Uburyo bwo gusukura ubwato bwa grafiti bwa PECVD？| VET Energy

1. Gushimira mbere yo gusukura

1) IyoUbwato bwa grafiti ya PECVD/carrier ikoreshwa inshuro zirenga 100 kugeza 150, umukozi agomba kugenzura imiterere y'igitambaro ku gihe. Niba hari igitambaro kidasanzwe, kigomba gusukurwa no kwemezwa. Ibara risanzwe ry'igitambaro cya silikoni mu bwato bwa grafiti/carrier ni ubururu. Niba igitambaro kidafite ubururu, amabara menshi, cyangwa itandukaniro ry'amabara hagati ya wafer ari rinini, ni igitambaro kidasanzwe, kandi icyateye iki kibazo kigomba kwemezwa ku gihe.
2) Nyuma y'igikorwa, abakozi basesengura imiterere y'ipfundikizo ry'umukandaraUbwato bwa grafiti ya PECVD/umukozi utwara ibintu, bazagena niba ubwato bwa grafiti bugomba gusukurwa kandi niba agace k'ikarita gakwiye gusimburwa, kandi ubwato bwa grafiti/umukozi utwara ibintu bugomba gusukurwa buzahabwa abakozi b'ibikoresho kugira ngo babusukure.

 

3) Nyuma yaubwato bwa grafiti/umukozi wangiritse, abakozi bashinzwe gukora bazakuramo utubuto twose twa silikoni mu bwato bwa grafiti hanyuma bakoreshe CDA (umwuka ufunze) kugira ngo batunganye ibice biri muriubwato bwa grafitiNyuma yo kurangiza, abakozi b'ibikoresho bazabizamura mu kigega cy'aside cyateguwe hamwe n'umuti wa HF wo gusukura.

 

2. Gusukura ubwato bwa grafiti

Bisabwa gukoresha umuti wa aside hydrofluoric wa 15-25% mu gusukura inshuro eshatu, buri kimwe mu gihe cy'amasaha 4-5, kandi ukongeramo azote rimwe na rimwe mu gihe cyo kuyijugunya no kuyisukura, wongeramo hafi iminota 30 yo kuyisukura; icyitonderwa: ntibikwiye gukoresha umwuka nk'isoko ya gaze yo kuyisukura. Nyuma yo kuyisukura, oza n'amazi meza mu gihe cy'amasaha agera ku 10, kandi wemeze ko ubwato bwasukuwe neza. Nyuma yo kuyisukura, nyamuneka reba ubuso bw'ubwato, aho icyuma gipakira girafu n'aho ubwato buhurira, n'ibindi bice kugira ngo urebe niba hari ibisigazwa bya silicon nitride. Hanyuma wumishe ukurikije ibisabwa.

3. Ingamba zo kwirinda isuku

A) Kubera ko aside HF ari ikintu cyangiza cyane kandi kikaba gifite imihindagurikire runaka, ni ikibazo gikomeye ku bakora akazi. Kubwibyo, abakora akazi ko gusukura bagomba gufata ingamba zo kwirinda no gucunga umutekano n'umuntu wabitangiye.

B) Ni byiza gusenya ubwato no gusukura igice cya grafiti gusa mu gihe cyo gusukura, kugira ngo buri gice gifatanye gishobore gusukurwa neza. Muri iki gihe, inganda nyinshi zo mu ngo zikoresha isuku rusange, ibyo bikaba byoroshye, ariko kubera ko aside HF ihumanya ibice bya ceramic, isuku rusange izagabanya igihe cyo gukora cy'ibice bihuye na byo.