Ihe na-ekpo ọkụ Wafer Seramiiki AlN Alumina
N'imepụta semiconductor, a chọrọ ka a na-ahazi wafers n'ọtụtụ usoro, dịka itinye ihe nkiri dị gịrịgịrị, ịcha ihe, wdg. N'ime njikọ ndị a, a chọrọ ka a na-ekpo ọkụ wafers ruo okpomọkụ ụfọdụ, e nwekwara ihe achọrọ siri ike maka okpomọkụ, n'ihi na otu okpomọkụ si dị nwere mmetụta dị oke mkpa na mmepụta ngwaahịa, ihe ndị na-ekpo ọkụ dịkwa oke mkpa.
Ihe na-ekpo ọkụ seramiikiA na-etinye ya ozugbo na ụlọ ọrụ nhazi ahụ ma na-emetụ aka kpọmkwem na wafer ahụ. Ha anaghị ebu wafer ahụ naanị, kamakwa ha na-ahụ na wafer ahụ nwetara okpomọkụ usoro kwụsiri ike ma dị otu. Ha bụ ihe dị mkpa na ngwa semiconductor dị gịrịgịrị nke na-etinye ihe nkiri!
Ihe na-ekpo ọkụ seramiiki ahụ nwere ntọala seramiiki nke na-akwado wafer na ahụ nkwado cylindrical n'azụ nke na-akwado ya. Na mgbakwunye na ihe na-eguzogide (akwa ọkụ) maka ikpo ọkụ, enwerekwa elektrọd ugboro redio (oyi akwa RF) n'ime ma ọ bụ n'elu ntọala seramiiki ahụ. Iji nweta ọkụ na oyi ngwa ngwa, ọkpụrụkpụ nke ntọala seramiiki kwesịrị ịdị gịrịgịrị, mana ọ ga-ebelatakwa ike siri ike.
A na-ejikarị ihe seramiiki eme ihe nkwado nke ihe na-ekpo ọkụ seramiiki, nke nwere oke mgbasa okpomọkụ yiri nke ntọala ahụ. Ihe na-ekpo ọkụ na-eji usoro pụrụ iche nke ala njikọ shaft iji chebe njedebe na waya site na mmetụta nke plasma na gas kemịkalụ na-emebi emebi. Ihe nkwado ahụ nwere ụzọ gas na-abanye na okpomọkụ na paịpụ ọpụpụ iji hụ na okpomọkụ otu nke ihe na-ekpo ọkụ ahụ dị. A na-ejikọta ntọala na nkwado ahụ na oyi akwa njikọ kemịkalụ.
A pụrụ iji seramiiki dịka aluminum nitride (AlN), silicon nitride (Si3N4), na alumina (Al2O3) mee ihe na-ekpo ọkụ seramiiki. N'ime ha, AlN bụ nhọrọ kacha mma maka ihe na-ekpo ọkụ seramiiki. Ma e jiri ya tụnyere ihe ndị ọzọ, seramiiki AlN nke VET Energy nwere njirimara ndị a:
(1) Ezigbo ike okpomọkụ;
(2) Ndakọrịta nke ihe ndị metụtara mgbasa okpomọkụ na ihe ndị metụtara silikọn semiconductor;
(3) Ezigbo ihe eji arụ ọrụ, ezigbo ike iguzogide iyi, na ihe eji arụ ọrụ zuru oke dị mma karịa beryllium oxide ma ha nhata aluminum oxide;
(4) Njirimara eletriki zuru oke, mkpuchi eletriki dị mma na obere mfu dielectric;
(5) Enweghị nsí na gburugburu ebe obibi.
Mpempe akwụkwọ data nke ihe seramiiki
| ihe | 95% alumina | 99% alumina | Zirconia | Silicon carbide | SilikọnNnjem ntụrụndụ | AluminomNnjem ntụrụndụ |
| Agba | ọcha | Ọcha dị mfe | ọcha | oji | oji | isi awọ |
| Njupụta (g/cm3) | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 |
| Mmịpụta Mmiri | 0% | 0% | 0% | 0% | 0% | 0% |
| Ike siri ike (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - |
| Ike nke Flexural (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa |
| Ike Mkpakọ (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - |
| Modulu nke Nkịtị nke Young | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa |
| Oke Poisson | 0.23 | 0.23 | 0.25 | 0.14 | 0.24 | 0.24 |
| Ọgbakọ okpomọkụ | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C |
| Ike Dielectric | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Nguzogide olu (25℃) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm |
VET Energy bụ ọkachamara na-emepụta ihe na-elekwasị anya na R&D na mmepụta nke ihe ndị dị elu dị ka graphite, silicon carbide, quartz, yana ọgwụgwọ ihe dịka mkpuchi SiC, mkpuchi TaC, mkpuchi carbon iko, mkpuchi carbon pyrolytic, wdg. A na-eji ngwaahịa ndị a eme ihe n'ọtụtụ ebe na fotovoltaic, semiconductor, ike ọhụrụ, metallurgy, wdg.
Ndị otu teknụzụ anyị sitere na ụlọ ọrụ nyocha kacha elu n'ime obodo, ha nwere ike inye gị azịza ihe ọkachamara karịa.
Uru ike VET gụnyere:
• Ụlọ ọrụ mmepụta ihe na ụlọ nyocha ọkachamara nke ya;
• Ọkwa na ịdị ọcha nke ụlọ ọrụ mmepụta ihe na-eduga n'ịdị ọcha;
• Ọnụ ahịa asọmpi & Oge nnyefe ngwa ngwa;
• Mmekọrịta dị iche iche n'etiti ụlọ ọrụ n'ụwa niile;
Anyị na-anabata gị ka ị gaa leta ụlọ ọrụ mmepụta ihe na ụlọ nyocha anyị n'oge ọ bụla!
