Indlela yokucoca isikhephe segrafiti sePECVD？| I-VET Energy

1. Ukuvuma ngaphambi kokucoca

1) XaInqanawa yegrafayithi yePECVD/carrier isetyenziswa izihlandlo ezingaphezu kwe-100 ukuya kwi-150, umqhubi kufuneka ajonge imeko yokugquma ngexesha. Ukuba kukho ukugquma okungaqhelekanga, kufuneka kucocwe kwaye kuqinisekiswe. Umbala oqhelekileyo wokugquma we-silicon wafer kwi-graphite boat/carrier uluhlaza okwesibhakabhaka. Ukuba i-wafer ayinayo iblu, imibala emininzi, okanye umahluko wombala phakathi kwee-wafers mkhulu, kugquma okungaqhelekanga, kwaye unobangela wokugquma kufuneka uqinisekiswe ngexesha.
2) Emva kwenkqubo abasebenzi bahlalutya imeko yokugquma kweInqanawa yegrafayithi yePECVD/umthwali, baza kugqiba ukuba ngaba isikhephe segrafiti kufuneka sicocwe na kwaye ingaba inqaku lekhadi kufuneka litshintshwe na, kwaye isikhephe/umthwali wegrafiti ekufuneka sicocwe uza kunikezelwa kubasebenzi bezixhobo ukuze bacoce.

 

3) Emvaisikhephe segrafayithi/umthwali womonakalo, abasebenzi bemveliso baza kukhupha zonke ii-silicon wafers kwi-graphite boat baze basebenzise i-CDA (umoya ocinezelweyo) ukuhlunga iziqwenga ezikwi-isikhephe segrafayithiEmva kokuba kugqityiwe, abasebenzi bezixhobo baya kuyiphakamisa bayifake kwitanki ye-asidi elungiselelwe ngenxalenye ethile yesisombululo se-HF sokucoca.

 

2. Ukucocwa kwesikhephe segrafiti

Kucetyiswa ukusebenzisa isisombululo se-hydrofluoric acid esiyi-15-25% kwimijikelo emithathu yokucoca, nganye kangangeeyure ezi-4-5, kunye ne-nitrogen ekhupha amanzi rhoqo ngexesha lokucwilisa nokucoca, wongeza malunga nesiqingatha seyure yokucoca; qaphela: akukhuthazwa ukusebenzisa umoya ngqo njengomthombo wegesi wokucwilisa. Emva kokucola, hlambulula ngamanzi acocekileyo malunga neeyure ezili-10, kwaye uqinisekise ukuba isikhephe sicociwe kakuhle. Emva kokucoca, nceda ujonge umphezulu wesikhephe, inqaku lekhadi legrafiti kunye ne-boat sheet joint, kunye nezinye iindawo ukuze ubone ukuba kukho intsalela ye-silicon nitride. Emva koko yomise ngokweemfuno.

3. Amanyathelo okucoca

A) Ekubeni i-HF acid iyinto edlakadlaka kakhulu kwaye inokuguquguquka okuthile, iyingozi kubasebenzi. Ke ngoko, abasebenzi kwindawo yokucoca kufuneka bathathe amanyathelo okhuseleko kwaye balawulwe ngumntu ozinikeleyo.

B) Kucetyiswa ukuba uqhaqhe isikhephe kwaye ucoce kuphela inxalenye yegrafiti ngexesha lokucoca, ukuze inxalenye nganye yoqhagamshelwano icoceke kakuhle. Okwangoku, abavelisi abaninzi basekhaya basebenzisa ukucoca ngokubanzi, nto leyo elula, kodwa ngenxa yokuba i-HF acid iyagqwala kwiindawo zeseramikhi, ukucoca ngokubanzi kuya kunciphisa ubomi benkonzo yeendawo ezifanelekileyo.