I-SiC Coated Barel Susceptor eyenziwe ngokwezifiso

I-barrel susceptoriyingxenye esemqoka ezinqubweni zokukhula ze-semiconductor epitaxial ezifana ne-MOCVD, MBE, CVD. Isetshenziselwa kakhulu ukuthwala ama-wafers emakamelweni okuphendula izinga lokushisa eliphezulu futhi inikeze indawo yensimu eshisayo efanayo futhi ezinzile ukuze kuqinisekiswe ukubekwa okunembile kwezingqimba ze-epitaxial (ezifana ne-GaN, i-SiC, njll.). Umsebenzi wayo oyinhloko ukuzuza ukufana okuphezulu kwezinga lokushisa le-wafer ngokusebenzisa ukulawulwa kwensimu eshisayo enembile, ngaleyo ndlela kuqinisekiswe ukushuba, ukugxila kwe-doping, kanye nokufana kwesakhiwo sekristalu samafilimu amancanyana e-epitaxial.

Sisebenzisa ubuchwepheshe bethu obunelungelo lobunikazi ukwenza i-umgqomo susceptorngokuhlanzeka okuphezulu kakhulu, ukufana okuhle kokumboza kanye nempilo enhle yesevisi, kanye nokumelana namakhemikhali aphezulu kanye nezakhiwo zokuzinza kokushisa.

I-VET Energy isebenzisa i-graphite ehlanzekile kakhulu ene-CVD-SiC coating ukuthuthukisa ukuzinza kwamakhemikhali:

1. High ubumsulwa graphite impahla
Ukushisa okuphezulu kwe-thermal: i-thermal conductivity ye-graphite iphindwe kathathu kune-silicon, engadlulisa ngokushesha ukushisa kusuka emthonjeni wokushisa kuya ku-wafer futhi inciphise isikhathi sokushisa.
Amandla omshini: I-Isostatic pressure graphite density ≥ 1.85 g/cm ³, ekwazi ukumelana nezinga lokushisa eliphezulu ngaphezu kuka-1200 ℃ ngaphandle kokuguquka.

2. I-CVD SiC enamathela
Isendlalelo se-β - SiC sakhiwe phezu kwegraphite nge-chemical vapor deposition (CVD), enobumsulwa obungu-≥ 99.99995%, iphutha lokufana lokujiya koqweqwe olungaphansi kuka-± 5%, futhi ubulukhuni obungaphezulu bungaphansi kuka-Ra0.5um.

3. Ukuthuthukiswa kokusebenza:
Ukumelana nokugqwala: kungamelana namagesi aphezulu abolayo njenge-Cl2, i-HCl, njll, kunganweba ubude besikhathi se-GaN epitaxy izikhathi ezintathu endaweni ye-NH3.
Ukuzinza kwe-thermal: I-coefficient yokunwetshwa kwe-thermal (4.5 × 10-6/℃) ifanelana ne-graphite ukugwema ukuqhekeka kokumboza okubangelwa ukushintshashintsha kwezinga lokushisa.
Ukuqina Nokumelana Nokugqoka: Ukuqina kwe-Vickers kufinyelela ku-28 GPa, okuphindwe izikhathi ezingu-10 kune-graphite futhi kunganciphisa ingozi yokuklwebheka kwe-wafer.