Ceramic Wafer Heater AlN Alumina Heating Element

Ceramic Wafer Heater AlN Alumina Heating Element
Pakupanga semiconductor, zopyapyala zimafunika kukonzedwa mwanjira zosiyanasiyana, monga kuyika filimu yopyapyala, etching, ndi zina zambiri. Mu maulalo awa, zopyapyala zimafunika kutenthedwa mpaka kutentha kwina, ndipo pali zofunika kwambiri pakutentha, chifukwa kufanana kwa kutentha kumakhudza kwambiri zokolola zamafuta, ndipo zigawo zotentha ndizofunikira kwambiri.

Chowotcha cha ceramicimagwiritsidwa ntchito mwachindunji ku chipinda cha ndondomekoyi ndipo imakhudzana mwachindunji ndi mtanda. Sikuti amangonyamula mkate, komanso amaonetsetsa kuti chophikacho chimapeza kutentha kokhazikika komanso kofanana. Ndizigawo zazikulu mu zida za semiconductor zowonda zamakanema!

Chowotcha cha ceramic chimaphatikizapo maziko a ceramic omwe amathandizira chofufumitsa ndi thupi lothandizira la cylindrical kumbuyo lomwe limachirikiza. Kuphatikiza pa kukana (kuwotcha wosanjikiza) pakuwotcha, palinso ma radio frequency electrode (RF wosanjikiza) mkati kapena pamwamba pa maziko a ceramic. Kuti mukwaniritse kutentha ndi kuziziritsa mwachangu, makulidwe a maziko a ceramic ayenera kukhala ochepa, koma owonda kwambiri amachepetsanso kulimba.

Thandizo la chotenthetsera cha ceramic nthawi zambiri limapangidwa ndi zinthu za ceramic zomwe zimakhala ndi mphamvu yowonjezera kutentha mofanana ndi maziko. Chotenthetseracho chimatenga mawonekedwe apadera a shaft olowa pansi kuti ateteze ma terminals ndi mawaya ku zotsatira za plasma ndi mpweya wowononga wamankhwala. Thandizoli lili ndi polowera kutentha kwa gasi ndi chitoliro chotuluka kuti zitsimikizire kutentha kofanana kwa chotenthetsera. Maziko ndi chithandizo zimagwirizanitsidwa ndi mankhwala ndi wosanjikiza womangira.

Chowotcha cha ceramic chikhoza kupangidwa ndi zitsulo monga aluminium nitride (AlN), silicon nitride (Si3N4), ndi alumina (Al2O3). Pakati pawo, AlN ndiye chisankho chabwino kwambiri pazowotcha za ceramic. Poyerekeza ndi zida zina, VET Energy's AlN ceramic ili ndi izi:
(1) Good matenthedwe madutsidwe;
(2) Zofananira ndi kuchuluka kwa matenthedwe kwa zida za semiconductor silicon;
(3) Zinthu zamakina zabwino, kukana kwamphamvu kwambiri, komanso makina amakina ambiri ndizabwino kuposa beryllium oxide komanso wofanana ndi aluminium oxide;
(4) Zabwino kwambiri zonse zamagetsi zamagetsi, kutchinjiriza kwamagetsi kwambiri komanso kutayika kwa dielectric;
(5) Zopanda poizoni komanso zachilengedwe.