Wāhanga Whakamahana Wafer Uku AlN Alumina
I roto i te hangahanga haurua-ira, me tukatuka ngā papa i roto i ngā tukanga maha, pērā i te whakatakoto kiriata angiangi, te whakairo, me ētahi atu. I roto i ēnei hononga, me whakamahana ngā papa ki tētahi pāmahana, ā, he tino whakaritenga mō te pāmahana, nā te mea he tino pānga nui te ōritetanga o te pāmahana ki te hua o te hua, ā, he mea nui ngā wāhanga whakamahana.
Whakamahana ukuka whakamahia tika ki te rūma tukatuka, ā, ka pā tika ki te wafer. Ehara i te mea ko te wafer anake te mea e kawe ana i te wafer, engari ka whakarite hoki kia pumau, kia ōrite hoki te pāmahana tukatuka o te wafer. He wāhanga matua ēnei i roto i ngā taputapu whakatakotoranga kiriata angiangi haurua-haurua!
Kei roto i te whakamahana uku he turanga uku hei tautoko i te papa whakarewa me te tinana tautoko porotaka i te taha o muri hei tautoko i a ia. Haunga te huānga ātete (paparanga whakamahana) mō te whakamahana, kei reira anō ngā irahiko auau reo irirangi (paparanga RF) i roto, i runga rānei i te mata o te turanga uku. Hei whakatutuki i te whakamahana tere me te whakamatao, me angiangi te matotoru o te turanga uku, engari ki te angiangi rawa ka whakaitihia te pakari.
Ko te tautoko o te whakamahana uku he mea hanga i te rauemi uku, he rite te tauwehenga whānui wera ki tērā o te turanga. He hanganga ahurei tō te whakamahana, he raro hononga poutū hei tiaki i ngā pito me ngā waea mai i ngā pānga o te plasma me ngā hau matū waikura. He paipa hau whakawhiti wera me te paipa whakaputa hei whakarite i te pāmahana ōrite o te whakamahana. He paparanga hononga te hononga matū o te turanga me te tautoko.
Ka taea te hanga i te whakamahana uku mai i ngā uku pēnei i te konumohe nitride (AlN), te silicon nitride (Si3N4), me te alumina (Al2O3). I roto i ēnei, ko te AlN te whiringa pai rawa atu mō ngā whakamahana uku. Ki te whakatauritea ki ētahi atu rauemi, ko ngā āhuatanga o te uku AlN a VET Energy e whai ake nei:
(1) He pai te kawe wera;
(2) Te tauwehenga whānui wera e ōrite ana ki ngā rauemi silicon semiconductor;
(3) He pai ake ngā āhuatanga miihini pai, te ātete kakahu pai, me ngā āhuatanga miihini whānui i te waikura beryllium, ā, he rite ki te waikura konumohe;
(4) He tino pai ngā āhuatanga hiko whānui, he pai te ārai hiko me te iti o te mate hiko-kore;
(5) Kāore he paitini, ā, he pai hoki mō te taiao.
Pepa Raraunga o ngā Rauemi Uku
| Taonga | 95% Arumina | 99% Arumina | Zirconia | Karāhe silicon | HirakaNeke | KonumoheNeke |
| Tae | mā | Kōwhai mārama | mā | mangu | mangu | hina |
| Kiato (g/cm3) | 3.7 karamu/cm3 | 3.9 karamu/cm3 | 6.02 karamu/cm3 | 3.2 karamu/cm3 | 3.25g/cm3 | 3.2 karamu/cm3 |
| Te mimiti wai | 0% | 0% | 0% | 0% | 0% | 0% |
| Te pakeketanga (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - |
| Kaha Whakapiko (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa |
| Kaha Whakapūmau (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - |
| Te Tauwehenga o te Āhuatanga o Young | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa |
| Te Ōwehenga a Poisson | 0.23 | 0.23 | 0.25 | 0.14 | 0.24 | 0.24 |
| Te Arahi Wera | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C |
| Kaha Whakakorehiko | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Ātete Rōrahi (25 ℃) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm |
He kaihanga ngaio a VET Energy e arotahi ana ki te R&D me te hanga rauemi matatau teitei pēnei i te graphite, te silicon carbide, te quartz, tae atu ki te maimoatanga rauemi pēnei i te paninga SiC, te paninga TaC, te paninga waro karāhe, te paninga waro pyrolytic, me ētahi atu. E whakamahia whānuitia ana ēnei hua i roto i te photovoltaic, te semiconductor, te pūngao hou, te whakarewa, me ētahi atu.
Nō ngā umanga rangahau ā-rohe matua tā mātou tīma hangarau, ā, ka taea e rātou te whakarato i ngā otinga rauemi ngaio ake māu.
Ko ngā painga o VET Energy ko:
• He wheketere ake, he taiwhanga ngaio hoki;
• Ngā taumata parakore me te kounga matua o te ahumahi;
• Utu whakataetae me te wā tuku tere;
• Ngā hononga mahi tahi maha puta noa i te ao;
Nau mai ki te toro mai ki tā mātou wheketere me te taiwhanga i ngā wā katoa!
