Chotenthetsera cha Ceramic Wafer AlN Alumina Heating Element

Chotenthetsera cha Ceramic Wafer AlN Alumina Heating Element
Pakupanga zinthu za semiconductor, ma wafer amafunika kukonzedwa m'njira zosiyanasiyana, monga kuyika filimu yopyapyala, kupukuta, ndi zina zotero. Mu maulalo awa, ma wafer amafunika kutenthedwa kutentha kwina, ndipo pali zofunikira kwambiri pa kutentha, chifukwa kufanana kwa kutentha kumakhudza kwambiri phindu la zinthu, ndipo zigawo zotenthetsera ndizofunikira kwambiri.

Chotenthetsera chadothiimayikidwa mwachindunji ku chipinda chogwirira ntchito ndipo imakhudzana mwachindunji ndi wafer. Sikuti imangonyamula wafer yokha, komanso imawonetsetsa kuti wafer imapeza kutentha kokhazikika komanso kofanana. Ndi zigawo zofunika kwambiri mu zida zosungira filimu yopyapyala ya semiconductor!

Chotenthetsera cha ceramic chimaphatikizapo maziko a ceramic omwe amathandizira wafer ndi thupi lochirikiza la cylindrical kumbuyo lomwe limachirikiza. Kuphatikiza pa chinthu chotsutsa (chotenthetsera) chotenthetsera, palinso ma electrode a radio frequency (RF layer) mkati kapena pamwamba pa maziko a ceramic. Kuti kutentha ndi kuziziritsa mwachangu, makulidwe a maziko a ceramic ayenera kukhala ochepa, koma ochepa kwambiri amachepetsanso kuuma.

Chithandizo cha chotenthetsera cha ceramic nthawi zambiri chimapangidwa ndi zinthu za ceramic zomwe zimakhala ndi mphamvu yowonjezera kutentha yofanana ndi ya maziko. Chotenthetseracho chimagwiritsa ntchito kapangidwe kapadera ka pansi pa shaft kuti chiteteze ma terminals ndi mawaya ku zotsatira za plasma ndi mpweya wa mankhwala owononga. Chothandiziracho chili ndi cholowera cha gasi chotenthetsera kutentha ndi chitoliro chotulukira kuti zitsimikizire kutentha kofanana kwa chotenthetseracho. Pansi ndi chithandizocho zimalumikizidwa ndi mankhwala ndi gawo lolumikizira.

Chotenthetsera cha ceramic chingapangidwe ndi zotengera monga aluminiyamu nitride (AlN), silicon nitride (Si3N4), ndi alumina (Al2O3). Pakati pawo, AlN ndiye chisankho chabwino kwambiri cha zotenthetsera za ceramic. Poyerekeza ndi zipangizo zina, ceramic ya VET Energy ya AlN ili ndi makhalidwe awa:
(1) Kupereka mphamvu yabwino ya kutentha;
(2) Kugwirizana kwa kutentha koyenera ndi zinthu za silikoni ya semiconductor;
(3) Makhalidwe abwino a makina, kukana kuwonongeka bwino, komanso makhalidwe onse a makina ndi abwino kuposa beryllium oxide ndipo ndi ofanana ndi aluminiyamu oxide;
(4) Makhalidwe abwino kwambiri amagetsi, kutchinjiriza kwamagetsi kwabwino kwambiri komanso kutayika kochepa kwa dielectric;
(5) Sizowononga komanso siziwononga chilengedwe.