Ceramic Wafer Heater AlN Alumina Heating Element
A cikin masana'anta na semiconductor, wafers suna buƙatar sarrafa su a cikin matakai daban-daban, irin su jigon fim na bakin ciki, etching, da sauransu.
yumbu dumamaana amfani da shi kai tsaye zuwa ɗakin sarrafawa kuma suna cikin hulɗar kai tsaye tare da wafer. Ba wai kawai suna ɗaukar wafer ba, har ma suna tabbatar da cewa wafer ɗin ya sami kwanciyar hankali da zafin jiki na tsari. Su ne manyan abubuwan da aka gyara a cikin kayan aikin jigilar fim na bakin ciki na semiconductor!
Mai dumama yumbu ya haɗa da tushe yumbu wanda ke goyan bayan wafer da jikin goyan bayan silinda a gefen baya wanda ke goyan bayansa. Baya ga juriya kashi (dumin dumama) don dumama, akwai kuma na'urorin mitar rediyo (RF Layer) ciki ko a saman ginin yumbu. Don cimma saurin dumama da sanyaya, kauri daga cikin yumbura ya kamata ya zama bakin ciki, amma ma bakin ciki kuma zai rage rashin ƙarfi.
Gabaɗaya ana yin goyan bayan injin dumama yumbu da kayan yumbu tare da ƙimar haɓakar zafi mai kama da na tushe. Mai dumama yana ɗaukar tsari na musamman na ƙasan haɗin gwiwa don kare tashoshi da wayoyi daga tasirin plasma da iskar gas masu lalata. Tallafin yana sanye da mashigin iskar gas mai zafi da bututun fitarwa don tabbatar da yanayin zafi iri ɗaya na hita. Tushen da goyan bayan an haɗa su da sinadarai tare da Layer bonding.
Ana iya yin hita yumbu da yumbu kamar aluminum nitride (AlN), silicon nitride (Si3N4), da alumina (Al2O3). Daga cikin su, AlN shine mafi kyawun zaɓi don dumama yumbu. Idan aka kwatanta da sauran kayan, VET Energy's AlN yumbu yana da halaye masu zuwa:
(1) Kyakkyawan halayen thermal;
(2) Daidaitaccen haɓaka haɓakar haɓakar thermal zuwa kayan silicon semiconductor;
(3) Kyakkyawan kayan aikin injiniya, kyakkyawan juriya na lalacewa, da cikakkun kayan aikin injiniya sun fi beryllium oxide kuma daidai da aluminum oxide;
(4) Kyawawan kaddarorin lantarki masu mahimmanci, ingantaccen rufin lantarki da ƙarancin ƙarancin dielectric;
(5) Mara guba da muhalli.
Takardar bayanai na Kayan yumbu
| Abu | 95% Alumina | 99% Alumina | Zirconia | Silicon carbide | SilikiNtsiri | AluminumNtsiri |
| Launi | fari | rawaya mai haske | fari | baki | baki | launin toka |
| Yawan yawa (g/cm3) | 3.7g/cm 3 | 3.9g/cm 3 | 6.02g/cm 3 | 3.2g/cm 3 | 3.25g/cm 3 | 3.2g/cm 3 |
| Shakar Ruwa | 0% | 0% | 0% | 0% | 0% | 0% |
| Hardness (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - |
| Ƙarfin Ƙarfi (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa |
| Ƙarfin Ƙarfi (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - |
| Modulus Na Matasa Na Ƙarfafawa | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310-350GPa |
| Rabon Poisson | 0.23 | 0.23 | 0.25 | 0.14 | 0.24 | 0.24 |
| Thermal Conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C |
| Ƙarfin Dielectric | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Juyin Juriya (25 ℃) | > 1014Ω · cm | > 1014Ω · cm | > 1014Ω · cm | > 105Ω · cm | > 1014Ω · cm | > 1014Ω · cm |
VET Energy ne mai sana'a manufacturer mayar da hankali a kan R & D da kuma samar da high-karshen ci-gaba kayan kamar graphite, silicon carbide, ma'adini, kazalika da kayan magani kamar SiC shafi, TaC shafi, glassy carbon shafi, pyrolytic carbon shafi, da dai sauransu A kayayyakin da ake amfani da ko'ina a photovoltaic, semiconductor, sabon makamashi, karfe, da dai sauransu.
Ƙungiyarmu ta fasaha ta fito ne daga manyan cibiyoyin bincike na gida, za su iya samar da ƙarin ƙwararrun kayan aiki don ku.
Abubuwan amfani da makamashi na VET sun haɗa da:
• Ma'aikata da kuma ƙwararrun dakin gwaje-gwaje;
• matakan tsabta masu jagorancin masana'antu da inganci;
• Farashin farashi & Lokacin bayarwa da sauri;
• Haɗin gwiwar masana'antu da yawa a duniya;
Muna maraba da ku zuwa vist mu masana'anta da dakin gwaje-gwaje a kowane lokaci!
