Yadda ake tsaftace jirgin ruwan graphite na PECVD？| Makamashin VET

1. Amincewa kafin tsaftacewa

1) Lokacin daJirgin ruwan graphite na PECVD/mai ɗaukar kaya ana amfani da shi fiye da sau 100 zuwa 150, mai aiki yana buƙatar duba yanayin murfin akan lokaci. Idan akwai wani shafi mara kyau, yana buƙatar a tsaftace shi kuma a tabbatar da shi. Launin murfin silicon wafer a cikin jirgin ruwa/mai ɗaukar kaya na graphite shuɗi ne. Idan wafer ɗin yana da launuka marasa shuɗi, launuka da yawa, ko bambancin launi tsakanin wafers ɗin ya yi girma, murfin ba shi da kyau, kuma ana buƙatar a tabbatar da dalilin rashin daidaituwar akan lokaci.
2) Bayan an kammala aikin, ma'aikatan sun yi nazarin yanayin rufin da aka shafa,Jirgin ruwan graphite na PECVD/mai ɗaukar kaya, za su tantance ko ana buƙatar tsaftace jirgin ruwan graphite da kuma ko ana buƙatar maye gurbin wurin katin, kuma za a miƙa jirgin ruwan graphite/mai ɗaukar kaya ga ma'aikatan kayan aiki don tsaftacewa.

 

3) Bayanjirgin ruwan graphite/mai ɗaukar kaya ya lalace, ma'aikatan samarwa za su fitar da duk wafers ɗin silicon da ke cikin jirgin ruwan graphite kuma su yi amfani da CDA (iska mai matsewa) don warware gutsuttsuran da ke cikin jirgin.jirgin ruwan graphiteBayan kammala aikin, ma'aikatan kayan aikin za su ɗaga shi zuwa cikin tankin acid ɗin da aka shirya tare da wani kaso na maganin HF don tsaftacewa.

 

2. Tsaftace jirgin ruwan graphite

Ana ba da shawarar a yi amfani da maganin hydrofluoric acid mai kashi 15-25% don tsaftacewa sau uku, kowanne na tsawon awanni 4-5, sannan a riƙa fitar da sinadarin nitrogen akai-akai yayin jiƙawa da tsaftacewa, ana ƙara kimanin rabin sa'a na tsaftacewa; lura: ba a ba da shawarar a yi amfani da iska kai tsaye a matsayin tushen iskar gas don kumfa ba. Bayan an tace, a wanke da ruwa mai tsabta na kimanin awanni 10, kuma a tabbatar an tsaftace jirgin sosai. Bayan tsaftacewa, da fatan za a duba saman jirgin, wurin katin graphite da haɗin takardar jirgin, da sauran sassan don ganin ko akwai ragowar silicon nitride. Sannan a bushe bisa ga buƙatun.

3. Tsaftacewa da kiyayewa

A) Tunda sinadarin HF abu ne mai yawan lalata abubuwa kuma yana da wani irin canjin yanayi, yana da haɗari ga masu aiki. Saboda haka, masu aiki a wurin tsaftacewa dole ne su ɗauki matakan kariya kuma mutum mai himma zai kula da su.

B) Ana ba da shawarar a wargaza jirgin ruwan kuma a tsaftace sashin graphite kawai yayin tsaftacewa, ta yadda kowane ɓangaren da ya taɓa zai iya tsaftacewa sosai. A halin yanzu, masana'antun cikin gida da yawa suna amfani da tsaftacewa gabaɗaya, wanda ya dace, amma saboda HF acid yana lalata sassan yumbu, tsaftacewa gabaɗaya zai rage tsawon rayuwar sassan da suka dace.