Customized SiC Coated Barrel Susceptor

Mokelikeli oa moqomoke karolo ea mantlha lits'ebetsong tsa kholo ea semiconductor epitaxial joalo ka MOCVD, MBE, CVD. Haholo-holo e sebelisetsoa ho jara li-wafers ka likamoreng tsa mocheso o phahameng oa mocheso le ho fana ka tikoloho e ts'oanang le e tsitsitseng ea mocheso oa mocheso ho netefatsa ho behoa ho nepahetseng ha likarolo tsa epitaxial (tse kang GaN, SiC, joalo-joalo). Mosebetsi oa eona oa mantlha ke ho fihlela ho ts'oana ho hoholo ha mocheso oa liphaephe ka taolo e nepahetseng ea sebaka sa mocheso, ka hona ho netefatsa botenya, mahloriso a doping, le sebopeho sa kristale sa lifilimi tse tšesaane tsa epitaxial.

Re sebelisa theknoloji ea rona e nang le tokelo ea molao ho etsasekoahelo sa moqomoe nang le bohloeki bo phahameng ka ho fetesisa, ho ts'oana hantle ha moaparo le bophelo bo botle ba ts'ebeletso, hammoho le khanyetso e phahameng ea lik'hemik'hale le thepa ea botsitso ba mocheso.

VET Energy e sebelisa graphite e hloekileng haholo e nang le CVD-SiC coating ho matlafatsa botsitso ba lik'hemik'hale:

1. Boitsebiso bo phahameng ba graphite bo hloekileng
Thermal conductivity: thermal conductivity of graphite ke makhetlo a mararo a silicon, e ka fetisang mocheso ka potlako ho tloha mohloling oa mocheso ho ea ho sephaphatha le ho khutsufatsa nako ea ho futhumatsa.
Matla a mochine: Isostatic pressure graphite density ≥ 1.85 g/cm ³, e khonang ho mamella mocheso o phahameng ka holimo ho 1200 ℃ ntle le ho senyeha.

2. Ho roala ha CVD SiC
A β - SiC layer e thehoa holim'a graphite ka lik'hemik'hale tsa mouoane oa lik'hemik'hale (CVD), ka bohloeki ba ≥ 99.99995%, phoso e ts'oanang ea botenya ba ho roala e ka tlaase ho ± 5%, 'me bokaholimo bo ka tlaase ho Ra0.5um.

3. Ntlafatso ea ts'ebetso:
Corrosion resistance: e ka mamella likhase tse senyang tse ngata joalo ka Cl2, HCl, joalo-joalo, e ka lelefatsa bophelo ba GaN epitaxy ka makhetlo a mararo tikolohong ea NH3.
Thermal botsitso: Coefficient ea ho atolosoa ha mocheso (4.5 × 10-6 / ℃) e lumellana le graphite ho qoba ho phatloha ho bakoang ke ho fetoha ha mocheso.
Ho thatafala le ho Rua Resistance: The Vickers hardness fihla 28 GPa, e leng makhetlo a 10 ho feta graphite 'me e ka fokotsa kotsi ea li-wafer scratches.