Momwe mungayeretsere bwato la graphite la PECVD？| VET Energy

1. Kuvomereza musanayeretse

1) PameneBoti la graphite la PECVD/chonyamulira chimagwiritsidwa ntchito nthawi zoposa 100 mpaka 150, wogwiritsa ntchitoyo ayenera kuyang'ana momwe chophimbacho chilili panthawi yake. Ngati pali chophimba chosazolowereka, chiyenera kutsukidwa ndikutsimikiziridwa. Mtundu wozolowereka wa chophimba cha silicon mu boti/chonyamulira cha graphite ndi wabuluu. Ngati chophimbacho chili ndi mtundu wosakhala wabuluu, mitundu yambiri, kapena kusiyana kwa mitundu pakati pa ma wafers ndi kwakukulu, ndi chophimba chosazolowereka, ndipo chifukwa cha cholakwikacho chiyenera kutsimikiziridwa nthawi yake.
2) Pambuyo pa ndondomekoyi, ogwira ntchito amafufuza momwe zinthu zilili pakhungu laBoti la graphite la PECVD/wonyamula, adzaona ngati bwato la graphite likufunika kutsukidwa ndi ngati mfundo ya khadi ikufunika kusinthidwa, ndipo bwato/chonyamula graphite chomwe chikufunika kutsukidwa chidzaperekedwa kwa ogwira ntchito pazida kuti achiyeretse.

 

3) Pambuyo pabwato la graphite/chonyamulira chawonongeka, ogwira ntchito yopanga adzachotsa ma wafer onse a silicon mu boti la graphite ndikugwiritsa ntchito CDA (mpweya wopanikizika) kuti athetse zidutswa zomwe zili mubwato la graphite. Akamaliza, ogwira ntchito pazida adzazinyamula kupita nazo mu thanki ya asidi yomwe yakonzedwa ndi gawo linalake la yankho la HF loyeretsera.

 

2. Kuyeretsa bwato la graphite

Ndikoyenera kugwiritsa ntchito yankho la 15-25% la hydrofluoric acid poyeretsa katatu, kamodzi kwa maola 4-5, komanso kutsanulira nayitrogeni nthawi ndi nthawi poyeretsa ndi kuviika, ndikuwonjezera pafupifupi theka la ola loyeretsa; dziwani: sikuvomerezeka kugwiritsa ntchito mpweya mwachindunji ngati gwero la mpweya wotulutsa mpweya. Mukamaliza kutsuka, tsukani ndi madzi oyera kwa maola pafupifupi 10, ndikutsimikizira kuti bwatolo latsukidwa bwino. Mukamaliza kutsuka, chonde yang'anani pamwamba pa bwatolo, mfundo ya khadi la graphite ndi cholumikizira cha boti, ndi zina kuti muwone ngati pali zotsalira za silicon nitride. Kenako pukutani malinga ndi zofunikira.

3. Njira zodzitetezera ku kuyeretsa

A) Popeza HF acid ndi chinthu chowononga kwambiri ndipo chimakhala ndi kusinthasintha kwina, ndi choopsa kwa ogwira ntchito. Chifukwa chake, ogwira ntchito pamalo oyeretsera ayenera kusamala ndikuyang'aniridwa ndi munthu wodzipereka.

B) Ndikofunikira kusokoneza bwato ndikutsuka gawo la graphite pokhapokha poyeretsa, kuti gawo lililonse lolumikizana lithe kutsukidwa bwino. Pakadali pano, opanga ambiri am'nyumba amagwiritsa ntchito kuyeretsa konse, komwe ndikosavuta, koma chifukwa HF acid imawononga zigawo za ceramic, kuyeretsa konse kudzafupikitsa moyo wa ntchito ya zigawo zomwe zikugwirizana.