Na'urar dumama yumbu AlN Alumina

Na'urar dumama yumbu AlN Alumina
A cikin masana'antar semiconductor, ana buƙatar sarrafa wafers a cikin hanyoyi daban-daban, kamar adana fim ɗin siriri, etching, da sauransu. A cikin waɗannan hanyoyin haɗin yanar gizon, ana buƙatar a dumama wafers ɗin zuwa wani zafin jiki, kuma akwai ƙa'idodi masu tsauri don zafin jiki, saboda daidaiton zafin jiki yana da tasiri mai mahimmanci akan yawan samfurin, kuma abubuwan dumama ba makawa ne.

hita na yumbuana shafa shi kai tsaye a ɗakin sarrafa kayan aiki kuma suna hulɗa kai tsaye da wafer ɗin. Ba wai kawai suna ɗauke da wafer ɗin ba, har ma suna tabbatar da cewa wafer ɗin ya sami yanayin zafin aiki mai kyau da daidaito. Su manyan abubuwan haɗin ne a cikin kayan aikin adana fim ɗin semiconductor mai sirara!

Na'urar dumama yumbu ta ƙunshi tushen yumbu wanda ke tallafawa wafer da kuma jikin tallafi mai siffar silinda a bayan da ke tallafawa. Baya ga sinadarin juriya (layin dumama) don dumama, akwai kuma na'urorin lantarki na mitar rediyo (layin RF) a ciki ko a saman tushen yumbu. Domin samun dumama da sanyaya cikin sauri, kauri na tushen yumbu ya kamata ya zama siriri, amma siriri sosai zai rage taurin.

Goyon bayan na'urar dumama yumbu gabaɗaya ana yin ta ne da kayan yumbu tare da ma'aunin faɗaɗa zafi irin na tushe. Na'urar dumama tana ɗaukar wani tsari na musamman na ƙasan haɗin shaft don kare tashoshi da wayoyi daga tasirin plasma da iskar gas mai lalata. An sanya wa tallafin kayan shigar iskar gas da bututun fitarwa don tabbatar da yanayin zafi iri ɗaya na na'urar dumama. Tushen da tallafin an haɗa su da sinadarai ta hanyar haɗa su da wani Layer na haɗin kai.

Ana iya yin hita ta yumbu da yumbu kamar su aluminum nitride (AlN), silicon nitride (Si3N4), da alumina (Al2O3). Daga cikinsu, AlN shine mafi kyawun zaɓi ga hita ta yumbu. Idan aka kwatanta da sauran kayan, yumbu na AlN na VET Energy yana da halaye masu zuwa:
(1) Kyakkyawan watsawar zafi;
(2) Daidaita ma'aunin faɗaɗa zafi da kayan silicon na semiconductor;
(3) Kyakkyawan halayen injiniya, kyakkyawan juriya ga lalacewa, da cikakkun halayen injiniya sun fi beryllium oxide kyau kuma daidai yake da aluminum oxide;
(4) Kyakkyawan cikakkun kayan lantarki, ingantaccen rufin lantarki da ƙarancin asarar dielectric;
(5) Ba ya da guba kuma ba ya cutar da muhalli.