Me pēhea te horoi i te poti karāhe PECVD?| VET Energy

1. Te whakaae i mua i te horoinga

1) Ina teWaka karāhe PECVDKi te whakamahia te /kawe neke atu i te 100 ki te 150 ngā wā, me tirotiro e te kaiwhakahaere te āhua o te paninga i te wā tika. Mena he paninga rerekē, me horoi, me whakaū. Ko te tae paninga noa o te angaanga silicon i roto i te poti/kaweanga karāpeti he kikorangi. Mena he kore kikorangi te angaanga, he maha ngā tae, he nui rānei te rerekētanga tae i waenga i ngā angaanga, he paninga rerekē tēnā, ā, me whakaū i te take o te rerekētanga i te wā tika.
2) Whai muri i te tukanga, ka tātarihia e ngā kaimahi te āhua o te paninga o teWaka karāhe PECVD/kaikawe, mā rātou e whakatau mēnā me horoi te poti karāhe, me whakakapi rānei te pūwāhi kāri, ā, ko te poti/kaikawe karāhe e hiahia ana kia horoia ka tukuna ki ngā kaimahi taputapu hei horoi.

 

3) I muri i tepoti karāhe/mēnā kua pakaru te kaikawe, ka tangohia e ngā kaimahi whakaputa ngā papa silicon katoa i roto i te poti graphite ka whakamahi i te CDA (hau kōpeke) hei wehewehe i ngā kongakonga i roto i tepoti karāheKia oti, ka hikitia e ngā kaimahi taputapu ki roto i te tāke waikawa kua oti te whakarite me te nui o te otinga HF hei horoi.

 

2. Te horoi i te poti karāhe

E taunakihia ana kia whakamahia he otinga waikawa hauwaiwai 15-25% mō ngā huringa horoi e toru, mō ia hāora mō te 4-5 hāora, ā, me te pupuhi i te hauota i ia wā i te wā e rumakina ana, me te tāpiri i te hawhe hāora o te horoinga; kia mōhio: kāore e tūtohutia kia whakamahia te hau hei pūtake hau mō te pupuhi. Whai muri i te whakapūkara, horoia ki te wai parakore mō te 10 hāora pea, ā, whakaū kua horoia pai te poti. Whai muri i te horoinga, tirohia te mata o te poti, te pito kāri karāhe me te hononga pepa poti, me ētahi atu wāhanga kia kite ai mēnā he toenga silicon nitride. Kātahi ka whakamarokehia kia rite ki ngā whakaritenga.

3. Ngā mahi ārai horoi

A) Nā te mea he matū tino waikura te waikawa HF, ā, he āhua ngāwari hoki te huri, he mea morearea ki ngā kaiwhakahaere. Nō reira, me āta tiaki ngā kaiwhakahaere i te wāhi horoi, ā, me whakahaere e tētahi tangata motuhake.

B) E taunakihia ana kia wetewetehia te poti, ā, me horoi noa te wāhanga karāhe i te wā e horoia ana, kia taea ai te horoi pai ake i ia wāhanga e pā ana. I tēnei wā, he maha ngā kaihanga o te whare e whakamahi ana i te horoi whānui, he mea watea tēnei, engari nā te mea he waikura te waikawa HF ki ngā wāhanga uku, ka whakapotohia e te horoi whānui te roa o te ora o ngā wāhanga e pā ana.