ʻO ka pā hoʻouka VET Energy PECVD kahi mea lawe pololei i hoʻolālā ʻia no ke kaʻina hana PECVD (plasma enhanced chemical vapor deposition). Hana ʻia kēia pā graphite deposition kiʻekiʻe me ka mea graphite maʻemaʻe kiʻekiʻe. Loaʻa iā ia ke kūpaʻa wela kiʻekiʻe maikaʻi loa, ke kūpaʻa i ka pala, ke kūpaʻa dimensional a me nā ʻano ʻē aʻe. Hiki iā ia ke hāʻawi i kahi kahua lawe paʻa no ke kaʻina hana PECVD a hōʻoia i ka like a me ka palahalaha o ka waiho ʻana o ka ʻiliʻili.
Hoʻohana nui ʻia nā pā hoʻouka VET Energy PECVD i nā semiconductor, photovoltaic, LED a me nā kahua ʻē aʻe. Eia kekahi laʻana:
▪ Semiconductor: Ke kaʻina hana PECVD no nā mea semiconductor e like me nā wafers silicon a me nā wafers epitaxial.
▪ Photovoltaic: Kaʻina hana PECVD no nā ʻili lahilahi o ke kelepona lā.
▪ LED: Kaʻina hana PECVD no nā ʻāpana LED.
Nā Pōmaikaʻi Huahana
▪Hoʻomaikaʻi i ka maikaʻi o ke kiʻiʻoniʻoni:E hōʻoia i ka waiho like ʻana o ka ʻiliʻili a hoʻomaikaʻi i ka maikaʻi o ke kiʻiʻoniʻoni.
▪Hoʻolōʻihi i ke ola o nā lako:ʻO ke kūpaʻa maikaʻi loa i ka pala, hoʻolōʻihi i ke ola lawelawe o nā lako PECVD.
▪E hōʻemi i nā kumukūʻai hana:Hiki i nā pā graphite kiʻekiʻe ke hōʻemi i ka wikiwiki o ka ʻōpala a hoʻemi i nā kumukūʻai hana.
Mea graphite mai SGL:
| ʻO ke ana maʻamau: R6510 | |||
| Papa Kuhikuhi | Kūlana hoʻāʻo | Waiwai | ʻĀpana |
| Ka nui o ka palaoa maʻamau | ISO 13320 | 10 | μm |
| Ka nui o ka nui | DIN IEC 60413/204 | 1.83 | g/cm3 |
| Ka porosity hāmama | DIN66133 | 10 | % |
| Ka nui o nā pore waena | DIN66133 | 1.8 | μm |
| Ka hiki ke komo | DIN 51935 | 0.06 | kenimika²/s |
| ʻO ka paʻakikī Rockwell HR5/100 | DIN IEC60413/303 | 90 | HR |
| Ke kū'ē uila kiko'ī | DIN IEC 60413/402 | 13 | μΩm |
| Ikaika kūlou | DIN IEC 60413/501 | 60 | MPa |
| Ikaika hoʻopaʻa | DIN 51910 | 130 | MPa |
| Modulus o Young | DIN 51915 | 11.5×10³ | MPa |
| Hoʻonui wela (20-200 ℃) | DIN 51909 | 4.2X10-6 | K-1 |
| Ka hoʻokele wela (20 ℃) | DIN 51908 | 105 | Wm-1K-1 |
Ua hoʻolālā kūikawā ʻia no ka hana ʻana i nā cell solar kiʻekiʻe, e kākoʻo ana i ka hana wafer nui G12. Hoʻonui nui ka hoʻolālā lawe i hoʻomaikaʻi ʻia i ka throughput, e hiki ai ke kiʻekiʻe i nā helu hua a me nā kumukūʻai hana haʻahaʻa.
| Mea | ʻAno | Mea lawe wafer helu |
| Waʻa PEVCD Grephite - Ka moʻo 156 | 156-13 waʻa grephite | 144 |
| 156-19 waʻa grephite | 216 | |
| 156-21 waʻa grephite | 240 | |
| 156-23 waʻa graphite | 308 | |
| Waʻa PEVCD Grephite - Ka moʻo 125 | waʻa grephite 125-15 | 196 |
| 125-19 waʻa grephite | 252 | |
| 125-21 waʻa griphite | 280 |
