Ceramic Wafer Heater AlN Alumina Ubushyuhe

Ceramic Wafer Heater AlN Alumina Ubushyuhe
Mu gukora semiconductor, wafers igomba gutunganywa mubikorwa bitandukanye, nko gushira firime yoroheje, gutobora, nibindi. Muri aya masano, waferi igomba gushyuha kubushyuhe runaka, kandi haribisabwa cyane kubushyuhe, kuko uburinganire bwubushyuhe bugira ingaruka zikomeye kumusaruro wibicuruzwa, kandi ibice byo gushyushya nibyingenzi.

Amashanyarazini Byakoreshejwe Kuri Byumba Byatunganijwe kandi biri muburyo butaziguye na wafer. Ntabwo batwara wafer gusa, ahubwo banemeza ko wafer ibona ubushyuhe buhamye kandi bumwe. Nibintu byingenzi mubikoresho bya semiconductor yoroheje ya firime!

Ubushyuhe bwa ceramic burimo ceramic base ishyigikira wafer hamwe numubiri ushyigikira silindrike kuruhande rwinyuma rushyigikiye. Usibye ikintu cyo kurwanya (layer layer) yo gushyushya, hari na radiyo yumurongo wa electrode (RF layer) imbere cyangwa hejuru yububiko bwa ceramic. Kugirango ugere ku bushyuhe bwihuse no gukonjesha, ubunini bwibanze bwa ceramic bugomba kuba buke, ariko binanutse cyane nabyo bizagabanya ubukana.

Inkunga yubushyuhe bwa ceramic mubusanzwe ikozwe mubikoresho byubutaka hamwe na coefficente yo kwagura ubushyuhe busa nubwa base. Ubushuhe bufata imiterere yihariye yumutwe wo munsi kugirango urinde insinga ninsinga ingaruka za plasma na gaze yangiza. Inkunga ifite ibikoresho byohereza ubushyuhe hamwe nu muyoboro usohoka kugirango ubushyuhe bumwe bushyushye. Shingiro ninkunga ihujwe muburyo bwa chimique hamwe.

Ubushyuhe bwa ceramic burashobora gukorwa mubutaka nka nitride ya aluminium (AlN), nitride ya silicon (Si3N4), na alumina (Al2O3). Muri byo, AlN ni amahitamo meza kubushyuhe bwa ceramic. Ugereranije nibindi bikoresho, VET Ingufu za AlN ceramic ifite ibiranga bikurikira:
(1) Amashanyarazi meza;
.
.
(4) Ibikoresho byiza byamashanyarazi byuzuye, kubika amashanyarazi meza no gutakaza dielectric;
(5) Ntabwo ari uburozi kandi bwangiza ibidukikije.