I-SiC Coated Barrel Susceptor eyenziwe ngokwezifiso

Isivikelo semigqomoiyisici esiyinhloko ezinqubweni zokukhula kwe-epitaxial ye-semiconductor njenge-MOCVD, i-MBE, i-CVD. Isetshenziswa kakhulu ukuthwala ama-wafer emakamelweni okusabela okushisa okuphezulu futhi inikeze indawo yensimu yokushisa efanayo nezinzile ukuqinisekisa ukufakwa okunembile kwezingqimba ze-epitaxial (njenge-GaN, i-SiC, njll.). Umsebenzi wayo oyinhloko ukufeza ukufana okuphezulu kokushisa kobuso be-wafer ngokulawula okunembile kwensimu yokushisa, ngaleyo ndlela kuqinisekiswe ukujiya, ukuhlushwa kwe-doping, kanye nokufana kwesakhiwo sekristalu samafilimu amancane e-epitaxial.

Sisebenzisa ubuchwepheshe bethu obunelungelo lobunikazi ukwenzaumhluzi wemigqomongokuhlanzeka okuphezulu kakhulu, ukufana okuhle kokumboza kanye nokuphila kahle kwenkonzo, kanye nokumelana okuphezulu kwamakhemikhali kanye nezakhiwo zokuqina kokushisa.

I-VET Energy isebenzisa i-graphite emsulwa kakhulu ene-CVD-SiC coating ukuze ithuthukise ukuzinza kwamakhemikhali:

1. Izinto ze-graphite ezihlanzekile kakhulu
Ukushisa okuphezulu: Ukushisa kwe-graphite kuphindwe kathathu kune-silicon, okungadlulisa ukushisa ngokushesha kusuka emthonjeni wokushisa kuya ku-wafer futhi kunciphise isikhathi sokushisa.
Amandla omshini: Ubuningi be-graphite yengcindezi ye-isostatic ≥ 1.85 g/cm³, ekwazi ukumelana namazinga okushisa aphezulu ngaphezu kuka-1200 ℃ ngaphandle kokuguquka.

2. Ukwembozwa kwe-CVD SiC
Isendlalelo se-β - SiC sakhiwa phezu kobuso be-graphite nge-chemical vapor deposition (CVD), ngobumsulwa obungu-≥ 99.99995%, iphutha elifanayo lokujiya kokumboza lingaphansi kuka-±5%, kanti ubulukhuni bomphezulu bungaphansi kuka-Ra0.5um.

3. Ukuthuthukiswa kokusebenza:
Ukumelana nokugqwala: ingamelana namagesi agqwala kakhulu njenge-Cl2, i-HCl, njll., ingandisa isikhathi sokuphila se-epitaxy ye-GaN ngokuphindwe kathathu endaweni ye-NH3.
Ukuqina kokushisa: I-coefficient yokwanda kokushisa (4.5 × 10-6/℃) ifana ne-graphite ukuze kugwenywe ukuqhekeka kokumboza okubangelwa ukushintshashintsha kokushisa.
Ukuqina Nokumelana Nokuguguleka: Ukuqina kwe-Vickers kufinyelela ku-28 GPa, okuphindwe kayishumi kune-graphite futhi kunganciphisa ingozi yokuklwebheka kwe-wafer.