Susceptor SiC Dahaaran Foosto

Neefta foostowaa qayb xudun u ah hababka kobaca epitaxial semiconductor sida MOCVD, MBE, CVD. Inta badan waxaa loo isticmaalaa in lagu qaado waferrada qolal falcelin heerkul sare leh iyo in la bixiyo jawi heerkulbeeg ah oo isku mid ah oo deggan si loo hubiyo meelaynta saxda ah ee lakabyada epitaxial (sida GaN, SiC, iwm.). Shaqadeeda udub-dhexaadka ah waa in la helo isku mid ahaanshaha heerkulka dusha sare ee wafer iyada oo loo marayo koontaroolka goobta kulaylka saxda ah, si loo hubiyo dhumucda, uruurinta doping, iyo qaab dhismeedka kareemka isku midka ah ee filimada khafiifka ah ee epitaxial.

Waxaan isticmaalnaa tignoolajiyadayada patented si aan u samaynonuglaanta foostooo leh nadiif aad u sarreeya, lebbisnimo daahan oo wanaagsan iyo nolol adeeg oo aad u wanaagsan, iyo sidoo kale iska caabbinta kiimikada sare iyo guryaha xasilloonida kuleylka.

Tamarta VET waxay isticmaashaa garaafka nadiifka sare leh oo leh daahan CVD-SiC si kor loogu qaado xasiloonida kiimikada:

1. Walaxda garaafka nadiifka ah ee sare
Dhaqdhaqaaqa kuleyliyaha sare: kuleylka kuleylka ee graphite waa seddex jeer silikoon, kaas oo si dhakhso ah ugu wareejin kara kulaylka ilaha kuleylka ilaa waferka oo soo gaabin kara wakhtiga kuleylka.
Awoodda makaanikada: cufnaanta garaafka cadaadiska istatic ≥ 1.85 g/cm ³, awood u leh u adkeysiga heerkulka sare ee ka sarreeya 1200 ℃ iyada oo aan qalloocin.

2. CVD SiC dahaarka
A β - lakabka SiC waxaa lagu sameeyay dusha sare ee graphite by kaydinta uumiga kiimikada (CVD), oo leh nadiif ah ≥ 99.99995%, qaladka lebiska ee dhumucdiisuna waxay ka yar tahay ± 5%, iyo qallafsanaanta dusha sare waxay ka yar tahay Ra0.5um.

3. Horumarinta waxqabadka:
Iska caabinta daxalka: waxay u adkeysan kartaa gaasaska daxalka sare leh sida Cl2, HCl, iwm, waxay kordhin kartaa cimriga GaN epitaxy saddex jeer gudaha deegaanka NH3.
Deganaanshaha kulaylka: Isku-xidhka balaadhinta kulaylka (4.5 × 10-6/℃) waxay isbarbar dhigtaa garaafka si looga fogaado dillaaca dahaarka ee ay sababto isbeddellada heerkulka.
Adag iyo Xiro iska caabin: Adag-ku-darka Vickers-ku waxa uu gaadhaa 28GPa, kaas oo 10 jeer ka sarreeya graphite waxana uu yarayn karaa khatarta xagashada wafer.