Igishyushya cya Ceramic Wafer AlN Alumina Element

Igishyushya cya Ceramic Wafer AlN Alumina Element
Mu nganda zikora ibikoresho bya semiconductor, wafer zigomba gutunganywa mu buryo butandukanye, nko gushyiramo agapira gato, gushushanya, nibindi. Muri izi sano, wafer zigomba gushyushywa ku bushyuhe runaka, kandi hari ibisabwa bikomeye ku bushyuhe, kuko ubushyuhe bungana bugira ingaruka zikomeye ku musaruro w'umusaruro, kandi ibice bishyushya ni ngombwa cyane.

Igishyushya cya keramikIshyirwa mu cyumba cyo gutunganya kandi ikora ku buryo butaziguye kuri wafer. Ntabwo itwara wafer gusa, ahubwo inatuma wafer ibona ubushyuhe buhamye kandi bungana. Ni ibice by'ingenzi mu bikoresho byo gushyiramo filime nto ya semiconductor!

Igishyushya cya ceramic kirimo ishingiro rya ceramic rishyigikira wafer n'umubiri ushyigikira inyuma uyishyigikira. Uretse ikintu gishyushya (urwego rushyushya) cyo gushyushya, hari kandi electrodes za radio frequency (urwego rwa RF) imbere cyangwa hejuru y'ishingiro rya ceramic. Kugira ngo ubushyuhe n'ubukonje byihute, ubunini bw'ishingiro rya ceramic bugomba kuba buto, ariko buto cyane bugabanya ubukana.

Inkunga y'icyuma gishyushya ubushyuhe muri rusange ikozwe mu bikoresho bya ceramic bifite ingano y'ubushyuhe isa n'iy'ishingiro. Igishyushya gikoresha imiterere yihariye y'igice cyo hasi cy'umugozi kugira ngo kirinde imiyoboro n'insinga ingaruka za plasma na gazi zangiza. Inkunga ifite umuyoboro w'umwuka winjiriramo ubushyuhe n'umuyoboro wo gusohokera kugira ngo habeho ubushyuhe bumwe bw'icyuma gishyushya ubushyuhe. Ishingiro n'inkunga bifatanye mu buryo bwa shimi hakoreshejwe urwego rwo guhuza.

Igishyushya cya keramike gishobora gukorwa muri keramike nka aluminiyumu nitride (AlN), silikoni nitride (Si3N4), na alumina (Al2O3). Muri byo, AlN ni yo mahitamo meza ku gishyushya cya keramike. Ugereranyije n'ibindi bikoresho, keramike ya VET Energy ya AlN ifite ibi bikurikira:
(1) Uburyo bwiza bwo gutwara ubushyuhe;
(2) Igipimo cyo kwagura ubushyuhe gihuye n'ibikoresho bya silikoni ya semiconductor;
(3) Imiterere myiza ya mekanike, ubushobozi bwo kudashira neza, n'imiterere y'imikorere yuzuye ya mekanike ni byiza kurusha okiside ya beriliyumu kandi bingana na okiside ya aluminiyumu;
(4) Imiterere myiza y'amashanyarazi yuzuye, ubushyuhe bwiza bw'amashanyarazi n'igihombo gito cya dielectric;
(5) Ntibihumanya kandi ntibingiza ibidukikije.