125-19 grephite jirgin ruwa	252
	125-21 jirgin ruwan graphite	280