Indlela yokuhlanza isikebhe se-graphite se-PECVD？| I-VET Energy

1. Ukuvuma ngaphambi kokuhlanza

1) LaphoIsikebhe se-graphite se-PECVD/carrier isetshenziswa izikhathi ezingaphezu kuka-100 kuya ku-150, umqhubi udinga ukuhlola isimo sokumboza ngesikhathi. Uma kukhona ukumboza okungajwayelekile, kudinga ukuhlanzwa nokuqinisekiswa. Umbala wokumboza ojwayelekile we-silicon wafer esikebheni/esithwali se-graphite uluhlaza okwesibhakabhaka. Uma i-wafer ingenalo oluhlaza okwesibhakabhaka, imibala eminingi, noma umehluko wombala phakathi kwama-wafer mkhulu, kuyisimbozo esingajwayelekile, futhi imbangela yokungajwayelekile idinga ukuqinisekiswa ngesikhathi.
2) Ngemva kwenqubo abasebenzi bahlaziya isimo sokumboza kwe-Isikebhe se-graphite se-PECVD/isithwali, bazonquma ukuthi isikebhe se-graphite sidinga ukuhlanzwa nokuthi iphuzu lekhadi lidinga ukushintshwa, kanye nesikebhe/isithwali se-graphite esidinga ukuhlanzwa sizonikezwa abasebenzi bemishini ukuze basihlanze.

 

3) Ngemvaisikebhe se-graphite/isithwali sonakele, abasebenzi bokukhiqiza bazokhipha wonke ama-silicon wafers esikebheni se-graphite bese besebenzisa i-CDA (umoya ocindezelwe) ukuhlunga izingcezu ezisesikhwameni.isikebhe se-graphiteNgemva kokuqedwa, abasebenzi bemishini bazoyiphakamisa bayiyise ethangini le-asidi elilungiselelwe ngesilinganiso esithile sesisombululo se-HF sokuhlanza.

 

2. Ukuhlanzwa kwesikebhe se-graphite

Kunconywa ukusebenzisa isisombululo se-hydrofluoric acid esingu-15-25% emizuliswaneni emithathu yokuhlanza, ngayinye amahora angu-4-5, kanye ne-nitrogen eqhumayo ngezikhathi ezithile ngesikhathi sokucwilisa nokuhlanza, wengeze cishe isigamu sehora sokuhlanza; qaphela: akukhuthazwa ukusebenzisa umoya ngqo njengomthombo wegesi wokuqhumisa. Ngemva kokukhuhla, hlanza ngamanzi ahlanzekile cishe amahora ayi-10, bese uqinisekisa ukuthi isikebhe sihlanzwe kahle. Ngemva kokuhlanza, sicela uhlole ubuso besikebhe, iphuzu lekhadi le-graphite kanye ne-boat sheet joint, kanye nezinye izingxenye ukuze ubone ukuthi kukhona yini i-silicon nitride residue. Bese womisa ngokwezidingo.

3. Izinyathelo zokuhlanza

A) Njengoba i-HF acid iyinto ebolisa kakhulu futhi inokuguquguquka okuthile, iyingozi kubasebenzi. Ngakho-ke, abasebenzi endaweni yokuhlanza kumele bathathe izinyathelo zokuphepha futhi baphathwe ngumuntu ozinikele.

B) Kunconywa ukuthi uhlukanise isikebhe bese uhlanza ingxenye yegrafiti kuphela ngesikhathi sokuhlanza, ukuze ingxenye ngayinye yokuxhumana ihlanzwe kahle. Njengamanje, abakhiqizi abaningi basekhaya basebenzisa ukuhlanza okuphelele, okuyinto elula, kodwa ngenxa yokuthi i-HF acid iyagqwala ezingxenyeni ze-ceramic, ukuhlanza okuphelele kuzofinyeza impilo yenkonzo yezingxenye ezifanele.