PECVD Na-ebugo Tray Deposition Graphite Tray

Foto a na-egosi na tray PECVD na-ebu ibu

Nkọwa Dị Mkpirikpi:

E mere tray ibuli elu nke VET Energy iji nye nkwado dị nchebe na ọbụna maka wafers n'oge a na-etinye ya, na-eme ka usoro nchekwa ahụ dịkwuo mma ma na-adị mma. Site na ezigbo iguzogide okpomọkụ ya, Tray Graphite na-enyere aka idobe gburugburu ebe obibi a na-achịkwa n'ime ụlọ PECVD, na-ebelata ihe ize ndụ nke mmetọ ma na-ahụ na usoro ahụ dị elu.

Zitere anyị ozi-e Budata ya dị ka PDF

Nkọwa Ngwaahịa

Akara Ngwaahịa

VET Energy Tray ibu PECVD bụ ihe e ji ebu ihe kpọmkwem emebere maka usoro PECVD (plasma enhanced chemical vapor deposition). E ji ihe graphite dị ọcha ma dị elu mee tray grafite deposition a. O nwere ezigbo iguzogide okpomọkụ dị elu, iguzogide nchara, nkwụsi ike nha na njirimara ndị ọzọ. Ọ nwere ike inye ikpo okwu ebu ihe kwụsiri ike maka usoro PECVD ma hụ na ihe nkiri ahụ dị n'otu ma dị larịị.

Ike VET A na-eji tray ibu PECVD eme ihe nke ukwuu na semiconductor, photovoltaic, LED na mpaghara ndị ọzọ. Dịka ọmụmaatụ:

▪ Semiconductor: Usoro PECVD maka ihe semiconductor dị ka silicon wafers na epitaxial wafers.

▪ Fotovoltaic: Usoro PECVD maka ihe nkiri dị gịrịgịrị nke mkpụrụ ndụ anyanwụ.

▪ LED: Usoro PECVD maka ibe LED.

Uru Ngwaahịa

▪Meziwanye mma ihe nkiri:Hụ na e tinyere ihe nkiri ahụ n'otu ebe ma melite mma ya.

▪Gbatịa ndụ akụrụngwa:Ezigbo nguzogide nchara, gbasaa ndụ ọrụ nke akụrụngwa PECVD.

▪Belata ọnụ ahịa mmepụta:Traị graphite dị elu nwere ike ibelata ọnụego mkpofu ma belata ọnụ ahịa mmepụta.

Ihe e ji graphite mee site na SGL:

Nha nkịtị: R6510
Ndepụta Ndekọ	Ụkpụrụ nnwale	Uru	Ngalaba
Nkezi nha ọka	ISO 13320	10	μm
Njupụta dị ukwuu	DIN IEC 60413/204	1.83	g/cm³
Oghere mepere emepe	DIN66133	10	%
Nha oghere dị ọkara	DIN66133	1.8	μm
Ịgafe	DIN 51935	0.06	cm²/s
Ike siri ike nke Rockwell HR5/100	DIN IEC60413/303	90	HR
Nguzogide eletriki kpọmkwem	DIN IEC 60413/402	13	μΩm
Ike flexural	DIN IEC 60413/501	60	MPa
Ike mkpakọ	DIN 51910	130	MPa
Modulu nke Young	DIN 51915	11.5 × 10³	MPa
Mgbasawanye okpomọkụ (20-200℃)	DIN 51909	4.2X10^-6	K^-1
Ọkụ conductivity (20℃)	DIN 51908	105	Wm^-1K^-1

E mere ya kpọmkwem maka imepụta sel anyanwụ dị elu, na-akwado nhazi wafer G12 buru ibu. Nhazi ụgbọ ibu kachasị mma na-eme ka mmepụta ya dịkwuo elu nke ukwuu, na-eme ka ọnụego mmepụta dị elu ma na-ebelata ọnụ ahịa mmepụta.

ihe	Ụdị	Onye na-ebu nọmba wafer
Ụgbọ mmiri PEVCD Grephite - Usoro 156	Ụgbọ mmiri grephite nke 156-13	144
	Ụgbọ mmiri grephite nke 156-19	216
	Ụgbọ mmiri grephite nke 156-21	240
	Ụgbọ mmiri graphite 156-23	308
Ụgbọ mmiri Grephite nke PEVCD - Usoro 125	Ụgbọ mmiri grephite 125-15	196
	Ụgbọ mmiri grephite nke 125-19	252
	Ụgbọ mmiri grephite 125-21	280