Ceramic Wafer Heater AlN Alumina Heating Element
Na semiconductor n'ichepụta, wafers mkpa ka-esichara na dị iche iche usoro, dị ka mkpa film deposition, etching, wdg Na njikọ ndị a, na wafers mkpa ka kpụ ọkụ n'ọnụ na a ụfọdụ okpomọkụ, na e nwere siri ike chọrọ maka okpomọkụ, n'ihi na uniformity nke okpomọkụ nwere mmetụta dị oke mkpa na ngwaahịa ngwaahịa, na kpo oku components dị mkpa.
Igwe ọkụ seramiikina-etinye aka ozugbo na ụlọ nhazi ahụ ma na-akpakọrịta kpọmkwem na wafer. Ọ bụghị nanị na ha na-ebu wafer, kamakwa hụ na wafer na-enweta okpomọkụ na usoro okpomọkụ. Ha bụ isi akụrụngwa na semiconductor mkpa ihe nkiri ntinye akụrụngwa!
Igwe ọkụ seramiiki na-agụnye ntọala seramiiki na-akwado wafer na ahụ nkwado cylindrical n'akụkụ azụ nke na-akwado ya. Na mgbakwunye na ihe nguzogide (okpukpu ikpo ọkụ) maka ikpo ọkụ, enwerekwa electrodes ugboro redio (RF oyi akwa) n'ime ma ọ bụ n'elu nke seramiiki. Iji nweta ngwa ngwa kpo oku na jụrụ oyi, ọkpụrụkpụ nke isi seramiiki kwesịrị ịdị gịrịgịrị, ma dị oke mkpa ga-ebelatakwa isi ike.
Nkwado nke ikpo ọkụ seramiiki na-ejikarị ihe seramiiki na-eme ka ọ bụrụ ihe na-emepụta ihe na-eme ka okpomọkụ dị ka nke isi. Igwe na-ekpo ọkụ na-eji usoro pụrụ iche nke ala njikọ ogwe aka iji chebe ọnụ na waya site na mmetụta nke plasma na gas chemical na-emebi emebi. A na-akwado nkwado ahụ na ntinye ọkụ na-ebufe gas na ọkpọkọ iji hụ na okpomọkụ nke okpomọkụ. Isi na nkwado na-ejikọta kemịkalụ na oyi akwa njikọ.
Enwere ike iji ceramik mee ihe na-ekpo ọkụ seramiiki dị ka aluminum nitride (AlN), silicon nitride (Si3N4), na alumina (Al2O3). N'ime ha, AlN bụ nhọrọ kacha mma maka ikpo ọkụ seramiiki. Tụnyere ihe ndị ọzọ, seramiiki VET Energy's AlN nwere njirimara ndị a:
(1) Ezi conductivity thermal;
(2) Ngwakọta mgbasawanye ọkụ dakọtara na ihe silicon semiconductor;
(3) Ngwongwo ihe eji arụ ọrụ dị mma, nkwụsi ike na-eyi nke ọma, na akụrụngwa akụrụngwa zuru oke dị mma karịa beryllium oxide na nhata oxide aluminum;
(4) Ngwongwo ọkụ eletrik zuru oke, ihe mkpuchi eletrik dị mma na ọnwụ dielectric dị ala;
(5) Na-adịghị egbu egbu na gburugburu ebe obibi enyi.
Mpempe akwụkwọ data nke ngwa seramiiki
| Ihe | 95% aluminum | 99% aluminum | Zirconia | Silicon carbide | SilikoniNitride | AluminomNitride |
| Agba | ọcha | Ọcha edo edo | ọcha | nwa | nwa | agba ntụ |
| Njupụta (g/cm3) | 3.7g / cm3 | 3.9g / cm3 | 6.02g / cm3 | 3.2g / cm3 | 3.25g / cm3 | 3.2g / cm3 |
| Mmiri Absorption | 0% | 0% | 0% | 0% | 0% | 0% |
| Isi ike (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - |
| Ike Flexural (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa |
| Ike mkpakọ (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - |
| Modul nke ntorobịa nke ngbanwe | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310 ~ 350GPa |
| Oke Poisson | 0.23 | 0.23 | 0.25 | 0.14 | 0.24 | 0.24 |
| Nrụpụta okpomọkụ | 20W/mºC | 32W/mºC | 3W/mºC | 50W/mºC | 25W/mºC | 150W/m°C |
| Ike Dielectric | 14KV / mm | 14KV / mm | 14KV / mm | 14KV / mm | 14KV / mm | 14KV / mm |
| Nkwụghachi olu (25 ℃) | > 1014Ω·cm | > 1014Ω·cm | > 1014Ω·cm | > 105Ω·cm | > 1014Ω·cm | > 1014Ω·cm |
VET Energy bụ ọkachamara emeputa na-elekwasị anya na R & D na mmepụta nke elu-ọgwụgwụ elu ihe dị ka graphite, silicon carbide, quartz, nakwa dị ka ihe ọgwụgwọ dị ka SiC mkpuchi, TaC mkpuchi, glassy carbon mkpuchi, pyrolytic carbon mkpuchi, wdg The ngwaahịa na-ọtụtụ-eji na fotovoltaic, semiconductor, ọhụrụ ume, metallurgy, wdg.
Anyị oru otu si n'elu ụlọ nnyocha ụlọ ọrụ, nwere ike na-enye ndị ọzọ ọkachamara ihe ngwọta maka gị.
Uru VET Energy gụnyere:
• Ụlọ ọrụ mmepụta ihe na ụlọ nyocha ọkachamara;
• Ụlọ ọrụ na-eduga ọkwa dị ọcha na ịdị mma;
• Ọnụ ahịa asọmpi & oge nnyefe ngwa ngwa;
• Mmekọrịta ọtụtụ ụlọ ọrụ n'ụwa nile;
Anyị na-anabata gị ka vist anyị factory na laabu n'oge ọ bụla!
