Maitiro ekuchenesa chikepe chePECVD graphite？| VET Energy

1. Kutenda usati wachenesa

1) KanaChikepe chegrafiti chePECVD/carrier inoshandiswa kanopfuura ka100 kusvika ku150, mushandi anofanira kutarisa mamiriro ekuputira nenguva. Kana paine kuputira kusina kujairika, kunoda kucheneswa nekusimbiswa. Ruvara rwekuputira rwakajairika rwesilicon wafer mubhoti/carrier yegraphite ibhuruu. Kana wafer isina ruvara rwebhuruu, mavara akawanda, kana musiyano wemavara pakati pewafers wakakura, ipurasitiki isina kujairika, uye chikonzero chekuputira chinofanira kusimbiswa nenguva.
2) Mushure mekuita izvi, vashandi vanoongorora mamiriro ekuputira kweChikepe chegrafiti chePECVD/mutakuri, ndivo vachaona kana chikepe chegrafiti chichifanira kucheneswa uye kana poindi yekadhi ichida kutsiviwa, uye chikepe/mutakuri wegrafiti chinoda kucheneswa chichapihwa kuvashandi vemidziyo kuti vachenese.

 

3) Mushure mechikepe chegirafitikana /carrier yakuvara, vashandi vekugadzira vachatora mawafer ese esilicon ari muchikepe chegraphite voshandisa CDA (mhepo yakamanikidzwa) kuronga zvidimbu zviri muchikepe chegirafitiKana zvapera, vashandi vemichina vachaisimudza voiisa mutangi rine acid rakagadzirwa nechikamu chakati cheHF solution yekuchenesa.

 

2. Kucheneswa kwechikepe chegrafiti

Zvinokurudzirwa kushandisa 15-25% hydrofluoric acid solution katatu kekuchenesa, imwe neimwe kwemaawa 4-5, uye nitrogen inotumbuka nguva nenguva panguva yekunyorova nekuchenesa, uchiwedzera hafu yeawa yekuchenesa; cherechedza: hazvikurudzirwi kushandisa mhepo zvakananga senzvimbo yegesi yekutumbuka. Mushure mekutumbuka, sukurudza nemvura yakachena kwemaawa angangoita gumi, uye simbisa kuti chikepe chacheneswa zvakanaka. Mushure mekuchenesa, ndapota tarisa pamusoro pechikepe, nzvimbo yegirafiti kadhi uye nzvimbo yechikepe, nezvimwe zvikamu kuti uone kana paine silicon nitride residue. Wobva waomesa zvichienderana nezvinodiwa.

3. Nzira dzekudzivirira kuchenesa

A) Sezvo HF acid iri chinhu chinoparadza zvakanyanya uye chiine kushanduka-shanduka, ine njodzi kune vanoshanda pakuchenesa. Saka, vanoshanda pakuchenesa vanofanira kutora matanho ekuchengetedza uye kutarisirwa nemunhu akazvipira.

B) Zvinokurudzirwa kupatsanura chikepe uye kuchenesa chikamu chegirafiti chete panguva yekuchenesa, kuitira kuti chikamu chimwe nechimwe chekubata chicheneswe zvakakwana. Parizvino, vagadziri vazhinji vemumba vanoshandisa kuchenesa kwese, izvo zviri nyore, asi nekuda kwekuti HF acid inokuvadza zvikamu zveceramic, kuchenesa kwese kuchapfupisa hupenyu hwebasa rezvikamu zvinoenderana.